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Optimization of PDMS network for a fast response and sensitive actuation material applied in a MEMS spatial light modulator

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Abstract

The cross-linked networks of linear vinyl-terminated poly(dimethylsiloxane) (PDMS) with trimethylsiloxy-terminated methyhydrosiloxane–dimethylsiloxane copolymer (cross-linker) were investigated by tuning the cross-linker concentration, the chain length of linear PDMS and the functionality of the cross-linker. Response time and elastic modulus of the cross-linked PDMS elastomer were characterized by home-made measurement systems and analyzed based on their network topologies. An optimized PDMS elastomer, which has response time of 9 μs and elastic modulus of 601 kPa, was utilized as the actuation material in a MEMS spatial light modulator (SLM). The fabrication processes were described. This polymer based SLM has shown fast response time (9 μs) and successfully diffracted light into higher orders with 84% first-order diffraction efficiency.

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References

  1. H.P. Pham, V.D. Dao, S. Amaya, R. Kitada, Y. Li, S. Sugiyama, IEEJ Trans. Sens. Micromach. 126(7), 306–311 (2006)

    Article  ADS  Google Scholar 

  2. T. Aida, Y. Habu, T. Kato, Proc. SPIE 6993, 699301–699308 (2008)

    Article  Google Scholar 

  3. D.Y. Jeong, E.K. Hong, J. Korean Phys. Soc. 48(2), 229–232 (2006)

    Google Scholar 

  4. S.J. Clarson, J.A. Semlyen, Siloxane Polymers (Englewood Cliffs, Prentice Hall, 1993)

    Google Scholar 

  5. D.-W. Lee, Y.-S. Choi, Microelectron. Eng. 85(5–6), 1054–1058 (2008)

    Article  Google Scholar 

  6. Y.J. Chuang, T.H. Liao, P.R. Chen, K.Y. Hung, J. Micromech. Microeng. 20(8), 129901 (2010)

    Article  Google Scholar 

  7. G. Ouyang, K. Wang, L. Henriksen, M.N. Akram, X.Y. Chen, Sens. Actuators A, Phys. 158(2), 313–319 (2010)

    Article  Google Scholar 

  8. G. Ouyang, Z. Tong, M.N. Akram, K. Wang, V. Kartashov, X. Yan, X. Chen, Opt. Lett. 35(17), 2852–2854 (2010)

    Article  ADS  Google Scholar 

  9. S.M. Azmayesh-Fard, E. Flaim, J.N. McMullin, J. Micromech. Microeng. 20(8) (2010)

  10. T. Fujii, Microelectron. Eng. 61–62, 907–914 (2002)

    Article  Google Scholar 

  11. K.S. Phillips, K.M. Kang, L. Licata, N.L. Allbritton, Lab. Chip. 10(7), 864–870 (2010)

    Article  Google Scholar 

  12. M.A. Llorente, J.E. Mark, Macromolecules 13(3), 681–685 (1980)

    Article  ADS  Google Scholar 

  13. J.E. Mark, J. Am. Chem. Soc. 92(25), 7252–7257 (1970)

    Article  Google Scholar 

  14. S.K. Patel, S. Malone, C. Cohen, J.R. Gillmor, R.H. Colby, Macromolecules 25(20), 5241–5251 (1992)

    Article  ADS  Google Scholar 

  15. B. Marciniec, Comprehensive Handbook on Hydrosilylation (Pergamon, Oxford, 1992)

    Google Scholar 

  16. L.Z. Rogovina, V.G. Vasil’ev, G.L. Slonimskii, M.V. Sobolevskii, P.V. Ivanov, Mech. Compos. Mater. 29(3), 307–313 (1993)

    Article  Google Scholar 

  17. A.C. Ugural, S.K. Fenster, Advanced Strength and Applied Elasticity, 4th edn. (Prentice Hall, Upper Saddle River, 2003)

    Google Scholar 

  18. A.C.C. Esteves, J. Brokken-Zijp, J. Laven, H.P. Huinink, N.J.W. Reuvers, M.P. Van, G. de With, Polymer 50(16), 3955–3966 (2009)

    Article  Google Scholar 

  19. J.M.G. Cowie, V. Arrighi, Polymers: Chemistry and Physics of Modern Materials, 3rd edn. (CRC Press, Boca Raton, 2007)

    Google Scholar 

  20. M. Doi, S.F. Edwards, The Theory of Polymer Dynamics (Clarendon, Oxford, 1999)

    Google Scholar 

  21. N.R. Langley, Macromolecules 1(4), 348–352 (1968)

    Article  ADS  Google Scholar 

  22. L.M. Dossin, W.W. Graessley, Macromolecules 12(1), 123–130 (1979)

    Article  ADS  Google Scholar 

  23. G. Ouyang, K. Wang, M.N. Akram, X.Y. Chen, Proc. SPIE 7426, 742601–742604 (2009)

    Google Scholar 

  24. R. Pelrine, R. Kornbluh, J. Joseph, R. Heydt, Q.B. Pei, S. Chiba, Mater. Sci. Eng., C, Biomim. Mater., Sens. Syst. 11(2), 89–100 (2000)

    Article  Google Scholar 

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Authors and Affiliations

  1. Vestfold University College, RI, Raveien 197, Borre, 3184, Norway

    G. Ouyang, K. Wang, M. N. Akram & X. Y. Chen

  2. poLight AS, Horten, 3179, Norway

    L. Henriksen

Authors
  1. G. Ouyang
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  2. K. Wang
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  3. M. N. Akram
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  4. L. Henriksen
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  5. X. Y. Chen
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Correspondence to X. Y. Chen.

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Ouyang, G., Wang, K., Akram, M.N. et al. Optimization of PDMS network for a fast response and sensitive actuation material applied in a MEMS spatial light modulator. Appl. Phys. A 103, 381–388 (2011). https://doi.org/10.1007/s00339-011-6348-6

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  • DOI: https://doi.org/10.1007/s00339-011-6348-6

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