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Effect of the orientation polarization and texturing on nano-mechanical and piezoelectric properties of PZT (52/48) films

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Abstract

Ferroelectric (piezoelectric) Pb (Zr0.52Ti0.48) O3 (PZT) films were synthesized using an aerosol-assisted chemical vapor deposition technique on (111) Pt/Ti/SiO2/Si substrates. The optimum deposition temperature was 350 °C, followed by annealing at 650 °C for 1 h. Tetragonal perovskite phase and preferred orientation {0 0 1} in the PZT films were determined by two-dimensional grazing incidence diffraction using synchrotron X-ray radiation and nano-beam electron diffraction (NBED). The PZT film grains’ texture, represented by inverse pole representation, correlates with (0 0 1) and (1 1 1) orientations with approximate XRD peak distribution width of Ω ≈ 35°. The elastic-to-plastic transition of the piezoelectric-based structural deformation of the PZT films is represented by the pop-in, which marks the limit in the elastic behavior at the yield stress for which the material starts exhibiting permanent deformation, with the yield point being Y = 2.5 ± 0.7 GPa for the Pb (Zr0.52Ti0.48) O3 film. The hardness (H = 7.5 ± 0.16 GPa), elastic modulus (E = 126 ± 3 GPa), and scratching were evaluated at the nanoscale, using a nanoindentation technique. No delamination or cracks were observed near the residual scratching stage. The switching of piezoelectric domains and domain polarization process, as a function of films’ texture, in the representative Pb (Zr0.52Ti0.48) O3 films, were studied using Piezoresponse Force Microscopy (PFM). The values of the saturation polarization, remnant polarization, coercive field, and piezoelectric constant were Ps = 45 μC/cm2, Pr =30 μC/cm2, Ec = 22 kV/cm, and d33 = 137 pm/V, respectively. The local piezoelectric hysteresis loops and film nanostructure correlate with the polarization orientation.

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Acknowledgements

The authors sincerely appreciate the technical support of TEM and AFM characterization to the following colleagues; Roberto P. Talamantes, Glory V. Umoh, Oscar Solis Canto, E. Cruz-Solano, and J. E. Leal-Perez. O. Auciello acknowledges the University of Texas-Dallas for support through his Distinguished Endowed Chair grant, to work on the project, which science is described in this article.

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Authors and Affiliations

  1. Centro de Investigación en Materiales Avanzados S.C., and Laboratorio Nacional de Nanotecnología, Miguel de Cervantes 120, Complejo Industrial Chihuahua, 31136, Chihuahua, México

    C. J. Ramos-Cano, M. Miki-Yoshida, L. Fuentes-Cobas & A. Hurtado-Macías

  2. Facultad de Metalurgia, Universidad Autónoma de Coahuila (UADEC), Carretera 57 Kilómetro 4.5, 25725, Monclova, Coahuila, México

    C. J. Ramos-Cano

  3. Centro de Ingeniería y Desarrollo Industrial, 76130, Santiago de Querétaro, Qro, México

    R. Herrera-Basurto

  4. Universidad Politécnica de Santa Rosa Jáuregui, Querétaro, México

    F. Mercader-Trejo

  5. Departments of Materials Science and Engineering and Bioengineering, The University of Texas at Dallas, 800 W. Campbell Rd., RL10, Richardson, TX 75080-3021, USA

    O. Auciello

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  1. C. J. Ramos-Cano
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Correspondence to A. Hurtado-Macías.

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Ramos-Cano, C.J., Miki-Yoshida, M., Herrera-Basurto, R. et al. Effect of the orientation polarization and texturing on nano-mechanical and piezoelectric properties of PZT (52/48) films. Appl. Phys. A 129, 113 (2023). https://doi.org/10.1007/s00339-022-06374-3

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