Abstract
Self-organized InGaAs/GaAs quantum dots (QDs) stacked multilayers have been prepared by solid source molecular beam epitaxy. Cross-sectional transmission electron microscopy shows that the InGaAs QDs are nearly perfectly vertically aligned in the growth direction [100]. The filtering effect on the QDs distribution is found to be the dominant mechanism leading to vertical alignment and a highly uniform size distribution. Moreover, we observe a distinct infrared absorption from the sample in the range of 8.6–10.7 µm. This indicates the potential of QDs multilayer structure for use as infrared photodetector.
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Zhuang, Q.D., Li, J.M., Zeng, Y.P. et al. Structural and infrared absorption properties of self-organized InGaAs/GaAs quantum dots multilayers. J. Electron. Mater. 28, 503–505 (1999). https://doi.org/10.1007/s11664-999-0102-2
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DOI: https://doi.org/10.1007/s11664-999-0102-2