Abstract.
Permanent holographic recording in sputtered indium oxide (InOx) thin films is demonstrated, using ultraviolet radiation at 193 nm emitted by an ArF excimer laser. Steady-state refractive index changes of up to 5×10-3 are calculated from the measured diffraction efficiency of a HeNe laser probe beam. The recorded gratings exhibit a dynamic behaviour that relaxes to a steady-state value that depends on the oxygen partial pressure used during growth and on the recording beam intensity. The observed behaviour is explained in terms of laser-induced structural changes.
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Received: 12 October 1998 / Accepted: 8 March 1999 / Published online: 4 August 1999
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Pissadakis, S., Mailis, S., Reekie, L. et al. Permanent holographic recording in indium oxide thin films using 193 nm excimer laser radiation . Appl Phys A 69, 333–336 (1999). https://doi.org/10.1007/s003390051009
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DOI: https://doi.org/10.1007/s003390051009