Abstract
Dynamic characteristics of resonators for MEMS resonant vibratory gyroscopes are studied in this paper. Firstly, a small parameter method is introduced to analyze the dynamic characteristic stability of the resonator. It is proved that geometrical parameters of the resonator have to be regulated to match corresponding stability analysis. In order to verify the rationality of the theoretical parameters design, static calibration experiment is built using a resonator sample. It is concluded from the calibrated result that the error between theory design and experiment is 0.03 %, which shows they have a good match, and the design of resonator is reasonable. Moreover, the method of small parameter perturbation is considered to analyze the input–output dynamic characteristic. Under some transformations, which make input angular velocity and output resonant frequency shift possess a good linear relationship. In order to verify the correctness of the theory analysis method, dynamic frequency output characteristic experiment is built using the resonant vibratory gyroscope sample. It is concluded from the dynamic measurement result that the correlation coefficient of output fitted curve is 99.95 %, the measured algorithm scale factor of the gyroscope sample is 0.2116, which prove theoretical analyzing approach is feasible.
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References
Chihwan J, Seonho S, Byeungleul L, Hyeonched K, Kukjin C (2004) A study on resonant frequency and Q factor tunings for MEMS vibratory gyroscopes. J Micromech Microeng 14:1530–1536
Clark WA, Howe RT, Horowitz R (1996) Surface micromachined Z-axis vibratory rate gyroscope. In: Technical digest, solid-state sensor and actuator workshop, pp 283–287
Gallacher BJ, Burdess JS, Harish KM (2006) A control scheme for a MEMS electrostatic resonant gyroscope excited using combined parametric excitation and harmonic forcing. J Micromech Microeng 16:320–331
Hassan M, Roger B (2006) Theory of direct frequency output vibrating gyroscopes. IEEE Sens J 6(2):310–315
Kourepenis A, Borenstein J, Connelly J, Elliott R, Ward P, Weinberg M (1998) Performance of MEMS inertial sensors. In: Proceedings of the IEEE position location and navigation symposium, pp 1–8
Neul R (2007) Micromachined angular rate sensors for automotive applications. IEEE Sens J 7:302–309
Seshia AA, Howe RT, Montague S (2002) An integrated microelectromechanical resonant output gyroscope. In: 15th IEEE international conference MEMS, pp 722–726
Sungsu Park, ChinWoo Tan, Haedong Kim, Kyung HongSung (2009) Oscillation control algorithms for resonant sensors with applications to vibratory gyroscopes. Sensors 9:5952–5967
Xie H, Fedder G (2004) A CMOS-MEMS lateral-axis gyroscope. In: Proceedings of the IEEE international micro electro mechanical systems, pp 162–165
Acknowledgments
This study is supported by the National Natural Science Foundation of China under Grant No. 60927005, the Innovation Foundation of BUAA for PhD Graduates, and the Fundamental Research Funds for the Central Universities (YWF-10-01-A17).
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Yan, L., Shangchun, F., Zhanshe, G. et al. Study of dynamic characteristics of resonators for MEMS resonant vibratory gyroscopes. Microsyst Technol 18, 639–647 (2012). https://doi.org/10.1007/s00542-012-1492-2
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DOI: https://doi.org/10.1007/s00542-012-1492-2