Analytical modeling and optimization for a laterally-driven polysilicon thermal actuator

Abstract

 An electro-thermally and laterally driven microactuator is analytically examined which is based on the asymmetrical thermal expansion of the microstructure with different lengths of two beams. Deflection of the microactuator is modeled by the structural analysis. Analytical results are compared with the finite element model (FEM) results, and show a reasonable agreement. The magnitude of the deflection depends strongly on the geometry of the microactuator. The analytical model allows one to optimize efficiently the laterally driven thermal actuators.