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The Matrix-Assisted Pulsed Laser Evaporation (MAPLE) process: origins and future directions

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Abstract

This review discusses the origins and evolution of the MAPLE technique as it started as an alternative to spray coating of thin films for chemical vapor sensors. It describes its numerous applications for the deposition of thin films of polymeric, organic and biomaterials for various applications. This is followed by an overview of several new variations of the MAPLE technique. This review concludes with an outlook on the future of this highly versatile and successful vapor deposition process.

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References

  1. H.M. Smith, A.F. Turner, Appl. Opt. 4, 147 (1965)

    Article  ADS  Google Scholar 

  2. S.G. Hansen, T.E. Robitaille, Appl. Phys. Lett. 52, 81 (1988)

    Article  ADS  Google Scholar 

  3. S.G. Hansen, T.E. Robitaille, J. Appl. Phys. 64, 2122 (1988)

    Article  ADS  Google Scholar 

  4. D.B. Chrisey, A. Piqué, R.A. McGill, J.S. Horwitz, B.R. Ringeisen, D.M. Bubb, P.K. Wu, Chem. Rev. 103, 553 (2003)

    Article  Google Scholar 

  5. G.B. Blanchet, Appl. Phys. Lett. 62, 479 (1993)

    Article  ADS  Google Scholar 

  6. G.B. Blanchet, C.R. Fincher, C.L. Jackson, S.I. Shah, K.H. Gardner, Science 262, 719 (1993)

    Article  ADS  Google Scholar 

  7. G.B. Blanchet, C.R. Fincher, J. Adv. Mater. 6, 881 (1994)

    Article  Google Scholar 

  8. R.A. McGill, D.B. Chrisey, U.S. Patent, 6,025,036, February 15th (2000)

  9. A. Piqué, R.A. McGill, D.B. Chrisey, J.H. Callahan, T.E. Mlsna, Mater. Res. Soc. Symp. Proc. 526, 375 (1998)

    Article  Google Scholar 

  10. A. Piqué, R.A. McGill, D.B. Chrisey, D. Leonhardt, T.E. Mlsna, B.J. Spargo, J.H. Callahan, R.W. Vachet, R. Chung, M.A. Bucaro, Thin Solid Films 355–356, 536 (1999)

    Article  Google Scholar 

  11. A. Piqué, D.B. Chrisey, B.J. Spargo, M.A. Bucaro, R.W. Vachet, J.H. Callahan, R.A. McGill, D. Leonhardt, T.E. Mlsna, Mater. Res. Soc. Symp. Proc. 526, 421 (1998)

    Article  Google Scholar 

  12. A. Vertes, R. Gijbels, F. Adams (eds.), Laser Ionization Mass Analysis (Wiley, New York, 1993)

    Google Scholar 

  13. T.E. Itina, L.V. Zhigilei, B.J. Garrison, Nucl. Instrum. Methods Phys. Res., Sect. B, Beam Interact. Mater. Atoms 180, 238 (2001)

    Article  ADS  Google Scholar 

  14. R.A. McGill, D.B. Chrisey, A. Piqué, T.E. Mlsna, Proc. SPIE 3274, 255 (1998)

    Article  ADS  Google Scholar 

  15. R.A. McGill, M.H. Abraham, J. Grate, CHEMTEC 24, 27 (1994)

    Google Scholar 

  16. R.A. McGill, R. Chung, D.B. Chrisey, P.C. Dorsey, P. Matthews, A. Piqué, T.E. Mlsna, J.I. Stepnowski, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 45, 1370 (1998)

    Article  Google Scholar 

  17. A. Piqué, P.K. Wu, B.R. Ringeisen, D.M. Bubb, J.S. Melinger, R.A. McGill, D.B. Chrisey, Appl. Surf. Sci. 186, 408 (2002)

    Article  ADS  Google Scholar 

  18. D. Kopecký, M. Vrnňata, F. Vysloužil, V. Myslík, P. Fitl, O. Ekrt, P. Mateějka, M. Jelínek, T. Kocourek, Thin Solid Films 517, 2083 (2009)

    Article  ADS  Google Scholar 

  19. B. Toftmann, M.R. Papantonakis, R.C.Y. Auyeung, W. Kim, S.M. O’Malley, D.M. Bubb, J.S. Horwitz, J. Schou, P.M. Johansen, R.F. Haglund, Thin Solid Films 453–454, 177 (2004)

    Article  Google Scholar 

  20. J.M. Fitz-Gerald, G. Jennings, R. Johnson, C.L. Frazer, Appl. Phys. A, Mater. Sci. Process. 80, 1109 (2005)

    Article  ADS  Google Scholar 

  21. T. Tunno, A.P. Caricato, M.E. Caruso, A. Luches, M. Martino, F. Romano, D. Valerini, M. Anni, Appl. Surf. Sci. 253, 6461 (2007)

    Article  ADS  Google Scholar 

  22. A.P. Caricato, M. Lomascolo, A. Luches, F. Mandoj, M.G. Manera, M. Mastroianni, M. Martino et al., Appl. Phys. A, Mater. Sci. Process. 93, 651 (2008)

    Article  ADS  Google Scholar 

  23. A. Stanculescu, L. Vacareanu, M. Grigoras, M. Socol, G. Socol, F. Stanculescu, N. Preda et al., Appl. Surf. Sci. 257, 5298 (2011)

    Article  ADS  Google Scholar 

  24. F. Bloisi, A. Cassinese, R. Papa, L. Vicari, V. Califano, Thin Solid Films 516, 1594 (2008)

    Article  ADS  Google Scholar 

  25. C. Constantinescu, E. Morîntale, A. Emandi, M. Dinescu, P. Rotaru, J. Therm. Anal. Calorim. 104, 707 (2011)

    Article  Google Scholar 

  26. R. Critescu, I. Stamatin, D.E. Mihaiescu, C. Ghica, M. Albulescu, I.N. Mihailescu, D.B. Chrisey, Thin Solid Films 453–454, 262 (2004)

    Article  Google Scholar 

  27. D.M. Bubb, B.R. Ringeisen, J.H. Callahan, M. Galicia, A. Vertes, J.S. Horwitz, R.A. McGill, E.J. Houser, P.K. Wu, A. Piqué, D.B. Chrisey, Appl. Phys. A, Mater. Sci. Process. 73, 121 (2001)

    Article  ADS  Google Scholar 

  28. P.K. Wu, B.R. Ringeisen, J. Callahan, M. Brooks, D.M. Bubb, H.D. Wu, A. Piqué, B. Spargo, R.A. McGill, D.B. Chrisey, Thin Solid Films 398–399, 607 (2001)

    Article  Google Scholar 

  29. P.K. Wu, B.R. Ringeisen, D.B. Krizman, C.G. Frondoza, M. Brooks, D.M. Bubb, R.C.Y. Auyeung, A. Piqué, B. Spargo, R.A. McGill, D.B. Chrisey, Rev. Sci. Instrum. 74, 2546 (2003)

    Article  ADS  Google Scholar 

  30. A.L. Mercado, J.M. Fitz-Gerald, R. Johnson, J.D. Talton, Mat. Res. Soc. Symp. Proc. 780, Y4.4.1 (2003)

    Google Scholar 

  31. A.L. Mercado, C.E. Allmond, F.G. Hoekstra, J.M. Fitz-Gerald, Appl. Phys. A, Mater. Sci. Process. 81, 591 (2005)

    Article  ADS  Google Scholar 

  32. R. Critescu, D.E. Mihaiescu, G. Socol, I. Stamatin, I.N. Mihailescu, D.B. Chrisey, Appl. Phys. A, Mater. Sci. Process. 79, 1023 (2004)

    ADS  Google Scholar 

  33. K. Rodrigo, B. Toftmann, J. Schou, R. Pedrys, Chem. Phys. Lett. 399, 368 (2004)

    Article  ADS  Google Scholar 

  34. B. Toftmann, K.B. Rodrigo, J. Schou, R. Pedrys, Appl. Surf. Sci. 247, 211 (2005)

    Article  ADS  Google Scholar 

  35. K. Rodrigo, B. Toftmann, J. Schou, R. Pedrys, J. Low Temp. Phys. 139, 683 (2005)

    Article  ADS  Google Scholar 

  36. I.A. Paun, V. Ion, A. Moldovan, M. Dinescu, Appl. Surf. Sci. 257, 5259 (2011)

    Article  ADS  Google Scholar 

  37. B.R. Ringeisen, J. Callahan, P.K. Wu, A. Piqué, B. Spargo, R.A. McGill, M. Bucaro, H. Kim, D.M. Bubb, D.B. Chrisey, Langmuir 17, 3472 (2001)

    Article  Google Scholar 

  38. L. Stamatin, R. Critescu, G. Socol, A. Moldovan, D. Mihaiescu, I. Stamatin, I.N. Mihailescu, D.B. Chrisey, Appl. Surf. Sci. 248, 422 (2005)

    Article  ADS  Google Scholar 

  39. T. Patz, R. Critescu, R. Narayan, N. Menegazzo, B. Mizaikoff, P.B. Messersmith, I. Stamatin, I.N. Mihailescu, D.B. Chrisey, Appl. Surf. Sci. 248, 416 (2005)

    Article  ADS  Google Scholar 

  40. E. György, A. Perez Del Pino, G. Sauthier, A. Figueras, J. Appl. Phys. 106, 114702 (2009)

    Article  ADS  Google Scholar 

  41. E. Leveugle, L.V. Zhigilei, A. Sellinger, J.M. Fitz-Gerald, Appl. Surf. Sci. 253, 6456 (2007)

    Article  ADS  Google Scholar 

  42. E. Leveugle, L.V. Zhigilei, J. Appl. Phys. 102, 074914 (2007)

    Article  ADS  Google Scholar 

  43. D.M. Bubb, J. Corgan, S. Yi, M. Khan, L. Hughes, U. Gurudas, M. Papantonakis, R.A. McGill, Appl. Phys. A, Mater. Sci. Process. 100, 523 (2010)

    Article  ADS  Google Scholar 

  44. D.M. Bubb, P.K. Wu, J.S. Horwitz, J.H. Callahan, M. Galicia, A. Vertes, R.A. McGill, E.J. Houser, B.R. Ringeisen, D.B. Chrisey, J. Appl. Phys. 91, 2055 (2002)

    Article  ADS  Google Scholar 

  45. R. Pate, K.R. Lantz, A.D. Stiff-Roberts, IEEE J. Sel. Top. Quantum Electron. 14, 1022 (2008)

    Article  Google Scholar 

  46. D.M. Bubb, S.M. O’Malley, C. Antonacci, D. Simonson, R.A. McGill, J. Appl. Phys. 95, 2175 (2004)

    Article  ADS  Google Scholar 

  47. D.M. Bubb, S.M. O’Malley, C. Antonacci, R. Belmont, R.A. McGill, C. Crimi, Appl. Phys. A, Mater. Sci. Process. 81, 119 (2005)

    Article  ADS  Google Scholar 

  48. A.P. Caricato, M.G. Manera, M. Martino, R. Rella, F. Romano, J. Spadavecchia, T. Tunno, D. Valerini, Appl. Surf. Sci. 253, 6471 (2007)

    Article  ADS  Google Scholar 

  49. R. Rella, J. Spadavecchia, M.G. Manera, S. Capone, A. Taurino, M. Martino, A.P. Caricato, T. Tunno, Sens. Actuators B, Chem. 127, 426 (2007)

    Article  Google Scholar 

  50. A.P. Caricato, M. Epifani, M. Martino, F. Romano, R. Rella, A. Taurino, T. Tunno, D. Valerini, J. Phys. D, Appl. Phys. 42, 095105 (2009)

    Article  ADS  Google Scholar 

  51. A. Piqué, Deposition of polymers and biomaterials using the matrix-assisted pulsed laser evaporation (MAPLE) process, in Pulsed Laser Deposition of Thin films, ed. by R. Eason (Wiley, Hoboken, 2007), Chap. 3

    Google Scholar 

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  1. Materials Science and Technology Division, Naval Research Laboratory, Washington, DC, USA

    Alberto Piqué

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Piqué, A. The Matrix-Assisted Pulsed Laser Evaporation (MAPLE) process: origins and future directions. Appl. Phys. A 105, 517–528 (2011). https://doi.org/10.1007/s00339-011-6594-7

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  • DOI: https://doi.org/10.1007/s00339-011-6594-7

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