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Review of Recent Advances in Applications of Vapor-Phase Material Infiltration Based on Atomic Layer Deposition

  • Application of Atomic Layer Deposition for Functional Nanomaterials
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Abstract

Polymer–inorganic hybrid nanocomposites exhibit enhanced material properties, combining the advantages of both their organic and inorganic subcomponents. Extensive research is being carried out to functionalize polymers towards various improved physicochemical characteristics such as electrical, optical, and mechanical properties for various applications. Vapor-phase material infiltration is an emerging hybridization route, derived from atomic layer deposition, which facilitates uniform incorporation of inorganic entities into a polymer matrix, leading to novel applications in fields such as microelectronics, energy storage, smart coatings, and smart fabrics. In this article, recent advances in employing vapor-phase material infiltration as a hybridization and nanopatterning technique for various application avenues are reviewed.

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Adapted from Ref. 17

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Adapted from Ref. 21

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Adapted from Ref. 31

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Adapted from Ref. 36

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Adapted from Ref. 6

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Adapted from Ref. 43

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Adapted from Ref. 53

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Reprinted from Ref. 58

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Acknowledgements

The research was in part carried out at the Center for Functional Nanomaterials (CFN), Brookhaven National Laboratory (BNL), which is supported by the US Department of Energy, Office of Basic Energy Sciences, under Contract No. DE-SC0012704.

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Authors and Affiliations

  1. Department of Materials Science and Chemical Engineering, Stony Brook University, Stony Brook, NY, 11794, USA

    Ashwanth Subramanian & Chang-Yong Nam

  2. Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, NY, 11973, USA

    Nikhil Tiwale & Chang-Yong Nam

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  1. Ashwanth Subramanian
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  2. Nikhil Tiwale
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Correspondence to Chang-Yong Nam.

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Subramanian, A., Tiwale, N. & Nam, CY. Review of Recent Advances in Applications of Vapor-Phase Material Infiltration Based on Atomic Layer Deposition. JOM 71, 185–196 (2019). https://doi.org/10.1007/s11837-018-3141-4

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  • DOI: https://doi.org/10.1007/s11837-018-3141-4

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