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Shallow donor generation in ZnO by remote hydrogen plasma

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Abstract

We investigate the effects of a remote hydrogen-plasma treatment on Hall parameters as well as on the bound exciton (BEx) photoluminescence (PL) for a variety of ZnO single crystals: bulk air-annealed, Li-doped, and epitaxially grown on sapphire. We present transport and spectroscopic evidence in favor of the hypothesis that hydrogen behaves as a shallow donor rather than a compensating center in ZnO. Specifically, we show that H-plasma-induced increases in I4 luminescence (photon energy: ∼3.363 eV at 4 K) correlate with increases in free-carrier concentrations from Hall-effect measurements.

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References

  1. D.C. Look, D.C. Reynolds, J.R. Sizelove, R.L. Jones, C.W. Litton, G. Cantwell, and W.C. Harsch, Solid State Commun. 105, 399 (1998).

    Article  CAS  Google Scholar 

  2. A. Schildknecht, R. Sauer, and K. Thonke, Physica B 340–342, 205 (2003).

    Article  Google Scholar 

  3. B.K. Meyer et al., Phys. Status Solidi B 241, 231 (2004).

    Article  CAS  Google Scholar 

  4. A.F. Kohan, G. Ceder, D. Morgan, and C.G. Van de Walle, Phys. Rev. B 61, 15019 (2000).

    Article  CAS  Google Scholar 

  5. C.G. Van de Walle, Phys. Rev. Lett. 85, 1012 (2000).

    Article  Google Scholar 

  6. B. Theys, V. Sallet, F. Jomard, A. Lusson, J.-F. Rommeluere, and Z. Teukam, J. Appl. Phys. 91, 3922 (2002).

    Article  CAS  Google Scholar 

  7. K. Ip, M.E. Overberg, Y.W. Heo, D.P. Norton, S.J. Pearton, C.E. Stutz, B. Luo, F. Ren, D.C. Look, and J.M. Zavada, Appl. Phys. Lett. 82, 386 (2003).

    Article  Google Scholar 

  8. D.M. Hofmann, A. Hofstaetter, F. Leiter, H. Zhou, F. Henecker, B.K. Meyer, S.B. Orlinskii, J. Schmidt, and P.G. Baranov, Phys. Rev. Lett. 88, 045504 (2002).

    Article  Google Scholar 

  9. S.F.J. Cox et al., Phys. Rev. Lett. 86, 2601 (2001).

    Article  CAS  Google Scholar 

  10. K. Shimomura, K. Nishiyama, and R. Kadono, Phys. Rev. Lett. 89, 255505 (2002).

    Article  Google Scholar 

  11. A.Y. Polyakov et al., J. Appl. Phys. 94, 400 (2003).

    Article  CAS  Google Scholar 

  12. A.Y. Polyakov et al., J. Appl. Phys. 94, 2895 (2003).

    Article  CAS  Google Scholar 

  13. E.V. Lavrov, J. Weber, F. Börrnert, C.G. Van de Walle, and R. Helbig, Phys. Rev. B 66, 165205 (2002).

    Article  Google Scholar 

  14. Y. Natsume and H. Sakata, J. Mater. Sci.: Mater. Electron. 12, 87 (2001).

    Article  CAS  Google Scholar 

  15. C.H. Seager and S.M. Myers, J. Appl. Phys. 94, 2888 (2003).

    Article  CAS  Google Scholar 

  16. S. Kohiki, M. Nishitani, T. Wada, and T. Hirao, Appl. Phys. Lett. 64, 2876 (1994).

    Article  CAS  Google Scholar 

  17. S.J. Baik, J.H. Jang, C.H. Lee, W.Y. Cho, and K.S. Lim, Appl. Phys. Lett. 70, 3516 (1997).

    Article  CAS  Google Scholar 

  18. Z. Zhou, K. Kato, T. Komaki, M. Yoshino, H. Yukawa, M. Morinaga, and K. Morita, J. Eur. Ceram. Soc. 24, 139 (2004).

    Article  CAS  Google Scholar 

  19. S. Kim, B.S. Kang, F. Ren, K. Ip, Y.W. Heo, D.P. Norton, and S.J. Pearton, Appl. Phys. Lett. 84, 1698 (2004).

    Article  CAS  Google Scholar 

  20. Y.M. Strzhemechny, J. Nemergut, J. Bae, D.C. Look, and L.J. Brillson, Mater. Res. Soc. Symp. Proc. 744, M3.9.1 (2003).

  21. Y.M. Strzhemechny, J. Nemergut, P.A. Smith, J. Bae, D.C. Look, and L.J. Brillson, J. Appl. Phys. 94, 4256 (2003).

    Article  CAS  Google Scholar 

  22. Y.M. Strzhemechny, H.L. Mosbacker, D.C. Look, D.C. Reynolds, C.W. Litton, N.Y. Garces, N.C. Giles, L.E. Halliburton, S. Niki, and L.J. Brillson, Appl. Phys. Lett. 84, 2545 (2004).

    Article  CAS  Google Scholar 

  23. K. Iwata, P. Fons, A. Yamada, K. Matsubara, and S. Niki, J. Cryst. Growth 209, 526 (2000).

    Article  CAS  Google Scholar 

  24. D.C. Look, R.L. Jones, J.R. Sizelove, N.Y. Garces, N.C. Giles, and L.E. Halliburton, Phys. Status Solidi A 195, 171 (2003).

    Article  CAS  Google Scholar 

  25. Original idea suggested in G. Lucovsky, D.V. Tsu, S.S. Kim, R.J. Markunas, and G.G. Fountain, Appl. Surf. Sci. 39, 33 (1989).

    Article  CAS  Google Scholar 

  26. D.C. Reynolds, D.C. Look, B. Jogai, C.W. Litton, T.C. Collins, W.C. Harsch, and G. Cantwell, Phys. Rev. B 57, 12151 (1998).

    Article  CAS  Google Scholar 

  27. D.C. Look, Mater. Sci. Eng. B80, 383 (2001).

    Article  CAS  Google Scholar 

  28. D.C. Look, D.C. Reynolds, C.W. Litton, R.L. Jones, D.B. Eason, and G. Cantwell, Appl. Phys. Lett. 81, 1830 (2002).

    Article  CAS  Google Scholar 

  29. K. Thonke, T. Gruber, N. Teofilov, R. Schonfelder, A. Waag, and R. Sauer, Physica B 308–310, 945 (2001).

    Article  Google Scholar 

  30. M. Strassburg et al., Phys. Status Solidi B 241, 607 (2004).

    Article  CAS  Google Scholar 

  31. N. Ohashi, T. Ishigaki, N. Okada, H. Taguchi, I. Sakaguchi, S. Hishita, T. Sekiguchi, and H. Haneda, J. Appl. Phys. 93, 6386 (2003).

    Article  CAS  Google Scholar 

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Authors and Affiliations

  1. Center for Materials Research, The Ohio State University, 43210, Columbus, OH

    Yuri M. Strzhemechny

  2. Deparment of Physics, The Ohio State University, USA

    Howard L. Mosbacker

  3. Department Electrical and Computer Engineering, The Ohio State University, USA

    Stephen H. Goss

  4. Semiconductor Research Center, Wright State University, 45435, Dayton, OH

    David C. Look

  5. Air Force Research Laboratory, AFRL/MLPS, 45435, Wright-Patterson AFB, OH

    Donald C. Reynolds & Cole W. Litton

  6. Department of Physics, West Virginia University, 26506, Morgantown, WV

    Nelson Y. Garces, Nancy C. Giles & Larry E. Halliburton

  7. Electrotechnical Laboratory, 305-8568, Ibaraki, Japan

    Shigeru Niki

  8. Department of Electrical and Computer Engineering, Department of Physics, and Center for Materials Research, The Ohio State University, USA

    Leonard J. Brillson

Authors
  1. Yuri M. Strzhemechny
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  2. Howard L. Mosbacker
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  3. Stephen H. Goss
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  4. David C. Look
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  5. Donald C. Reynolds
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  6. Cole W. Litton
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  7. Nelson Y. Garces
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  8. Nancy C. Giles
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  9. Larry E. Halliburton
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  10. Shigeru Niki
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  11. Leonard J. Brillson
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Strzhemechny, Y.M., Mosbacker, H.L., Goss, S.H. et al. Shallow donor generation in ZnO by remote hydrogen plasma. J. Electron. Mater. 34, 399–403 (2005). https://doi.org/10.1007/s11664-005-0118-1

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  • DOI: https://doi.org/10.1007/s11664-005-0118-1

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