Abstract
A system for flow measurement in micro/nano fluidic components is presented. Microfabricated arrays of straight channels with noncircular cross-sections were used for flow rate measurement. The calculated flow rates in these channels were determined using a finite difference approximation method. A pneumatic pumping system was utilized to control the pressure drop across the channels and flow rates were measured by collecting the fluids on a sensitive balance. The experimental setup was validated using long narrow circular tubes that mimic the range of flow resistances characteristic of micro/nano fluidic devices. Two types of channels cross-section were investigated. The first type contained an array of channels that were approximately trapezoidal (microchannels, ∼ 6.5 μ m deep) in cross-section and exhibited flow rates of 27.7–119.4 μ L/min within a pressure range of 64.1–277.1 kPa (9.3–40.2 psi). The second type contained an array of channels that were approximately arc-shaped (nanochannels, ∼ 600 nm deep) and generated flow rates of 0.29–0.99 μ L/min within a pressure range of 137.2–334.4 kPa (19.9–48.5 psi). The flow rates calculated by the finite difference approximation method were within 5.5% and 19.68% of the average experimental flow rates in the microchannels and nanochannels, respectively.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
E.B. Arkilic, M.A. Schmidt, and K.S. Breuer, in ASME Winter Annual Meeting (ASME publication, Chicago, 1994) p. 57–65.
D.J. Beebe, G.A. Mensing, and G.M. Walker, Annu Rev Biomed Eng 4, 261–286 (2002).
R.B. Bird, W.E. Stewart, and E.L. Lightfoot, Transport Phenomena, 2nd edition (Jhon Wiley & Sons Inc., New York, 2002) p. 84.
J.T. Cheng and N. Giordano, Physical Review E 65, 031206-1–031206-5 (2002).
Y. Cohen and A.B. Metzner, J. Rheol. 29(1), 67–102 (1985).
T.J. Desai, D.J. Hansford, K. Lawrence, A.H. Nashat, G. Rasi, J. Tu, Y. Wang, M. Zhang, and M. Ferrari, Biomedical Microdevices 2(1), 11–40 (1999).
S.M. Flockhart and R.S. Dhariwal, J of Fluids Engineering 120, 291–295 (1998).
P. Gravesen, J. Branebjerg, and O.S. Jensen, J Micromech Microeng 3, 168–182 (1993).
C.F. Gerald and P.O. Wheatley, Applied Numerical Analysis, 4th edition (Addison-Wesley Publishing Company, Massachusetts, 1992) p. 418.
K.T. Jay, T. Huen, R. Szema, and M. Ferrari, Biomedical Microdevices 1(2), 113–119 (1999).
J. Koo and C. Kleinstreuer, J of Micromech and Microeng 13, 568–579 (2003).
J. Magistrelli, A.J. Fleischman, and S. Roy, in 4th Annual BioMEMS and Nanotech World 2003 (Poster presentation, Washington DC, 2003).
C.D. Meinhart, S.T. Wereley, and J.G. Santiago, Experiments in Fluids 27, 414–419 (1999).
R.M. Olson and S.J. Wright, Essentials of Engineering Fluid Mechanics, 5th edition (Harper & Row Publishers, New York, 1990) p. 316.
I. Papuatsky, J. Brazzle, T. Ameel, and A.B. Frazier, Sensors and Actuators A 73, 101–108 (1999).
M. Richter, P. Waias, and D. Weiβ, Sensors and Actuators A 62, 480–483 (1997).
R.K. Shah and A.L. London, Laminar Flow Forced Convection in Ducts, A Source Book for Compact Heat Exchanger Analytical Data. Suppl. (Academic press, New York, 1978).
J.R. Taylor, An Introduction to Error Analysis: The Statistical Study of Uncertainties in Physical Measurements, 2nd edition (University Science Books, New York, 1997) p. 327.
Q.T. Tong, Materials Science and Eng B 87, 323–328 (2001).
Q. Weilin, G.M. Mala, and L. Dongqing, International Journal of Heat and Mass Transfer 43, 353–364 (2000).
K.J.A. Westin, C.-H. Choi, and K.S. Breuer, Exp in Fluids 34, 635–642 (2003).
F.M. White, Viscous Fluid Flow (McGraw-Hill Companies, USA, 1991) p. 119–121.
O. Wilding, J. Pfahler, H. Bau, J.N. Zemel, and L.J. Kricka, Clin. Chem. 40(1), 43–47 (1994).
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Nath, P., Roy, S., Conlisk, T. et al. A System for Micro/Nano Fluidic Flow Diagnostics. Biomed Microdevices 7, 169–177 (2005). https://doi.org/10.1007/s10544-005-3022-9
Issue Date:
DOI: https://doi.org/10.1007/s10544-005-3022-9