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Soft magnetic properties and high frequency characteristics of FeM (M = B, Hf, Zr) and pure Fe films fabricated by oblique deposition

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Abstract

To improve the high-frequency properties of Fe-based thin films, doped and pure Fe thin films were obliquely deposited on Si (100) substrate by RF-magnetron sputtering. Vibrating sample magnetometer (VSM) measurements show obvious in-plane uniaxial magnetic anisotropy in both doped and pure Fe thin films, and enhancement effects of doping on Soft magnetic properties were also observed. Microwave permeability measurements indicate that the resonance frequency and permeability of pure Fe films are much larger than those of doped Fe thin films. Damping factors of Fe thin films deposited at different oblique angles were further investigated.

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References

  1. Y. Hayakawa, A. Makino, H. Fujimori, A. Inoue, J. Appl. Phys. 81, 3747 (1997)

    Article  ADS  Google Scholar 

  2. S. Yabukami, M. Yamaguchi, K.I. Arai, M. Watanabe, A. Itagaki, H. Ando, J. Appl. Phys. 85, 5148 (1999)

    Article  ADS  Google Scholar 

  3. D. Wang, Z. Qian, J.M. Daughton, C. Nordman, M. Tondra, D. Reed, D. Brownell, J. Appl. Phys. 89, 6754 (2001)

    Article  ADS  Google Scholar 

  4. M. Esseling, Y. Luo, K. Samwer, Europhys. Lett. 68, 100 (2004)

    Article  ADS  Google Scholar 

  5. K. Seemann, H. Leiste, V. Bekker, J. Magn. Magn. Mater. 283, 310 (2004)

    Article  ADS  Google Scholar 

  6. Y. Luo, M. Esseling, K. Zhang, G. Güntherodt, K. Samwer, Europhys. Lett. 73, 415 (2006)

    Article  ADS  Google Scholar 

  7. K.E. Lee, N.D. Ha, D.S. Sun, P. Kollu, C.G. Kim, C.O. Kim, J. Magn. Magn. Mater. 304, e192 (2006)

    Article  ADS  Google Scholar 

  8. H. Boschker, M. Mathews, E.P. Houwman, H. Nishikawa, A. Vailionis, G. Koster, G. Rijnders, D.H.A. Blank, Phys. Rev. B 79(21), 214425 (2009)

    Article  ADS  Google Scholar 

  9. X.L. Fan, D.S. Xue, M. Lin, Z.M. Zhang, D.W. Guo, C.J. Jiang, J.Q. Wei, Appl. Phys. Lett. 92(22), 222505 (2008)

    Article  ADS  Google Scholar 

  10. C.C. Yang, F.L. Wang, C.H. Dong, W.B. Sui, C.J. Jang, D.S. Xue, J. Appl. Phys. 117(13), 133907 (2015)

    Article  ADS  Google Scholar 

  11. I.T. Iakubov, A.N. Lagarkov, S.A. Maklakov, A.V. Osipov, K.N. Rozanov, I.A. Ryzhikov, V.V. Samsonova, A.O. Sboychakov, J. Magn. Magn. Mater. 321, 726 (2009)

    Article  ADS  Google Scholar 

  12. T.G. Knorr, R.W. Hoffman, Phys. Rev. 113, 1039 (1959)

    Article  ADS  Google Scholar 

  13. W. Gong, H. Li, Z.R. Zhao, J.C. Chen, J. Appl. Phys. 69(8), 5119 (1991)

    Article  ADS  Google Scholar 

  14. P. James, O. Eriksson, O. Hjortstam, B. Johansson, L. Nordström, Appl. Phys. Lett. 76(7), 915 (2000)

    Article  ADS  Google Scholar 

  15. M. Vroubel, Y. Zhuang, B. Rejaei, J. Burghartz, J. Magn. Magn. Mater. 258–259, 167 (2003)

    Article  Google Scholar 

  16. J.P. Michel, Y. Lamy, A.S. Royer, B. Viala, IEEE Trans. Magn. 42, 3368 (2006)

    Article  ADS  Google Scholar 

  17. S. Parkin, Phys. Rev. Lett. 67, 3598 (1991)

    Article  ADS  Google Scholar 

  18. N.N. Phuoc, C.K. Ong, Phys. B 406, 3514 (2011)

    Article  ADS  Google Scholar 

  19. N.N. Phuoc, C.K. Ong, J. Appl. Phys. 111, 093919 (2012)

    Article  ADS  Google Scholar 

  20. N.N. Phuoc, F. Xu, C.K. Ong, Appl. Phys. Lett. 94, 092505 (2009)

    Article  ADS  Google Scholar 

  21. S. Queste, S. Dubourg, O. Acher, K.U. Barholz, R. Mattheis, J. Appl. Phys. 95, 6873 (2004)

    Article  ADS  Google Scholar 

  22. D. Spenato, S.P. Pogossian, D.T. Dekadjevi, J.B. Youssef, J. Phys. D Appl. Phys. 40, 3306 (2007)

    Article  ADS  Google Scholar 

  23. G.Z. Chai, D.S. Xue, X.L. Fan, X.L. Li, D.W. Guo, Appl. Phys. Lett. 93, 152516 (2008)

    Article  ADS  Google Scholar 

  24. S. Li, Z. Huang, J.-G. Duh, M. Yamaguchi, Appl. Phys. Lett. 92, 092501 (2008)

    Article  ADS  Google Scholar 

  25. J. Shim, J. Kim, S.H. Han, H.J. Kim, K. Hyeon Kim, M. Yamaguchi, J. Magn. Magn. Mater. 290–291, 205 (2005)

    Article  Google Scholar 

  26. I. Barsukov, P. Landeros, R. Meckenstock, J. Lindner, D. Spoddig, Z.A. Li, B. Krumme, H. Wende, D.L. Mills, M. Farle, Phys. Rev. B 85, 014420 (2012)

    Article  ADS  Google Scholar 

  27. X.L. Fan, D.S. Xue, C.J. Jiang, Y. Gong, J. Li, J. Appl. Phys. 102, 123901 (2007)

    Article  ADS  Google Scholar 

  28. D.S. Xue, X.L. Fan, C.J. Jiang, Appl. Phys. Lett. 89, 011910 (2006)

    Article  ADS  Google Scholar 

  29. S.V. Dijken, G.D. Santo, B. Poelsema, Appl. Phys. Lett. 77, 2030 (2000)

    Article  ADS  Google Scholar 

  30. M.T. Umlor, Appl. Phys. Lett. 87, 082505 (2005)

    Article  ADS  Google Scholar 

  31. S.V. Dijken, G.D. Santo, B. Poelsema, Phys. Rev. B 63, 104431 (2001)

    Article  ADS  Google Scholar 

  32. A. Lisfi, J.C. Lodder, Phys. Rev. B 63, 174441 (2001)

    Article  ADS  Google Scholar 

  33. D.O. Smith, J. Appl. Phys. 30, S264 (1959)

    Article  ADS  Google Scholar 

  34. F. Tang, D.L. Liu, D.X. Ye, Y.P. Zhao, T.M. Lu, G.C. Wang, A. Vijayaraghavan, J. Appl. Phys. 93, 4194 (2003)

    Article  ADS  Google Scholar 

  35. R.D. McMichael, C.G. Lee, J.E. Bonevich, P.J. Chen, W. Miller, W.F. Egelhoff, J. Appl. Phys. 88, 5296 (2000)

    Article  ADS  Google Scholar 

  36. N.N. Phuoc, G.Z. Chai, C.K. Ong, J. Appl. Phys. 112, 083925 (2012)

    Article  ADS  Google Scholar 

  37. T.L. Gilbert, IEEE Trans. Magn. 40, 3443 (2004)

    Article  ADS  Google Scholar 

  38. L.T. Hung, N.N. Phuoc, X.C. Wang, C.K. Ong, Rev. Sci. Instrum. 82, 084701 (2011)

    Article  ADS  Google Scholar 

  39. N.N. Phuoc, T. Hung le, C.K. Ong, J. Alloy. Compd. 509, 4010 (2011)

    Article  Google Scholar 

  40. C. Kittel, Phys. Rev. 76, 743 (1949)

    Article  ADS  Google Scholar 

Download references

Acknowledgments

This work was supported by the National Basic Research Program of China (Grant No. 2012CB933101) and the National Natural Science Foundation of China (Grant Nos. 11034004 and 11374131).

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Authors and Affiliations

  1. Key Laboratory for Magnetism and Magnetic Materials of Ministry of Education, Lanzhou University, Lanzhou, 730000, China

    Chengcheng Yang, Chao Zhang, Fenglong Wang, Zhong Zhao, Changjun Jiang & Desheng Xue

  2. Key Laboratory of Special Function Materials and Structure Design of Ministry of Education, Lanzhou University, Lanzhou, 730000, China

    Chengcheng Yang, Chao Zhang, Fenglong Wang, Zhong Zhao, Changjun Jiang & Desheng Xue

Authors
  1. Chengcheng Yang
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  2. Chao Zhang
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  3. Fenglong Wang
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Correspondence to Changjun Jiang.

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Yang, C., Zhang, C., Wang, F. et al. Soft magnetic properties and high frequency characteristics of FeM (M = B, Hf, Zr) and pure Fe films fabricated by oblique deposition. Appl. Phys. A 120, 1159–1163 (2015). https://doi.org/10.1007/s00339-015-9295-9

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