Skip to main content
SpringerLink
Log in

Terahertz Bandpass Frequency Selective Surfaces on Glass Substrates Using a Wet Micromachining Process

  • Published:
Journal of Infrared, Millimeter, and Terahertz Waves Aims and scope Submit manuscript

Abstract

This paper presents terahertz (THz) frequency selective surfaces (FSS) implemented on glass substrate using standard microfabrication techniques. These FSS structures are designed for frequencies around 0.8 THz. A fabrication process is proposed where a 100-μm-thick glass substrate is formed through the HF etching of a standard 500-μm-thick low cost glass wafer. Using this fabrication process, three separate robust designs consisting of single-layer FSS are investigated using high-frequency structural simulator (HFSS). Based on the simulation results, the first design consists of a circular ring slot in a square metallic structure on top of a 100-μm-thick Pyrex glass substrate with 70% transmission bandwidth of approximately 0.07 THz, which remains nearly constant till 30° angle of incidence. The second design consists of a tripole structure on top of a 100-μm-thick Pyrex glass substrate with 65% transmission bandwidth of 0.035 THz, which remains nearly constant till 30° angle of incidence. The third structure consists of a triangular ring slot in a square metal on top of a 100-μm-thick Pyrex glass substrate with 70% transmission bandwidth of 0.051 THz, which remains nearly constant up to 20° angle of incidence. These designs show that the reflections from samples can be reduced compared to the conventional sample holders used in THz spectroscopy applications, by using single layer FSS structures manufactured through a relatively simple fabrication process. Practically, these structures are achieved on a fabricated 285-μm-thick glass substrate. Taking into account the losses and discrepancies in the substrate thickness, the measured results are in good agreement with the electromagnetic simulations.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12
Fig. 13
Fig. 14
Fig. 15
Fig. 16
Fig. 17
Fig. 18
Fig. 19

Similar content being viewed by others

References

  1. P. H. Siegel, "Terahertz technology," IEEE Transactions on Microwave Theory and Techniques, 50, 3, pp. 910–928, 2002.

  2. Y. Sun, M. Y. Sy, Y. -X. J. Wang, A. T. Ahuja and Y. T. Zhang, "A promising diagnostic method: Terahertz pulsed imaging and spectroscopy," World Journal of W J R Radiology, pp. 55-65, 2011

  3. M. C. Kemp, P. F. Taday, B. E. Cole, J. A. Clu, A. J. Fitzgerald and W. R. Tribe, "Security applications of terahertz technology," Proc. of SPIE, 50, 3, pp. 44-52, 2003.

  4. T. W. Crowe, T. Globus, D. L. Woolard and J. L. Hesler, "Terahertz sources and detectors and their application to biological sensing," Philosophical Transactions: Mathematical, Physical and Engineering Sciences, 362, 1815, pp. 365-377, 2004.

  5. A. Redo-Sanchez and X. -C. Zhang, "Terahertz science and technology trends," IEEE Journal of Selected Topics in Quantum Electronics, 14, 2, pp. 260-269, March 2008.

  6. C. Corsi and F. Sizov, THz and Security Applications: Detectors, Sources and Associated Electronics, Springer, 2014.

  7. H.-B. Liu, H. Zhong, N. Karpowicz, Y. Chen and X.-C. Zhang, "Terahertz spectroscopy and Imaging for defense and security applications," Proceedings of the IEEE, 95, 8, pp. 1514-1527, August 2007.

  8. P. H. Siegel, "Terahertz technology in biology and medicine," IEEE Transactions on Microwave Theory And Techniques, 52, 10, pp. 2438-2447, 2004.

  9. M. Naftaly and R. E. Miles, "Terahertz Time-Domain Spectroscopy for Material Characterization," Proceedings of the IEEE, 95, 8, August 2007.

  10. V. Sanphuang, W. G. Yeo, J. L. Volakis and N. K. Nahar, "THz transparent metamaterials for enhanced spectroscopic and imaging measurements," IEEE Transactions on Terahertz Science And Technology, 5, pp. 117-122, January 2015.

  11. E. Bründermann, H. -W. Hübers and M. F. Kimmitt, Terahertz Techniques, Springer, 2012.

  12. G. Chattopadhyay, "Technology, Capabilities, and Performance of Low Power Terahertz Sources," IEEE Transactions on Terahertz Science and Technology, 1, 1, September 2011.

  13. S. Vegesna, Y. Zhu, A. Bernussi and M. Saed, "Terahertz two-layer frequency selective surfaces with improved transmission characteristics," IEEE Transactions on Terahertz Science And Technology, 2, pp. 441-448, July 2012.

  14. B. A. Munk, Frequency selective surfaces theory and design, John Wiley & Sons, 2000.

  15. T. Wu, Frequency selective surface and grid array, John Wiley & Sons, 1995.

  16. R. Dickie, R. Cahill, V. Fusco, H. S. Gamble and N. Mitchell, "THz Frequency Selective Surface Filters for Earth Observation Remote Sensing Instruments," IEEE Transactions On Terahertz Science and Technology, 1, 2, November 2011.

  17. D. S. Wang, B. J. Chen and C. H. Chan, "High-Selectivity Bandpass Frequency-Selective Surface in Terahertz Band," IEEE Transactions on Terahertz Science and Technology, 6, 2, March 2016.

  18. A. Ebrahimi, S. Nirantar, W. Withayachumnankul, M. Bhaskaran, S. Sriram, S. F. Al-Sarawi and D. Abbott, "Second-Order Terahertz Bandpass Frequency Selective Surface With Miniaturized Elements," IEEE Transaction on Terahertz Science And Technology, 5, 5, September 2015.

  19. S. M. A. M. H. Abadi, M. Li, and N. Behdad, "Harmonic-Suppressed Miniaturized-Element Frequency Selective Surfaces With Higher Order Bandpass Responses," IEEE Transactions on Antennas and Propagation, 62, 5, May 2014.

  20. Ansoft, user’s guide – High Frequency Structure Simulator, Ansoft Corporation, 2005.

Download references

Acknowledgments

This work was partially supported by the Scientific and Technological Research Council of Turkey (TUBITAK) under Grant 113E126. Hakan Altan also acknowledges support from BAGEP Award of the Science Academy in Turkey.

Author information

Authors and Affiliations

  1. Department of Electrical and Electronics Engineering, Bilkent University, 06800, Ankara, Turkey

    Mehrab Ramzan, Sami Bolat & Ali Kemal Okyay

  2. UNAM-Institute of Materials Science and Nanotechnology, Bilkent University, 06800, Ankara, Turkey

    Talha Masood Khan, Ali Kemal Okyay & Kagan Topalli

  3. Department of Physics, Middle East Technical University, 06800, Ankara, Turkey

    Mehmet Ali Nebioglu & Hakan Altan

  4. TUBITAK Space Technologies Research Institute, 06800, Ankara, Turkey

    Kagan Topalli

Authors
  1. Mehrab Ramzan
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Talha Masood Khan
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Sami Bolat
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Mehmet Ali Nebioglu
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Hakan Altan
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Ali Kemal Okyay
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. Kagan Topalli
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Kagan Topalli.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Ramzan, M., Khan, T.M., Bolat, S. et al. Terahertz Bandpass Frequency Selective Surfaces on Glass Substrates Using a Wet Micromachining Process. J Infrared Milli Terahz Waves 38, 945–957 (2017). https://doi.org/10.1007/s10762-017-0397-7

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10762-017-0397-7

Keywords

Search

Navigation