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Microring resonator for glucose sensing applications

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Abstract

Silicon nitride microring resonators were demonstrated as chemical sensors. The microring devices, with diameter of 100 μm, were fabricated using complementary metal oxide semiconductor (CMOS)-compatible technology, and a high Q factor of 15000 was realized with free spectrum range (FSR) of 2 nm. The structures were further packaged to perform as chemical sensors, and their functionality was proved using deionized water (DI water) and ethanol as detecting mediums. Lastly, the packaged chips were used to detect glucose solutions with various concentrations, and a detection capability of refractive index change of 10−3 refractive index unit (RIU) was obtained.

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Correspondence to Zhiping Zhou.

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Chen, Y., Li, Z., Yi, H. et al. Microring resonator for glucose sensing applications. Front. Optoelectron. China 2, 304–307 (2009). https://doi.org/10.1007/s12200-009-0047-3

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  • DOI: https://doi.org/10.1007/s12200-009-0047-3

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