Abstract.
We report experimental results of drilling micro holes in Al, Mo, Ti, Cu, Ag, Au, and brass thin metal foils in air using 60-femtosecond Ti:sapphire laser pulses. The influence of laser parameters and material properties on drilling processes at the sub-10-micron scale has been examined. Comparison of hole drilling using 60-fs pulses with that using 50-ps and 10-ns pulses at an energy fluence of ∼15 J/cm2 indicates that a significant amount of melting is present in both ps and ns regimes, whereas with fs pulses, fewer and much smaller droplets from the molten phase are observed.
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Received: 21 July 1999 / Accepted: 11 September 1999 / Published online: 28 December 1999
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Zhu, X., Naumov, A., Villeneuve, D. et al. Influence of laser parameters and material properties on micro drilling with femtosecond laser pulses . Appl Phys A 69 (Suppl 1), S367–S371 (1999). https://doi.org/10.1007/s003390051418
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DOI: https://doi.org/10.1007/s003390051418