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Development of stick–slip nanopositioning stage capable of moving in vertical direction

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Abstract

Nanopositioning stage, based on the stick–slip principle, is a hot research topic due to its unparallel merits such as compact structure, high resolution, and long travel stroke. However, most of the conventional stick–slip nanopositioning stages only have the ability to move along the horizontal directions. In addition, analysis of vertical stage movement is few. This paper proposes a novel stick–slip nanopositioning stage capable of moving upwards and downwards with an excellent performance. An adjusting unit was developed and integrated into the stage to effectively change friction force which is the key to the vertical stage movement. Theoretical and numerical analysis show that many parameters including revised driving signal contributes to the upward movement of stick–slip nanopositioning stage. Experimental results show that the stage has the capability of traveling up to 22 mm with an upward positioning accuracy of 7.00 nm and a downward positioning accuracy of 5.00 nm, respectively. The maximum speed for maximum speeds of stage for upward and downward motion were measured to be 2.70 and 0.77 mm/s, respectively. The maximum load of stage in vertical direction is 72 g. This stage design has a huge potential in applications requiring vertical manipulation while requiring nanometer positioning accuracies, high travel stroke, compact structure, and large load.

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Funding

The funding was provided by National Natural Science Foundation of China (Grant No. 61774107) and Construction Project of Suzhou Late-model R&D institutions (Grant No. SZS2018337)

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Author notes

  1. Peng Pan and Junhui Zhu have contributed equally to this work.

Authors and Affiliations

  1. Jiangsu Provincial Key Laboratory of Advanced Robotics & School of Mechanical and Electrical Engineering, Soochow University, Suzhou, 215021, China

    Peng Pan, Sen Gu & Changhai Ru

  2. Department of Mechanical Engineering, McGill University, Montreal, QC, H3A 0C3, Canada

    Peng Pan

  3. School of Mechatronic Engineering and Automation, Shanghai University, Shanghai, 200072, China

    Junhui Zhu

Authors
  1. Peng Pan
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  2. Junhui Zhu
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  3. Sen Gu
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  4. Changhai Ru
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Correspondence to Changhai Ru.

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Pan, P., Zhu, J., Gu, S. et al. Development of stick–slip nanopositioning stage capable of moving in vertical direction. Microsyst Technol 26, 2945–2954 (2020). https://doi.org/10.1007/s00542-020-04909-3

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  • DOI: https://doi.org/10.1007/s00542-020-04909-3

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