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Stress evolution in AlN and GaN grown on Si(111): experiments and theoretical modeling

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Abstract

We introduce a temperature dependent anisotropic model for the stresses in gallium nitride (GaN) and aluminum nitride (AlN) films grown on Si(111) substrates and their epiwafer bow effects caused by thermal mismatch between the film and substrate. The model is verified by Raman scattering experiments with carefully prepared samples. The stresses analyzed from Raman frequency shifts in experiments show excellent agreement with the stresses from finite element modeling simulations. The interaction force mechanisms and the impact factors are compared. The analysis provides an insight in understanding the defect behaviors in film growth. Our model could be useful in the evaluation of the residual stresses and deformations in film growth control, post thermal process in device manufacture, packaging, and reliability estimation.

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Acknowledgments

This work is supported by National Hightech Program (863) with contract number of SS2015AA041802. Prof. Qian Sun is also grateful to the financial support from the National Natural Science Foundation of China (Grant Nos. 61534007, 61404156, and 61522407), the National High Technology Research and Development Program of China (863 Program) (Grant No. 2013AA031901), Suzhou Science and Technology Program (Grant No. ZXG2013042), and the Recruitment Program of Global Experts (1000 Youth Talents Plan). Authors are also grateful to the Analytical and Testing Center, Huazhong University of Science and Technology for technical assistance.

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Authors and Affiliations

  1. Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, 430074, China

    Yiquan Dai, Shuiming Li & Weihui Wang

  2. Key Laboratory of Nanodevices and Applications, Chinese Academy of Sciences (CAS), Suzhou, 215123, China

    Shuiming Li, Hongwei Gao & Qian Sun

  3. Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS), Suzhou, 215123, China

    Shuiming Li, Hongwei Gao & Qian Sun

  4. School of Power and Mechanical Engineering, Wuhan University, Wuhan, Hubei, 430072, China

    Qing Peng, Chengqun Gui, Zhengfang Qian & Sheng Liu

  5. Department of Mechanical, Aerospace and Nuclear Engineering, Rensselaer Polytechnic Institute, Troy, NY, 12180, USA

    Qing Peng

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  1. Yiquan Dai
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Correspondence to Yiquan Dai or Sheng Liu.

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Dai, Y., Li, S., Gao, H. et al. Stress evolution in AlN and GaN grown on Si(111): experiments and theoretical modeling. J Mater Sci: Mater Electron 27, 2004–2013 (2016). https://doi.org/10.1007/s10854-015-3984-1

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  • DOI: https://doi.org/10.1007/s10854-015-3984-1

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