Abstract
Vanadium oxides have for many decades attracted much attention for their rich and unique physical properties which pose intriguing questions as to their fundamental origins as well as offering numerous potential applications for microelectronics, sensors, and microelectromechanical systems (MEMS). This paper reviews the unique structure and properties of the two most common vanadium oxides which have entered into microfabricated devices, VO2 and V2O5, and some of the past and future device applications which can be realized using these materials. Two emerging new materials, sodium vanadium bronzes and vanadium oxide nanotubes are also discussed for their potential use in new microelectronic devices.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Adler D, Feinlaub J, Books H, Paul W 1967 Semiconductor-to-metal transitions in transition metal compounds. Phys. Rev. 155: 851–860
Balberg I, Trokman S 1975 High-contrast optical storage in VO2 films. J. Appl. Phys. 46: 2111–2119
Biermann S, Poteryaev A, Lichtenstein A I, Georges A 2005 Dynamical singlets and correlation-assisted peierls transition in VO2. Phys. Rev. Lett. 94: 026404
Bullot J, Gallais O, Gauthier M, Livage J 1980 Appl. Phys. Lett. 36: 986
Cavalleri A, Dekorsy T, Chong H H W, Kieffer J C, Shoenlein R W 2004a Evidence for a structurally-driven insulator-to-metal transition in VO2: A view from the ultrafast timescale. Phys. Rev. B, Rapid Comm. 70: 161102(R)
Cavalleri A, Chong H H W, Fourmaux S, Glover T E, Heimann P A, Kieffer J C, Mun B S, Padmore H A, Shoenlein R W 2004b Picosecond soft x-ray absorption measurement of the photoinducted insulator-to-metal transition in VO2. Phys. Rev. B69: 153106
Cavalleri A, Rini M, Chong H H W, Fourmaux S, Glover T E, Heimann P A, Kieffer J C, Shoenlein R W 2005 Band-selective measurement of electronic dynamics in VO2 using Femtosecond near edge X-ray absorption. Phys. Rev. Lett. 95: 067405
Cogan S F, Nguyen N M, Perrotti S J, Rauh R D 1989 Optical properties of electrochromic vanadium pentoxide. J. Appl. Phys. 66: 1333–1337
Eyert V, Höch K-H 1998 Electronic structure of V2O5: Role of octahedral deformations. Phys. Rev. B57: 12727–12737
Haverkort M W, Hu Z, Tanaka A, Reichelt W, Streltsov S V, Korotin M A, Anisimov V I, Hsieh H H, Lin H-J, Chen C T, Khomskii D I, Tjeng L H 2005 Orbital-assisted metal-insulator transition in VO2. Phys. Rev. Lett. 95: 196404
Hermann K, Chakrabarti A, Druzinic R, Witko M 1999 Ab-initio density functional theory studies of hydrogen absorption at the V2O5(010) surface. Phys. Stat. Sol. A173: 195–208
Iwanaga S, Darling R B, Cobden D H 2005 Stable and erasable patterning of vanadium pentoxide thin films by atomic force microscope nanolithography. Appl. Phys. Lett. 86: 133113
Iwanaga S, Marciniak M, Darling R B, Ohuchi F S 2007 Thermopower and electrical conductivity of sodium-doped V2O5 thin films. J. Appl. Phys. 101: 123709
Jerominek H, Picard F, Vincent D 1993 Vanadium oxide films for optical switching and detection. Opt. Eng. 32: 2092–2099
Jin P, Yoshimura K, Tanemura S 1997 Dependence of microstructure and thermochromism on substrate temperature for sputter-deposited VO2 epitaxial films. J. Vac. Sci. Tech. A15: 1113–1117
Kawada I, Kimizuka N, Nakahira M 1971 Crystallographic investigations of the phase transition of VO2. J. Appl. Cryst. 4: 343–347
Kahn M S R, Khan K A, Estrada W, Granqvist C G 1991 Electrochromism and thermochromism of LixVO2 thin films. J. Appl. Phys. 69: 3231–3234
Kounavis P, Vomvas A, Mytilineou E, Roilos M, Murawski L 1988 J. Phys. C21: 967
Kucharczyk D, Niklewski T 1979 Accurate X-ray determination of the lattice parameters and the thermal expansion coefficients of VO2 near the transition temperature. J. Appl. Cryst. 12: 370–373
Liu X, Täschner C, Leonhardt A, Rümmeli M H, Pichler T, Gemming T, Büchner B, Knupfer M 2005 Structural, optical, and electronic properties of vanadium oxide nanotubes. Phys. Rev. B72: 115407
Narayan J, Bhosle V M 2006 Phase transition and critical issues in structure-property correlations of vanadium oxide. J. Appl. Phys. 100: 103524
Obermeier G, Ciesla D, Klimm S, Horn S 2002 Pressure dependence of phase transitions in the quasione-dimensional metal-insulator transition system β-Na1/3V2O5. Phys. Rev. B66: 085117
Pan M, Zhong H, Wang S-W, Li Z, Chen X, Lu W 2004 First-principle study on the chromium doping effect on the crystal structure of metallic VO2. Chem. Phys. Lett. 398: 304–307
Talledo A, Andersson A M, Granqvist C G 1991 Structure and optical absorption of LiyV2O5 thin films. J. Appl. Phys. 69: 3261–3265
Talledo A, Granqvist C G, 1995 Electrochromic vanadium-pentoxide-based films: Structural, electrochemical, and optical properties. J. Appl. Phys. 77: 4655–4666
Wood R A, Stelzer 1992 Proc. IRIS Conf.
Wood R A, Han C J, Coole B E, Higashi R E 1992 Uncooled monolithic silicon focal plane developement Proc. IRIS Detector Speciality Group
Wood R A 2002 Semiconductors and Semimetals, 47, Ch. 3
Yamada H, Ueda Y 1999 J. Phys. Soc. Jpn. 68: 2735
Yamauchi T, Ueda Y, Môri N 2002 Pressure-induced superconductivity in β-Na0·33V2O5 beyond charge ordering. Phys. Rev. Lett. 89: 057002
Zavalij P Y, Whittingham M S 1999 Structural chemistry of vanadium oxides with open frameworks. Acta Cryst. B55: 627–633
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Darling, R.B., Iwanaga, S. Structure, properties, and MEMS and microelectronic applications of vanadium oxides. Sadhana 34, 531–542 (2009). https://doi.org/10.1007/s12046-009-0025-x
Published:
Issue Date:
DOI: https://doi.org/10.1007/s12046-009-0025-x