Abstract
The anti-plane vibration of a quartz plate having an additional partial non-uniform mass layer is solved by ignoring the effect of small c 56 in comparison with other elastic constants. This analysis is based on the trigonometric series solution, and the convergence is examined. Numerical simulation is conducted for several different types of layers of different thicknesses using linear, cosine, and quadratic functions. The frequency spectrums, in addition to the length and mass fraction of the layer, are discussed separately. Compared with the homogeneous mass layer, the non-homogeneous layer with greater inertia leads to earlier appearance of the higher modes and more modes trapped under the same condition. Especially, there is no energy trapping in the plate with a fully covered uniform mass layer. However, this kind of energy trapping can be obtained again when the surface is non-uniform for some cases.
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Kosinski, J.A.: Thickness vibrations of flat piezoelectric plates with massy electrodes of unequal thickness. In: Proceedings of IEEE Ultrasonics Symposium, pp. 70–73 (2003)
Miller J.G., Bolef D.I.: Acoustic wave analysis of the operation of quartz-crystal film-thickness monitors. J. Appl. Phys. 39, 5815–5816 (1968)
Sauerbrey G.Z.: Use of quartz vibrator for weighing thin films on a microbalance. Z. Physik 155, 206–222 (1959)
Boersma F., Van Ballegooyen E.C.: Rotated Y-cut quartz crystal with two different electrodes treated as a one-dimensional acoustic composite resonator. J. Acoust. Soc. Am. 62, 335–340 (1977)
Yang J., Yang Z.: Analytical and numerical modeling of resonant piezoelectric devices in China—a review. Sci. China Ser. G-Phys. Mech. Astron. 51, 1775–1807 (2008)
Vander Steen C., Boersma F., Van Ballegooyen E.C.: The influence of mass loading outside the electrode area on the resonant frequencies of a quartz-crystal microbalance. J. Appl. Phys. 48, 3201–3205 (1977)
Mindlin R.D., Lee P.C.Y.: Thickness-shear and flexural vibrations of partially plated, crystal plates. Int. J. Solids Struct. 2, 125–139 (1966)
Lu P., Shen F., Chen H.: A theoretical analysis of mechanical dissipation of an electroded quartz resonator. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 50, 1069–1072 (2003)
Lu F., Lee H.P., Lim S.P.: Quartz crystal microbalance with rigid mass partially attached on electrode surfaces. Sensor. Actuat. A-Phys. 112, 203–210 (2004)
Wang J.: Consideration of stiffness and mass effects of relatively thicker electrodes with Mindlin plate theory. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 53, 1218–1221 (2006)
Liu B., Jiang Q., Yang J.: Frequency shifts in a quartz plate piezoelectric resonator in contact with a viscous fluid under a separated electrode. Int. J. Appl. Electromagnet. Mech. 35, 177–187 (2011)
Du J., Xian K., Wang J., Yang J.: Thickness vibration of piezoelectric plates of 6 mm crystals with tilted six-fold axis and two-layered thick electrodes. Ultrasonics 49, 149–152 (2009)
Vig J.R., Ballato A.: Comments on the effects of nonuniform mass loading on a quartz crystal microbalance. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 45, 1123–1124 (1998)
Yang J.: Frequency shifts in a piezoelectric body due to small amounts of additional mass on its surface. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 51, 1199–1202 (2004)
Yang J., Guo S.: Vibrations of a crystal body with a shear-deformable surface mass layer. Acta Mech. 190, 223–232 (2007)
Liu N., Yang J., Chen W.: Effects of a mass layer with gradually varying thickness on a quartz crystal microbalance. IEEE Sens. J. 11, 1635–1639 (2011)
Tiersten H.F., Lwo B.J., Dulmet B.: Transversely varying thickness modes in trapped energy resonators with shallow and beveled contours. J. Appl. Phys. 80, 1037–1046 (1996)
Wang J., Shen L., Yang J.: Effects of electrodes with continuously varying thickness on energy trapping in thickness-shear mode quartz resonators. Ultrasonics 48, 150–154 (2008)
Liu N., Yang J., Chen W.: Effects of mass layer nonuniformity on a quartz-crystal microbalance. IEEE Sens. J. 11, 934–938 (2011)
Mindlin R.D.: Bechmann’s number for harmonic overtones of thickness/twist vibrations of rotated Y-cut quartz plates. J. Acoust. Soc. Am. 41, 969–973 (1967)
He H., Liu J., Yang J.: Analysis of a monolithic crystal plate acoustic wave filter. Ultrasonics 51, 991–996 (2011)
Joshi S.P.: Non-linear constitutive relations for piezoceramic materials. Smart Mater. Struct. 1, 80–83 (1992)
Tiersten H.F.: Linear Piezoelectric Plate Vibrations. Plenum, New York (1969)
Kong Y., Liu J., He H., Yang J.: Effects of mass layer dimension on a finite quartz crystal microbalance. Acta Mech. 222, 103–113 (2011)
Yang J., Chen Z., Hu H.: Electrically forced vibration of a thickness-twist mode piezoelectric resonator with non-uniform electrodes. Acta Mech. Solida Sin. 20, 266–274 (2007)
Yang J., Chen Z., Hu Y.: Vibration of a thickness-twist mode piezoelectric resonator with asymmetric non-uniform electrodes. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 55, 841–848 (2008)
Bovik P.: A comparison between the Tiersten model and O(H) boundary conditions for elastic surface waves guided by thin layers. ASME J. Appl. Mech. 63, 162–167 (1996)
Chen Y., Du J., Wang J., Yang J.: Shear-horizontal waves in a rotated Y-cut quartz plate with an imperfectly bonded mass layer. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 58, 616–622 (2011)
Abdalla A.N., Alsheikh F., AlHossain A.Y.: Effect of initial stresses on dispersion relation of transverse waves in a piezoelectric layered cylinder. Mat. Sci. Eng. B-Solod. 162, 147–154 (2009)
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Li, P., Jin, F. The anti-plane vibration of a quartz plate with an additional partial non-uniform mass layer for acoustic wave sensing. Acta Mech 224, 1397–1414 (2013). https://doi.org/10.1007/s00707-013-0812-7
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DOI: https://doi.org/10.1007/s00707-013-0812-7