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Fabrication and Application of Gel-Forming CeO2 Fixed Abrasive Tools for Quartz Glass Polishing

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Abstract

A gel-forming cerium dioxide (CeO2) fixed abrasive tool for quartz glass polishing was proposed to improve abrasive utilization. The effects of the solid content of polyvinyl alcohol (PVA) and phenolic (PF) resin on the mechanical properties, micromorphology, and friction properties of gel-forming CeO2 abrasive tools were analyzed. The effects of dispersant and coupling agents on the micromorphology of the gel-forming CeO2 abrasive tools were analyzed. The microstructure uniformity, hardness uniformity, and friction coefficient stability of the gel-forming and the hot pressing forming CeO2 abrasive tools were compared and analyzed. The polishing effects of the gel-forming CeO2 abrasive tools, hot pressing CeO2 abrasive tools and ceria slurry on quartz glass were compared. The results showed that when the solid content of PVA was 6 wt%, the solid content of PF was 8 wt%, the concentration of the PEI dispersant was 1 wt% and the KH550 coupling agent concentration was 1.5 wt%, the mechanical properties and friction performance of the gel-forming CeO2 abrasive tools is the best. Gel-forming abrasive tools were superior to hot pressing abrasive tools in terms of microstructure uniformity, hardness uniformity, and friction coefficient stability. The polishing experiments showed that after polishing by the gel-forming abrasive tool, the average surface roughness Ra reached 2.49 nm, which was better than polishing by the hot pressing abrasive tools and reached the polishing effect of ceria slurry. The flatness PV reached 0.660 µm, which was far better than that of ceria slurry.

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Acknowledgements

The authors gratefully acknowledge the financial support from the Natural Science Foundation of Zhejiang Province (No. LZY21E050004), Quzhou Science and Technology Planning Project (No. 2019K10).

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Authors and Affiliations

  1. College of Mechanical Engineering, Quzhou University, No. 78, North Jiuhua Road, Quzhou, 324000, Zhejiang, China

    Kaiping Feng, Tianchen Zhao, Tao Yin & Zhaozhong Zhou

  2. Ultra-Precision Machining Centre, Zhejiang University of Technology, No. 18, Chaowang Road, Hangzhou, 310014, Zhejiang, China

    Kaiping Feng & Binghai Lyu

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  1. Kaiping Feng
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Feng, K., Lyu, B., Zhao, T. et al. Fabrication and Application of Gel-Forming CeO2 Fixed Abrasive Tools for Quartz Glass Polishing. Int. J. Precis. Eng. Manuf. 23, 985–1002 (2022). https://doi.org/10.1007/s12541-022-00687-2

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