Growth and characterization of OMVPE grown (In,Mn)As diluted magnetic semiconductor

Abstract

In_1−xMn_xAs diluted magnetic semiconductor (DMS) thin films with x 0.14 have been grown using organometallic vapor phase epitaxy. Tricarbonyl-(methylcyclopentadienyl)manganese was successfully used as the Mn source. Single phase, epitaxial films were achieved for compositions as high as x=0.14 using growth temperatures ≥475°C. For lower growth temperatures or x>0.14, nanometer scale MnAs precipitates were observed within the In_1−xMn_xAs matrix. Transport properties were investigated using the Hall effect. All Mn doped films were p-type with single phase films exhibiting hole concentrations 2≤×10¹⁹ cm⁻³. Magnetization was measured as a function of temperature and applied field for a single phase film with x=0.1. Ferromagnetic ordering was observed at 5 K with a saturation magnetization of M_s=68 emu/cm³, a remnant magnetization, M_r=10 emu/cm³, and a coercive field H_c=400 Oe.