Numerical aperture invariant focus shaping using spirally polarized beams
Introduction
Beam shaping using spatially variant polarization has been of an increasing research interest in recent years. In dealing with two-dimensional configurations, radial and azimuthal polarizations are usually chosen as the polarization basis states due to symmetry considerations. Using this basis, the generalized cylindrical vector beam [1] has been proposed as a linear combination of radial and azimuthal components as shown in Fig. 1. Mathematically, the generalized cylindrical vector beam can be expressed as [1], where and are the radial and azimuthal basis polarizations, respectively. The relative strength of the radial and azimuthal components is determined by the rotation angle from the radial direction.
This generalized cylindrical vector beam is shown to be quite useful in beam shaping [1] under high numerical aperture (NA), which is due to the special focusing properties of radial and azimuthal polarization. (Here NA is defined as , where focusing in the air is assumed.) For a given (high) NA, the focal field intensity distribution of the radially polarized light has a peak at the center, contributed by the strong z-component [1], [2]; the focal pattern of the azimuthally polarized light has a null at the center, with only the transverse component and no z-component in place. So by changing the angle of the generalized cylindrical vector beam, we can balance the z-component and the transverse components to yield a flat-top focus. For example, in Ref. [1], Zhan and Leger have shown that for NA = 0.8, with the rotation angle of 24°, the focal intensity shape is flat-top, as is shown in Fig. 1b. Such uniform irradiance is very important in a variety of applications, such as laser micro machining [3], laser-assisted thermal annealing [4], optical recording [5] etc. Other beam shapes can also be realized by appropriate polarization modulation. For example, the annular-shaped spot resulting from the transverse-only polarization component has certain advantages in materials processing and micro-welding [6], [7]. One inconvenient aspect of this polarization beam shaping scheme involves adjusting the angle for different NA’s. Fig. 2 shows the NA dependence of the rotation angle for the generalized cylindrical vector beam to produce a flat-top focal pattern. It can be clearly seen in Fig. 2 that as the NA increases, the characteristic angle that achieves flat-top beam shaping also becomes larger. In practice, the changing of the angle is usually performed by mechanically rotating a wave-plate to some prescribed orientation.
In this paper, we propose another polarization beam shaping method based on the use of “spiral polarization”, which is an extension of the generalized cylindrical vector beam concept. By numerical simulation, we show that one such polarization family is capable of delivering the flat-top focal pattern invariant to NA, from NA = 0.82 up to NA = 0.95.
Section snippets
System configuration and numerical simulation
Spiral polarization is another kind of spatially variant polarization bearing radial symmetry. By extending the generalized cylindrical vector beam concept, we let the rotation angle be a function of radius , which typically has a larger value as increases. Thus the instantaneous electric vector at various points follows the shape of a spiral line, resulting in the coined name “spiral polarization”. Fig. 3 shows the schematic plots of the spiral polarization, which starts off almost
Discussion
Note that the functional form of to achieve NA-independent beam shaping needs to be selected carefully by simulation. However, the functional form of is by no means unique. There are two reasons for this. One is that the effect of different polarizations on spot shape is only significant at high numerical apertures where there are significant differences in the value of the z-component of polarization at the focused spot. The choice of polarization states at low NA’s has negligible
Conclusion
In this paper, spiral polarization is proposed as an extension to the well-known cylindrical vector beam. The focusing properties have been studied and according to numerical simulation, the flat-top shaped focus is achieved independent of NA over an extended range. This self-adjustment with NA is the unique property of the spiral polarization. The technique may find application under circumstances where very small focused spots with flat-tops are desired, and the exact numerical aperture is
Acknowledgement
The authors would like to thank Cymer Inc. for its generous support of this work.
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