Abstract
Silicon nitride microring resonators were demonstrated as chemical sensors. The microring devices, with diameter of 100 μm, were fabricated using complementary metal oxide semiconductor (CMOS)-compatible technology, and a high Q factor of 15000 was realized with free spectrum range (FSR) of 2 nm. The structures were further packaged to perform as chemical sensors, and their functionality was proved using deionized water (DI water) and ethanol as detecting mediums. Lastly, the packaged chips were used to detect glucose solutions with various concentrations, and a detection capability of refractive index change of 10−3 refractive index unit (RIU) was obtained.
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Robinson G. The commercial development of planar optical biosensors. Sensors and Actuators B: Chemical, 1995, 29(1-3): 31–36
Homola J. Present and future of surface plasmon resonance biosensors. Analytical and Bioanalytical Chemistry, 2003, 377(3): 528–539
Hradetzky D, Mueller C, Reinecke H. Interferometric label-free biomolecular detection system. Journal of Optics A: Pure and Applied Optics, 2006, 8(7): S360–S364
Chao C Y, Fung W, Guo L J. Polymer microring resonators for biochemical sensing applications. IEEE Journal of Selected Topics in Quantum Electronics, 2006, 12(1): 134–142
Tishinin D V, Dapkus P D, Bond A E, Kim I, Lin C K, O’Brien J. Vertical resonant couplers with precise coupling efficiency control fabricated by wafer bonding. IEEE Photonics Technology Letters, 1999, 11(8): 1003–1005
Tee C W, Williams K A, Penty RV, White I H. Fabrication-tolerant active-passive integration scheme for vertically coupled microring resonator. IEEE Journal of Selected Topics in Quantum Electronics, 2006, 12(1): 108–116
Grover R, Absil P P, Van V, Hryniewicz J V, Little B E, King O, Johnson F G, Calhoun L C, Ho P T. Vertically coupled GaAs-AlGaAs and GaInAsP-InP microring resonators. In: Proceedings of Optical Fiber Communication Conference and Exhibit. Anaheim: IEEE, 2001, 3: WK2-1–WK2-2
Little B E, Chu S T. Toward very large-scale integrated photonics. Optics & Photonics News, 2000, 11(11): 24–28
Bourdon G, Alibert G, Bequin A, Bellman B, Guiot E. Ultralow loss ring resonators using 3.5% index-contrast Ge-doped silica waveguides. IEEE Photonics Technology Letters, 2003, 15(5): 709–711
Rabiei P, Steier W H, Zhang C, Dalton L R. Polymer micro-ring filters and modulators. Journal of Lightwave Technology, 2002, 20(11): 1968–1975
Chen W Y, Grover R, Ibrahim T A, Van V, Ho P T. Compact single-mode benzocyclobutene microracetrack resonators. In: Proceedings of Integrated Photonics Research. Washington, D.C.: Optical Society of America, 2003, ITuG2
Kiyat I, Kocabas C, Aydinli A. Integrated micro ring resonator displacement sensor for scanning probe microscopies. Journal of Micromechanics and Microengineering, 2004, 14(3): 374–381
De Vos K, Bartolozzi I, Schacht E, Bienstman P, Baets R. Siliconon-insulator microring resonator for sensitive and label-free biosensing. Optics Express, 2007, 15(12): 7610–7615
Krioukov E, Klunder D J W, Driessen A, Greve J, Otto C. Sensor based on an integrated optical microcavity. Optics letters, 2002, 27(7): 512–514
Ksendzov A, Lin Y. Integrated optics ring-resonator sensors for protein detection. Optics letters, 2005, 30(24): 3344–3346
Guo J P, Shaw M J, Vawter G A, Hadley G R, Esherick P, Sullivan C T. High-Q microring resonator for biochemical sensors. Proceedings of SPIE, 2005, 5728: 83–92
Yalçin A, Popat K C, Aldridge J C, Desai T A, Hryniewicz J, Chbouki N, Little B E, Oliver K, Van V, Chu S, Gill D, Anthes-Washburn M, Unlu M S, Goldberg B B. Optical sensing of biomolecules using microring resonators. IEEE Journal of Selected Topics in Quantum Electronics, 2006, 12(1): 148–155
Chao C Y, Guo L J. Biochemical sensors based on polymer microrings with sharp asymmetrical resonance. Applied Physics Letters, 2003, 83(8): 1527–1529
Chao C Y, Fung W, Guo L J. Polymer microring resonators for biochemical sensing applications. IEEE Journal of Selected Topics in Quantum Electronics, 2006, 12(1): 134–142
Liang X P, Zhang Q Z, Jiang H B. Quantitative reconstruction of refractive index distribution and imaging of glucose concentration by using diffusing light. Applied Optics, 2006, 45(32): 8360–8365
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Chen, Y., Li, Z., Yi, H. et al. Microring resonator for glucose sensing applications. Front. Optoelectron. China 2, 304–307 (2009). https://doi.org/10.1007/s12200-009-0047-3
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DOI: https://doi.org/10.1007/s12200-009-0047-3