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A design of order-adjustable Σ∆ modulator for high performance micro-machined accelerometers

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Abstract

Sigma-delta modulation has been widely used in micro-machined accelerometers. Previous researches are mainly focused on increasing the order of the sigma-delta modulator for the mechanical sensor to improving the performance of the micro-machined accelerometers. These designs performed well in high resolution acceleration measurement, but they are insufficient in balancing the proof mass quickly while the micro-machined accelerometer is working. In this paper, the design of order-adjustable micro-machined accelerometer is proposed. It employs a mechanical sensor to balance the proof mass, and a fifth order MEMS accelerator to measure the acceleration with high resolution. Furthermore, this work shows an optimized design with a SQNR of 156.5 and 73.6 dB which can accurately measure the acceleration input and quickly balance the proof mass, respectively.

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Acknowledgments

Project supported by Hunan Provincial Natural Science Foundation of China (12JJ4064), the State Key Program of National Natural Science of China (Grant No. 61233010) and by the Program for New Century Excellent Talents in University of Ministry of Education of China (NCET-11-0975).

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Authors and Affiliations

  1. Faculty of Materials, Optoelectronics and Physics, Xiangtan University, Xiangtan, 411105, Hunan, China

    Longsheng Wang, Liang Xie & Xiangliang Jin

  2. Hunan Engineering Laboratory for Microelectronics, Optoelectronics and System on A Chip, Xiangtan, 411105, Hunan, China

    Longsheng Wang, Liang Xie & Xiangliang Jin

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  1. Longsheng Wang
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  2. Liang Xie
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  3. Xiangliang Jin
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Correspondence to Liang Xie.

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Wang, L., Xie, L. & Jin, X. A design of order-adjustable Σ∆ modulator for high performance micro-machined accelerometers. Analog Integr Circ Sig Process 80, 77–84 (2014). https://doi.org/10.1007/s10470-014-0304-2

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