Skip to main content
Log in

Growth of Zircone on Nanoporous Alumina Using Molecular Layer Deposition

  • Published:
JOM Aims and scope Submit manuscript

Abstract

Molecular layer deposition (MLD) is a sequential and self-limiting process that may be used to create hybrid organic/inorganic thin films from organometallic precursors and organic alcohol precursors. In this study, films of a zirconium-containing hybrid organic/inorganic polymer known as zircone were grown on nanoporous alumina using MLD. Scanning electron microscopy data showed obliteration of the pores in zircone-coated nanoporous alumina. An in vitro cell viability study indicated that the growth of human epidermal keratinocytes was the greatest on zircone-coated nanoporous alumina than on uncoated nanoporous alumina. Our results suggest that MLD may be used to create biocompatible coatings for use in many types of medical devices.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Fig. 1
Fig. 2
Fig. 3
Fig. 4

Similar content being viewed by others

References

  1. S.M. George, Chem. Rev. 110, 111 (2010).

    Article  Google Scholar 

  2. R.L. Puurunen, J. Appl. Phys. 97, 121301 (2005).

    Article  Google Scholar 

  3. B.H. Lee, B. Yoon, A.I. Abdulagatov, R.A. Hall, and S.M. George, Adv. Funct. Mater. 23, 532 (2013).

    Article  Google Scholar 

  4. M.E. Alf, A. Asatekin, M.C. Barr, S.H. Baxamusa, H. Chelawat, G. Ozaydin-Ince, C.D. Petruczok, R. Sreenivasan, W.E. Tenhaeff, N.J. Trujillo, S. Vaddiraju, J. Xu, and K.K. Gleason, Adv. Mater. 22, 1993 (2010).

    Article  Google Scholar 

  5. H.I. Shao, S. Umemoto, T. Kikutani, and N. Okui, Polymer 38, 459 (1997).

    Article  Google Scholar 

  6. A. Kim, M.A. Filler, S. Kim, and S.F. Bent, J. Am. Chem. Soc. 127, 6123 (2005).

    Article  Google Scholar 

  7. J.S. Lee, Y.J. Lee, E.L. Tae, Y.S. Park, and K.B. Yoon, Science 301, 818 (2003).

    Article  Google Scholar 

  8. T.V. Ivanova, P.S. Maydannik, and D.C. Cameron, J. Vac. Sci. Technol. A 30, 01A121 (2012).

    Article  Google Scholar 

  9. J.S. Park, H. Chae, H.K. Chung, and S.I. Lee, Semicond. Sci. Technol. 26, 034001 (2011).

    Article  Google Scholar 

  10. S.M. George, B. Yoon, and A.A. Dameron, Acc. Chem. Res. 42, 498 (2009).

    Article  Google Scholar 

  11. D.M. King, X. Liang, and A.W. Weimer, Powder Technol. 221, 13 (2012).

    Article  Google Scholar 

  12. H. Zhou and S.F. Bent, J. Vac. Sci. Technol. A 31, 040801 (2013).

    Article  Google Scholar 

  13. G. Ozaydin-Ince, A.M. Coclite, and K.K. Gleason, Rep. Prog. Phys. 75, 016501 (2012).

    Article  Google Scholar 

  14. X. Liang, M. Yu, J. Li, Y.B. Jiang, and A.W. Weimer, Chem. Commun. 46, 7140 (2009).

    Article  Google Scholar 

  15. B.H. Lee, V.R. Anderson, and S.M. George, Chem. Vap. Depos. 19, 204 (2013).

    Article  Google Scholar 

  16. A.A. Dameron, D. Saghete, B.B. Burton, S.D. Davison, A.S. Cananagh, J.A. Bertand, and S.M. George, Chem. Mater. 20, 3315 (2008).

    Article  Google Scholar 

  17. X. Liang, D.M. King, P. Li, S.M. George, and A.W. Weimer, AIChE J. 55, 1030 (2009).

    Article  Google Scholar 

  18. A.I. Abdulagatov, R.A. Hall, J.L. Sutherland, B.H. Lee, A.S. Cavanagh, and S.M. George, Chem. Mater. 24, 2854 (2012).

    Article  Google Scholar 

  19. S. Lee, M. Park, H.S. Park, Y. Kim, S. Cho, J.H. Cho, J. Park, and W. Hwang, Lab Chip 11, 1049 (2011).

    Article  Google Scholar 

  20. J.W. Elam, M.D. Groner, and S.M. George, Rev. Sci. Instrum. 73, 2981 (2002).

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Roger J. Narayan.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Hall, R.A., George, S.M., Kim, Y. et al. Growth of Zircone on Nanoporous Alumina Using Molecular Layer Deposition. JOM 66, 649–653 (2014). https://doi.org/10.1007/s11837-014-0933-z

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11837-014-0933-z

Keywords

Navigation