Synthesis, Characterization and Study of Influence of Pure TiO2 Nanoparticles Thin Film Developed By e-Beam Evaporation

doi:10.1016/j.matpr.2017.02.281

Materials Today: Proceedings

Volume 4, Issue 2, Part A, 2017, Pages 3832-3841

https://doi.org/10.1016/j.matpr.2017.02.281 Get rights and content

Abstract

Transparent titanium dioxide (TiO₂) thin films were prepared by e-beam evaporation technique on well-cleaned glass substrate. The pressure and deposition rate were at 3.0 x 10^-6 m.bar, 3 nm/s respectively. The structural characteristic of the film were analysed using GIXRD and Raman spectroscopy. The surface morphology of the film were analysed using Atomic Force Microscopy (AFM) and XRR. The Optical properties were studied using UV-Visible and Photoluminescence spectroscopy. The electrical properties of the film is studied. GIXRD studies showed that the as-deposited films were amorphous and crystallinity of the film was increased, increase of annealing temperature. The anatase phase of the TiO₂ film was conformed from the GIXRD and Raman data. The optical properties of the films varied with the annealing of film. Furthermore, the gas sensitivity, Self-Cleaning and wettability properties of the TiO₂ film studied. The sensitivity towards CO₂ gas has been measured under 50 ppm concentration and resistance of the film is near about 10⁹Ω and sensing current reached 14 nA of the films. Self-Cleaning property studied in presence of sun light, post annealed film shows high self-cleaning and wettability.

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Materials Today: Proceedings

Synthesis, Characterization and Study of Influence of Pure TiO2 Nanoparticles Thin Film Developed By e-Beam Evaporation

Abstract

Materials Research Bulletin

San-Yan Chen and Yun-Chieh Yeh Ceramics International

J. of colloidal and Interface Science

J. of Non-Crystalline Solids

Vacuum

J. O-S Appl Surf Sci

J. of Optoelectronics and Adv. Mate.

J. of Optoelectronics and Adv. Mate.

Digest J. of Nanomaterials and Biostructures

J Sol-Gel Sci Technol

Thin Solid Films (Electronics and Optics)

Materials Science

Cryst. Res. Technol.

Appl. Phys. A.

Synthesis, Characterization and Study of Influence of Pure TiO₂ Nanoparticles Thin Film Developed By e-Beam Evaporation