Abstract
This paper presents an experimental investigation of the novel thermal manufacturing process of printing and laser curing of nanoparticle-laden inks that can produce functional microstructures such as electronic microresistors and interconnections for semiconductors and other devices. Of specific interest are the complex and interweaved transport phenomena involved, focusing on the absorption and diffusion processes of irradiated laser energy influencing solvent vaporization, the nanoparticle curing process, the substrate, and the final quality of the produced resistor. Parametric studies of the thermal process together with extensive microscopy analysis of the topography and resistivity measurements piece together a better understanding of the underlying physics and aid the development of the technology.
Similar content being viewed by others
References
P. Buffat, J.P. Borel: Phys. Rev. A 13, 6 (1976)
N.R. Bieri, J. Chung, S.E. Haferl, D. Poulikakos, C.P. Grigoropoulos: Appl. Phys. Lett. 82, 20 (2003)
S. Haferl, D. Poulikakos: J. Appl. Phys. 92, 3 (2002)
S. Haferl, Z. Zhao, J. Giannakouros, D. Attinger, D. Poulikakos: Rev. Heat Transf. XI, 65 (2000)
D. Attinger, Z. Zhao, D. Poulikakos: J. Heat Transf. – Trans. ASME 122, 544 (2000)
D.B. Bogy, F.E. Talke: IBM J. Res. Dev. 28, 3 (1984)
J.F. Dijksman: J. Fluid Mech. 139, 173 (1984)
S. Haferl, D. Poulikakos: Int. J. Heat Mass Transf. 46, 3 (2003)
A.L. Yarin, D.A. Weiss: J. Fluid Mech. 283, 141 (1995)
J. Chung, S.H. Ko, N.R. Bieri, C.P. Grigoropoulos, D. Poulikakos: Appl. Phys. Lett. 84, 5 (2004)
T.D. Bennett, D.J. Krajnovich, L. Li, D.J. Wan: J. Appl. Phys. 84, 5 (1998)
N.R. Bieri, J. Chung, D. Poulikakos, C.P. Grigoropoulos: Superlattices Microstruct. 35, 437 (2004)
J. Chung, N.R. Bieri, S. Ko, C.P. Grigoropoulos, D. Poulikakos: Appl. Phys. A 79, 1259 (2004)
T.D. Bennett, D.J. Krajnovich, L. Li: J. Appl. Phys. 85, 1 (1999)
T.D. Bennett, L. Li: J. Appl. Phys. 89, 2 (2001)
T.R. Shiu, C.P. Grigoropoulos, D.G. Cahill, R. Greif: J. Appl. Phys. 86, 3 (1999)
T.R. Shiu, C.P. Grigoropoulos, R. Greif: J. Heat Transf. - Trans. ASME 121, 4 (1999)
P.G. Debenedetti, F.H. Stillinger: Nature 410, 6825 (2001)
J.E. Moody, R.H. Hendel: J. Appl. Phys. 53, 6 (1982)
E.D. Palik: Handbook of Optical Constants of Solids II (Academic Press, San Diego 1991)
X. Zhang, S.S. Chu, J.R. Ho, C.P. Grigoropoulos: Appl. Phys. A 64, 545 (1997)
Author information
Authors and Affiliations
Corresponding author
Additional information
PACS
81.16.Mk; 81.16.Rf
Rights and permissions
About this article
Cite this article
Bieri, N., Chung, J., Poulikakos, D. et al. An experimental investigation of microresistor laser printing with gold nanoparticle-laden inks. Appl. Phys. A 80, 1485–1495 (2005). https://doi.org/10.1007/s00339-004-3195-8
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00339-004-3195-8