Abstract
A novel, completely transparent bio-MEMS (bio-Micro Electro Mechanical System) device has been devised and manufactured using finite element analysis (FEA) and micro-fabrication techniques. The device has been designed to be used for testing the mechanical properties of single living cells, it is versatile and suitable for coupling with other analysis techniques. Furthermore, being completely transparent, it can be used with either transmission or reflection microscopes. The transparent bio-MEMS is based on a silicon dioxide–silicon nitride structure and, since the main goal is to test living cells, it is meant to work in a liquid environment and allow for cell stretching. Sensors for cell deformation and for platform displacement are also present and the required sensitivity for single cell analyses is granted. The device will moreover allow the recording of the stress–strain curve for single living cells.
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Fior, R., Maggiolino, S., Lazzarino, M. et al. A new transparent Bio-MEMS for uni-axial single cell stretching. Microsyst Technol 17, 1581 (2011). https://doi.org/10.1007/s00542-011-1325-8
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DOI: https://doi.org/10.1007/s00542-011-1325-8