Abstract
The formation of laser-induced periodic surface structures (LIPSS) on titanium upon irradiation with linearly polarized femtosecond (fs) laser pulses (τ=30 fs, λ=790 nm) in an air environment is studied experimentally and theoretically. In the experiments, the dependence on the laser fluence and the number of laser pulses per irradiation spot has been analyzed. For a moderate number of laser pulses (N<1000) and at fluences between ∼0.09 and ∼0.35 J/cm2, predominantly low-spatial-frequency-LIPSS with periods between 400 nm and 800 nm are observed perpendicular to the polarization. In a narrow fluence range between 0.05 and 0.09 J/cm2, high-spatial-frequency-LIPSS with sub-100-nm spatial periods (∼λ/10) can be generated with an orientation parallel to the polarization (N=50). These experimental results are complemented by calculations based on a theoretical LIPSS model and compared to the present literature.
Similar content being viewed by others
References
J. Bonse, J. Krüger, S. Höhm, A. Rosenfeld, J. Laser Appl. 24, 042006 (2012)
J. Bonse, H. Sturm, D. Schmidt, W. Kautek, Appl. Phys. A 71, 657 (2000)
A. Borowiec, H.K. Haugen, Appl. Phys. Lett. 82, 4462 (2003)
J. Bonse, M. Munz, H. Sturm, J. Appl. Phys. 97, 013538 (2005)
A.Y. Vorobyev, V.S. Makin, C. Guo, J. Appl. Phys. 101, 034903 (2007)
J. Bonse, A. Rosenfeld, J. Krüger, J. Appl. Phys. 106, 104910 (2009)
J.E. Sipe, J.F. Young, J.S. Preston, H.M. van Driel, Phys. Rev. B 27, 1141 (1983)
G. Miyaji, K. Miyazaki, Opt. Express 16, 16265 (2008)
M. Huang, F. Zhao, Y. Cheng, N. Xu, Z. Xu, ACS Nano 3, 4062 (2009)
F. Garrelie, J.P. Colombier, F. Pigeon, S. Tonchev, N. Faure, M. Bounhalli, S. Reynaud, O. Parriaux, Opt. Express 19, 9035 (2011)
D. Dufft, A. Rosenfeld, S.K. Das, R. Grunwald, J. Bonse, J. Appl. Phys. 105, 034908 (2009)
G.A. Martsinovskii, G.D. Shandybina, D.S. Smirnov, S.V. Zabotnov, L.A. Golovan, V.Yu. Timoshenko, P.K. Kashkarov, Opt. Spectrosc. 105, 67 (2008)
J. Reif, F. Costache, M. Henyk, S.V. Pandelov, Appl. Surf. Sci. 197–198, 891 (2002)
A.F. Hollemann, E. Wiberg, N. Wiberg (eds.), Inorganic Chemistry (Academic Press, San Diego, 2001)
M. Tsukamoto, K. Asuka, H. Nakano, M. Hashida, M. Katto, N. Abe, M. Fujita, Vacuum 80, 1346 (2006)
A.Y. Vorobyev, C. Guo, Appl. Surf. Sci. 253, 7272 (2007)
B.K. Nayak, M.C. Gupta, K.W. Kolasinsky, Appl. Phys. A 90, 399 (2008)
Y. Huang, S. Liu, W. Li, Y. Liu, W. Yang, Opt. Express 17, 20756 (2009)
M. Okamuro, M. Hashida, Y. Miyasaka, Y. Ikuta, S. Tokita, S. Sakabe, Phys. Rev. B 82, 165417 (2010)
C. Wang, H. Huo, M. Johnson, M. Shen, E. Mazur, Nanotechnology 21, 075304 (2010)
S.I. Kudryashov, E. Golosov, A. Ionin, Y.R. Kolobov, A.E. Ligachev, L.V. Seleznev, D.V. Sinitsyn, A.R. Sharipov, AIP Conf. Proc. 1278, 156 (2010)
E. Golosov, A. Ionin, Y.R. Kolobov, S.I. Kudryashov, A.E. Ligachev, Y.N. Novoselov, L.V. Seleznev, D.V. Sinitsyn, J. Exp. Theor. Phys. 113, 14 (2011)
J.M. Liu, Opt. Lett. 7, 196 (1982)
J. Bonse, J. Krüger, J. Appl. Phys. 108, 034903 (2010)
E.D. Palik (ed.), Handbook of Optical Constants of Solids (Academic Press, San Diego, 1985)
Acknowledgements
The authors would like to thank B. Strauß (BAM 6.8) for the SEM characterizations and R. Koter (BAM 6.4) for his help during the fs-laser irradiation experiments. This work was supported by the German Science Foundation (DFG) under grants no. RO 2074/7-1 and KR 3638/1-1.
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Bonse, J., Höhm, S., Rosenfeld, A. et al. Sub-100-nm laser-induced periodic surface structures upon irradiation of titanium by Ti:sapphire femtosecond laser pulses in air. Appl. Phys. A 110, 547–551 (2013). https://doi.org/10.1007/s00339-012-7140-y
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00339-012-7140-y