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Plasma-Chemical Deposition of Anti-Reflection and Protective Coating for Infrared Optics

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Russian Physics Journal Aims and scope

The films of amorphous hydrogenated carbon doped with Si and O were deposited onto the sample of crystalline silicon by method of plasma-chemical deposition in the mix of polyphenyl methylsiloxane vapors and argon. Physico-mechanical and optical properties of films were examined for their use as anti-reflection and protective coatings in infrared optics devices. Film transparency in the wavelength range of 2.5–8 μm was measured by method of infrared spectroscopy with a Fourier transform. The structure and composition of films were studied by methods of Raman and X-ray photoelectron spectroscopy. Hardness and other mechanical properties of films were determined by nanoindentation. It was shown that the double-sided deposition of a-C:H:SiOx films onto Si plates allows increasing their integrated transmission in the wavelength region of 3– 5 μm from 50 to 87%. The films possess excellent mechanical characteristics, thermal stability in the temperature range from room temperature to 500°С, and resistance to aqueous solutions of salt.

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Authors and Affiliations

  1. Institute of High-Current Electronics of the Siberian Branch of the Russian Academy of Sciences, Tomsk, Russia

    A. S. Grenaderov, K. V. Oskomov & A. A. Solovyev

  2. Boreskov Institute of Catalysis of the Siberian Branch of the Russian Academy of Sciences, Novosibirsk, Russia

    A. V. Selivanova

  3. National Research Tomsk Polytechnic University, Tomsk, Russia

    A. A. Solovyev & M. E. Konishchev

Authors
  1. A. S. Grenaderov
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  2. K. V. Oskomov
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  3. A. A. Solovyev
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  4. A. V. Selivanova
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  5. M. E. Konishchev
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Corresponding authors

Correspondence to A. S. Grenaderov, K. V. Oskomov, A. A. Solovyev, A. V. Selivanova or M. E. Konishchev.

Additional information

Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 11, pp. 143–150, November, 2019.

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Grenaderov, A.S., Oskomov, K.V., Solovyev, A.A. et al. Plasma-Chemical Deposition of Anti-Reflection and Protective Coating for Infrared Optics. Russ Phys J 62, 2112–2120 (2020). https://doi.org/10.1007/s11182-020-01954-3

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  • DOI: https://doi.org/10.1007/s11182-020-01954-3

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