Abstract
There is a clear need for thick PZT films (10–100 μm) in micro-electromechanical systems (MEMS). Some applications, like high frequency transducers operating in the thickness mode, require frequencies in the MHz region and thus thicker films, which in addition will provide more power. Thicker films are also important in actuator systems and sensors as it will generate more force and voltage, respectively. Integration of complex structures of thick films in thick films in MEMS is challenging. The use of normal thin film patterning techniques is difficult for thick films due to the amount of material that has to be removed and the isotropic nature of wet etching. A new patterning technique suitable for composite thick films using an epoxy mould is presented. By filling a micro mould of SU-8 photoresist with PZT paste details down to 20 μm with vertical feature walls could be patterned in a 15 μm thick film.
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P. Muralt, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 47, 903 (2000)
P. Muralt, J. Micromechanics and Microengineering 136 (2000)
Q. Zhang, R.W. Whatmore, Journal of Physics D: Applied Physics 34, 2296 (2001)
N. Setter, J. Eur. Ceram. Soc. 21, 1279 (2001)
P. Muralt, J. Baborowski, Journal of Electroceramics 12, 101 (2004)
S. Trolier-McKinstry, P. Muralt, Journal of Electroceramics 12, 7 (2004)
T. Maeder, P. Muralt, M. Kohli, A. Kholkin, N. Setter, Br. Ceram. Proc. 54, 207 (1995)
Z. Huang, Q. Zhang, R.W. Whatmore, J. Appl. Phys. 85, 7355 (1999)
A. Seifert, N. Ledermann, S. Hiboux, J. Baborowski, P. Muralt, N. Setter, Integr. Ferroelectr. 35, 159 (2001)
R.W. Whatmore, Q. Zhang, Z. Huang, R.A. Dorey, Mater Sci Semicond Process 5, 65 (2002)
N. Ledermann, P. Muralt, J. Baborowski, S. Gentil, K. Mukati, M. Cantoni, A. Seifert, N. Setter, Sens. Actuators A Phys. A105, 162 (2003)
J.H. Choi, H.G. Kim, J. Appl. Phys. 74, 6413 (1993)
Y. Otani, S. Okamura, T. Shiosaki, Journal of Electroceramics 13, 15 (2004)
S. Matichyn, M. Lisker, M. Silinskas, B. Garke, E. Burte, Integr. Ferroelectr. 81, 289 (2006)
W. Biegel, R. Klarmann, M. Hanika, K. Sturm, B. Stritzker, Mater Sci Eng, B: Solid-State Mater. Adv. Technol. B56, 195 (1998)
Z.J. Wang, H. Kokawa, R. Maeda, Ceram. Int. 30, 1529 (2004)
N.M. White, J.D. Turner, Meas. Sci. Technol. 8, 1 (1997)
F. Duval, R. Dorey, R. Wright, Z. Huang, R. Whatmore, Integr. Ferroelectr. 63, 27 (2004)
H.D. Chen, K.R. Udayakumar, C.J. Gaskey, I.E. Cross, J.J. Bernstein, L.C. Niles, J. Am. Ceram. Soc. 79, 2189 (1996)
L. Simon, S. Le Dren, P. Gonnard, J. Eur. Ceram. Soc. 21, 1441 (2001)
J. Holc, M. Hrovat, M. Kosec, Mater. Res. Bull. 34, 2271 (1999)
P. Tran-Huu-Hue, F. Levassort, F. Vander Meulen, J. Holc, M. Kosec, M. Lethiecq, J. Eur. Ceram. Soc. 21, 1445 (2001)
D.L. Corker, R.W. Whatmore, E. Ringgaard, W.W. Wolny, J. Eur. Ceram. Soc. 20, 2039 (2000)
D.A. Barrow, T.E. Petroff, M. Sayer, Surf. Coat. Technol. 76–77, 113 (1995)
D.A. Barrow, T.E. Petroff, R.P. Tandon, M. Sayer, J. Appl. Phys. 81, 876 (1997)
M. Es-Souni, A. Piorra, C.H. Solterbeck, Ferroelectrics 293, 63 (2003)
C. Zhao, Z. Wang, W. Zhu, O. Tan, H. Hng, Ceram. Int. 30, 1925 (2004)
A. Wu, P.M. Vilarinho, I.M.M. Salvado, J.L. Baptista, C.M. de Jesus, M.F. da Silva, J. Eur. Ceram. Soc. 19, 1403 (1999)
D.L. Corker, Q. Zhang, R.W. Whatmore, C. Perrin, J. Eur. Ceram. Soc. 22, 383 (2002)
R.A. Dorey, F.F.C. Duval, R.D. Haigh, R.W. Whatmore, Ferroelectrics 267, 373 (2002)
R.A. Dorey, S.B. Stringfellow, R.W. Whatmore, J. Eur. Ceram. Soc. 22, 2921 (2002)
R.A. Dorey, R.W. Whatmore, J. Eur. Ceram. Soc. 24, 1091 (2004)
Q. Zhang, S. Corkovic, C.P. Shaw, Z. Huang, R.W. Whatmore, Thin Solid Films 488, 258 (2005)
F. Tyholdt, F. Calame, K. Prume, H. Ræder, P. Muralt, Journal of Electroceramics, DOI 10.1007/s10832-007-9037-2 (2006)
L.P. Wang, R. Wolf, Q. Zhou, S. Trolier-McKinstry, R.J. Davis, Mater. Res. Soc. Symp. Proc. 657, EE5 39/1 (2001)
K. Zheng, J. Lu, J. Chu, Jpn. J. Appl. Phys. 43, 3934 (2004)
U.P. Schonholzer, R. Hummel, L.J. Gauckler, Adv. Mater. (Weinheim, Ger.) 12, 1261 (2000)
F.F.C. Duval, R.A. Dorey, R.W. Wright, Z. Huang, R.W. Whatmore, Journal of Electroceramics 13, 267 (2004)
J.-S. Kim, J.-W. Kang, J.-J. Kim, Jpn. J. Appl. Phys. 42, 1277 (2003)
Acknowledgements
This work was supported by the Research Council of Norway through the NANOMAT program.
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Tyholdt, F., Dorey, R.A. & Ræder, H. Novel patterning of composite thick film PZT. J Electroceram 19, 315–319 (2007). https://doi.org/10.1007/s10832-007-9318-9
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DOI: https://doi.org/10.1007/s10832-007-9318-9