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Laser-based micro/nanofabrication in one, two and three dimensions

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Abstract

Advanced micro/nanofabrication of functional materials and structures with various dimensions represents a key research topic in modern nanoscience and technology and becomes critically important for numerous emerging technologies such as nanoelectronics, nanophotonics and micro/nanoelectromechanical systems. This review systematically explores the non-conventional material processing approaches in fabricating nanomaterials and micro/nanostructures of various dimensions which are challenging to be fabricated via conventional approaches. Research efforts are focused on laser-based techniques for the growth and fabrication of one-dimensional (1D), two-dimensional (2D) and three-dimensional (3D) nanomaterials and micro/nanostructures. The following research topics are covered, including: 1) laser-assisted chemical vapor deposition (CVD) for highly efficient growth and integration of 1D nanomaterial of carbon nanotubes (CNTs), 2) laser direct writing (LDW) of graphene ribbons under ambient conditions, and 3) LDW of 3D micro/nanostructures via additive and subtractive processes. Comparing with the conventional fabrication methods, the laser-based methods exhibit several unique advantages in the micro/nanofabrication of advanced functional materials and structures. For the 1D CNT growth, the laser-assisted CVD process can realize both rapid material synthesis and tight control of growth location and orientation of CNTs due to the highly intense energy delivery and laser-induced optical near-field effects. For the 2D graphene synthesis and patterning, room-temperature and open-air fabrication of large-scale graphene patterns on dielectric surface has been successfully realized by a LDW process. For the 3D micro/nanofabrication, the combination of additive two-photon polymerization (TPP) and subtractive multi-photon ablation (MPA) processes enables the fabrication of arbitrary complex 3D micro/nanostructures which are challenging for conventional fabrication methods. Considering the numerous unique advantages of laser-based techniques, the laser-based micro/nanofabrication is expected to play a more and more important role in the fabrication of advanced functional micro/nano-devices.

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Authors and Affiliations

  1. Department of Electrical Engineering, University of Nebraska-Lincoln, Lincoln, NE, 68588, USA

    Wei Xiong, Yunshen Zhou, Wenjia Hou, Lijia Jiang, Masoud Mahjouri-Samani, Jongbok Park, Xiangnan He, Yang Gao, Lisha Fan & Yongfeng Lu

  2. Technology and Applications Center, Newport Corporation, Irvine, CA, 92606, USA

    Tommaso Baldacchini

  3. Institute of Chemistry of Condensed Matter of Bordeaux, ICMCB-CNRS 87, Avenue du Docteur Albert Schweitzer, F-33608, Pessac Cedex, France

    Jean-Francois Silvain

Authors
  1. Wei Xiong
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  2. Yunshen Zhou
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  3. Wenjia Hou
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  4. Lijia Jiang
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  5. Masoud Mahjouri-Samani
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  6. Jongbok Park
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  7. Xiangnan He
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  8. Yang Gao
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  9. Lisha Fan
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  10. Tommaso Baldacchini
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  11. Jean-Francois Silvain
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  12. Yongfeng Lu
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Corresponding author

Correspondence to Yongfeng Lu.

Additional information

Wei Xiong is currently a postdoctoral research associate in Laser Assisted Nano Engineering (LANE) Lab at University of Nebraska-Lincoln (UNL). He received his Ph.D. degree in electrical engineering from University of Nebraska-Lincoln in 2013 and obtained his B.Sc. and M.Sc. degrees from Huazhong University of Science and Technology in 2004 and Fudan University in 2007, respectively. His research interests include synthesis and integration of carbon nano-materials such as carbon nanotubes and graphene, and 3D fabrication of polymeric and carbon-based functional micro/nano-structures. Currently he is working on 3D micro/nanofabrication and large-scale 2D material synthesis.

Yongfeng Lu is currently the Lott Distinguished Professor of Engineering at the University of Nebraska-Lincoln (UNL). He received his bachelor degree from Tsinghua University (China) in 1984 and M.Sc. and Ph.D. degrees from Osaka University (Japan) in 1988 and 1991, all in electrical engineering. From 1991 to 2002, he was a faculty in the ECE Department at National University of Singapore. He joined the Department of Electrical Engineering at UNL in 2002. He has more than 20 years of experience in processing and characterization of micro/nanostructured materials. His group has research projects funded by NSF, AFOSR, ONR, DTRA, DOE, DOT, NCESR, NRI, private companies, and other foundations in Japan, with research expenditures of $20 million in the past a few years. His research has led to a number of commercialization and product developments. Dr. Lu has authored or co-authored over 300 journal papers and 350 conference papers. He has been elected to SPIE fellow, LIA fellow, and OSA fellow. He served as the President of the Laser Institute of America in 2014. He has also served as chair and general chair for major international conferences in the field including the general congress chair for the International Congress of Applications of Lasers and Electro-Optics in 2007 and 2008, and general co-chair for LASE in Photonics West 2014 and 2015.

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Xiong, W., Zhou, Y., Hou, W. et al. Laser-based micro/nanofabrication in one, two and three dimensions. Front. Optoelectron. 8, 351–378 (2015). https://doi.org/10.1007/s12200-015-0481-3

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