Spectral optical functions of silicon in the range of 1.13-4.96 eV at elevated temperatures

doi:10.1016/S0017-9310(96)00205-0

International Journal of Heat and Mass Transfer

Volume 40, Issue 7, May 1997, Pages 1591-1600

https://doi.org/10.1016/S0017-9310(96)00205-0 Get rights and content

Abstract

This work presents an experimental procedure for measuring high temperature spectral optical functions of materials. The complex refractive index is determined over a spectral range of 1.13-4.96 eV at high temperatures by ellipsometry in a reduced pressure, inert gas environment. On the basis of the measured complex refractive index, relevant optical functions such as the complex dielectric function, normal incidence reflectance, and absorption coefficient are also obtained. Silicon is selected due to the fact that, even though it has numerous applications in microelectronics fabrication and processing, the available spectral optical property data are incomplete at high temperatures. The experimental results are compared with the existing published data.

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^†: Visiting Research Associate, R & D Center, SAMSUNG ELECTROMECHANICS CO., LTD., Suwon, Korea.

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Spectral optical functions of silicon in the range of 1.13-4.96 eV at elevated temperatures

Abstract

International Journal of Heat and Mass Transfer

Ellipsometry and Polarized Light

Ellipsometry for Industrial Applications

Design and operation of an automated high-temperature ellipsometer

Journal of the Optical Society of America

Optical constants and temperature dependencies of atomically pure surfaces of geranium and silicon

Optical Spectroscopy (USSR)

Optical constants for silicon at 300 and 10K determined from 1.64 to 4.73 eV by ellipsometry

Journal of Applied Physics

Optical functions of silicon between 1.7 and 4.7 eV at elevated temperatures

Physical Review, B

The temperature dependence of the refractive index of silicon at elevated temperatures at several laser wavelengths

Journal of Applied Physics

Spectroscopic ellipsometry of solids