Skip to main content
SpringerLink
Log in

Simple fabrication of hexagonally well-ordered AAO template on silicon substrate in two dimensions

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

In this study, thin anodic aluminum oxide (AAO) templates both on silicon substrates (AAO template/SiO2/Si) and Ti-coated silicon substrates (AAO template/Ti/SiO2/Si) were developed for design of magnetic, electronic and optoelectronic devices, chemical sensors and chip-scale lithium-ion rechargeable microbatteries. Two types of AAO template were prepared by using a two-step anodization procedure. The templates were characterized by scanning electron microscopy and energy dispersive X-ray spectroscopy. The obtained thin AAO templates were approximately 50 nm in diameter and 700 nm in length with 80-nm interpore distances in a relatively large area of 6 cm2. A barrier layer of the AAO templates was removed by a cathodic polarization method in KCl solution for several seconds. The current–time transient during removing the alumina barrier layer of the thin AAO template and the mechanism of electrochemical dissolution of the barrier layer are given in detail.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. S. Bandyopadhyay, H. Singh Nalwa (eds.), Quantum Dots and Nanowires (American Scientific, Stevenson Ranch, 2003)

    Google Scholar 

  2. I. Lombardi, A.I. Hochbaum, P.D. Yang, C. Carraro, R. Maboudian, Chem. Mater. 18, 988 (2006)

    Article  Google Scholar 

  3. M. Lahav, E.A. Weiss, Q.B. Xu, G.M. Whitesides, Nano Lett. 6, 2166 (2006)

    Article  Google Scholar 

  4. S. Zhao, H. Roberge, A. Yelon, T. Veres, J. Am. Chem. Soc. 128, 12352 (2006)

    Article  Google Scholar 

  5. H. Gao, N.N. Gosvami, J. Deng, L.-S. Tan, M.S. Sander, Langmuir 22, 8087 (2006)

    Google Scholar 

  6. W. West, N. Myung, J. Whitacre, B. Ratnakumar, J. Power Sources 126, 203 (2004)

    Article  Google Scholar 

  7. H. Masuda, K. Fukuda, Science 268, 1466 (1995)

    Article  ADS  Google Scholar 

  8. O. Jessensky, F. Müller, U. Gösele, Appl. Phys. Lett. 72, 1173 (1998)

    Article  ADS  Google Scholar 

  9. V.P. Parkhutik, V.I. Shershulsky, J. Phys. D, Appl. Phys. 25, 1258 (1992)

    Article  ADS  Google Scholar 

  10. K. Nielsch, F. Müller, A.P. Li, U. Gösele, Adv. Mater. 12, 582 (2000)

    Article  Google Scholar 

  11. A.P. Li, F. Müller, A. Birner, K. Nielsch, U. Gösele, J. Appl. Phys. 84, 6023 (1998)

    Article  ADS  Google Scholar 

  12. O. Jessensky, F. Müller, U. Gösele, J. Electrochem. Soc. 145, 3735 (1998)

    Article  Google Scholar 

  13. W. Lee, R. Li, U. Gösele, K. Nielsch, Nat. Mater. 5, 741 (2006)

    Article  ADS  Google Scholar 

  14. X. Zhao, S.-K. Seo, U.-J. Lee, K.-H. Lee, J. Electrochem. Soc. 154, C553 (2007)

    Article  Google Scholar 

  15. R.C. Furneaux, W.R. Rigby, A.P. Davidson, Nature 337, 147 (1989)

    Article  ADS  Google Scholar 

  16. H.B. Xu, H.Z. Chen, W.J. Xu, M. Wang, Chem. Phys. Lett. 412, 294 (2005)

    Article  ADS  Google Scholar 

  17. S.K. Hwang, S.H. Jeong, O.J. Lee, K.H. Lee, Microelectron. Eng. 77, 2 (2005)

    Article  Google Scholar 

  18. A. Saedi, M. Ghorbani, Mater. Chem. Phys. 91, 417 (2005)

    Article  Google Scholar 

  19. O. Rabin, P.R. Herz, Y.M. Lin, A.I. Akinwande, B.S. Cronin, M.S. Dresselhaus, Adv. Funct. Mater. 13, 8 (2003)

    Article  Google Scholar 

  20. M. Tian, S. Xu, J. Wang, N. Kumar, E. Wertz, Q. Li, P.M. Campbell, M.H.W. Chan, T.E. Mallouk, Nano Lett. 5, 4 (2005)

    Article  Google Scholar 

  21. M.S. Sander, L.-S. Tan, Adv. Funct. Mater. 13, 5 (2003)

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Physics, Gebze Institute of Technology, 41400, Gebze Kocaeli, Turkey

    Nevin Taşaltın, Sadullah Öztürk, Necmettin Kılınç & Zafer Ziya Öztürk

  2. TUBITAK Marmara Research Centre, P.O. Box 21, 41470, Gebze Kocaeli, Turkey

    Hayrettin Yüzer & Zafer Ziya Öztürk

Authors
  1. Nevin Taşaltın
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Sadullah Öztürk
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Necmettin Kılınç
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Hayrettin Yüzer
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Zafer Ziya Öztürk
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Zafer Ziya Öztürk.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Taşaltın, N., Öztürk, S., Kılınç, N. et al. Simple fabrication of hexagonally well-ordered AAO template on silicon substrate in two dimensions. Appl. Phys. A 95, 781–787 (2009). https://doi.org/10.1007/s00339-009-5071-z

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-009-5071-z

PACS

Search

Navigation