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Two-axis micro fluxgate sensor on single chip

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Abstract

We present a two-axis micro fluxgate sensor on single chip for electronic compassing function. To measure X- and Y-axis magnetic fields, functional two fluxgate sensors were perpendicularly aligned and connected each other. The fluxgate sensor was composed of square-ring shaped magnetic core and solenoid excitation and pick-up coils. The solenoid coils and magnetic core were separated by benzocyclobutane which had high insulation and good planarization characters. Copper coil patterns of 10 μm width and 6 μm thickness were electroplated on Ti (300 Å)/Cu (1,500 Å) seed layers. 3 μm thick Ni0.8Fe0.2 (permalloy) film for the magnetic core was also electroplated under 2,000 gauss. Excellent linear response over the range of −100 μT to +100 μT was obtained with the sensitivity of ∼280 V/T. Actual chip size was 3.1×3.1 mm2. The sine and cosine signals of two-axis fluxgate sensor had a good function of azimuth compass.

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Acknowledgements

This work has been supported by Korea Science and Engineering Foundation (R05-2003-000-11351-0).

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Authors and Affiliations

  1. Department of Metal and Materials Engineering, Kangnung National University, Kangnung, 210-702, South Korea

    Won-Youl Choi

  2. Department of Civil Engineering, Kangnung National University, Kangnung, 210-702, South Korea

    Jong-Oh Kim

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  1. Won-Youl Choi
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  2. Jong-Oh Kim
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Correspondence to Won-Youl Choi.

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Choi, WY., Kim, JO. Two-axis micro fluxgate sensor on single chip. Microsyst Technol 12, 352–356 (2006). https://doi.org/10.1007/s00542-005-0060-4

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  • DOI: https://doi.org/10.1007/s00542-005-0060-4

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