Elsevier

Thin Solid Films

Volume 519, Issue 1, 29 October 2010, Pages 244-250
Thin Solid Films

In-situ electrical resistance measurement of the selenization process in the CuInGa–Se system

https://doi.org/10.1016/j.tsf.2010.08.017Get rights and content

Abstract

In this work the selenization reactions and reaction paths in CuInxGa1-xSe2 thin films prepared by sputtering and post-selenization process are investigated. The in-situ electrical resistance measurement technique is applied to monitor all the selenization reactions. The crystal structure is determined by X-ray diffraction (XRD) measurement. From the analysis of resistance-temperature curves and the XRD patterns, the phase evolutions of various crystalline and selenization reaction paths have been obtained. From these measurements, the reaction mechanisms and kinetics in the CuInGa–Se system are further understood.

Introduction

Chalcopyrite CuInxGa1-xSe2(CIGS)thin film is a promising absorber for solar cells [1], [2], [3]. Sputtering and post-selenization have been well verified for large scale production of uniform CIGS thin films with a high deposition rate [4], [5]. The solar cell efficiency, however, is lower than that of the co-evaporated one [6]. This promotes future study of reaction mechanisms and kinetics of CIGS thin films prepared by sputtering and post-selenization process. We have investigated in detail the phase evolution during the selenization process, which has possible reactions such as Cu-Se, In-Se, Ga–Se, CuIn-Se and CuGa–Se. The results are helpful to comprehend the reaction mechanisms in the CuInGa–Se system, which will eventually advance the performance of the CIGS thin film solar cells prepared by sputtering and post-selenization process.

In our previous work [7], the Ga–Se reaction in the selenization process by in-situ resistance measurement has been investigated. We characterized element Se diffusion as well as the Ga–Se phase transformation during the thermal process. We found that the Ga–Se reaction rate decreases with increasing Ga selenization temperature. In-situ resistance measurement was applied to investigate the selenization process of co-evaporated CuInS2 [8], CuGaSe2 [9] and CuInSe2 [10] films as well as the stacked elemental layer film [11]. It is a powerful tool to reveal the reaction mechanisms of thin film formation. So in this work we use the in-situ resistance measurement to study the reaction mechanisms of selenization in CuInGa–Se system.

Section snippets

Experimental details

CuIn1-xGaxSe2 thin films were prepared by the two-stage method. In the first stage the precursors were prepared by DC magnetron sputtering from In or CuGa targets, which were sputtered onto unheated Mo-coated soda lime glass substrates in Argon ambience. The detailed sputtering process [12] and the preparation of Ga precursors [7] have been described previously. Six metallic precursors, Cu, In, Ga, CuIn, CuGa and CuInGa, were used for film preparation.

In the second stage of the process, the

Cu–Se reactions

The resistance of Cu–Se reaction versus temperature is recorded in Fig. 2(a). The resistance is almost a constant with temperature below 190 °C and it started increase dramatically with a peak resistance at 219 °C. It indicated the reaction of Cu–Se between 190 °C and 230 °C. The reaction resulted in Cu2-xSe, which was verified by XRD measurement. Furthermore, the resistance of Cu2-xSe was found to decrease with decreasing temperature as shown in Fig. 2(b).

The Cu–Se reaction time was short as shown

Conclusion

The in-situ resistance measurement was applied to investigate the reaction temperature of binary and ternary selenization reactions of the sputtered metallic precursors in the selenization process. From the XRD and GIXRD patterns, the phase evolutions and the reaction mechanisms of the binary and ternary selenization reaction processes were analyzed. It suggested that the quaternary compound CIGS has been formed from the solid solution of CuInSe2 and CuGaSe2 during the sputtering and

Acknowledgements

This work is supported by the National 863 Program of China (Grant No. 2004AA513020), the Specialized Research Fund for the Doctoral Program of Higher Education (No. 200800551008) and by the Scientific Research Foundation for Young Scholars (Grant No. J02050).

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