Abstract
Double-crystal and triple-axis x-ray diffractometry and transmission electron microscopy are used to characterize the microstructure, strain, and composition of InGaN layers grown on GaN by metalorganic chemical vapor deposition (MOCVD). Three different samples with increasing In concentration have been studied, all grown on GaN deposited on sapphire either with GaN or AlN buffer layers. It was found that InGaN layers with nominal 28% and 40% InN content consist of two sub-layers; the first sub-layer is pseudomorphic with the underlying GaN with lower In content than nominal. The top sub-layer is fully relaxed with a high density of planar defects and In content close to the nominal value. This is in contrast to a common assumption applied to InGaN quantum wells that ‘quantum-dot like areas’ are formed with different In content. The sample with the nominal indium concentration of 45% does not exhibit any intermediate strained layer, is fully relaxed and the In concentration (43.8%) agrees well with the nominal value.
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J.H. Edgar et al., editors, Properties, Processing and Applications of GaN and Related Semiconductors, (London: Datareviews Series No. 23, 1999).
S. Chichibu, K. Wada, and S. Nakamura, Appl. Phys. Lett. 71, 2346 (1997).
I. Ho and G.B. Stringfellow, Appl. Phys. Lett. 69, 2701 (1996).
S. Nakamura, M. Senoh, S. Nagahama, N. Iwasa, T. Matushita, and T. Mukai, MRS Internet J. Nitride Res. 4S1, G1.1 (1999).
M.K. Behbehani, E.L. Piner, S.X. Liu, N.A. El-Masry, and S.M. Bedair, Appl. Phys. Lett. 75, 2202 (1999).
S. Chichibu, T. Azuhata, T. Sota, and S. Nakamura, Appl. Phys. Lett. 69, 4188 (1996).
Y. Narukawa, Y. Kawakami, M. Funato, S. Fujita, S. Fujita, and S. Nakamura, Appl Phys. Lett. 70, 981 (1998).
P.A. Grudowski, C.J. Eiting, J. Park, B.S. Shelton, D.J.H. Lambert, and R.D. Dupuis, Appl. Phys. Lett. 71, 1537 (1997).
H. Sakai, T. Takeuchi, S. Sota, M. Katsuragawa, M. Komori, H. Amano, and I. Akasaki, J. Cryst. Growth 189–190, 831 (1998).
N.A. El-Masry, E.L. Piner, S.X. Liu, and S.M. Bedair, Appl. Phys. Lett. 72, 40 (1998).
P.F. Fewster and N.L. Andrew, J. Appl. Crystallogr. 28, 451 (1995).
M. Halliwell, Ins. Phys. Conf. Ser. 134 (Bristol, U.K.: IOP, 1993) p. 555.
M. Schuster, P.O. Gervais, B. Jobs, M. Hosler, R. Averbeck, M. Riechert, A. Iberl, and M. Stommer, J. Phys. D.: Appl. Phys. 32, A56 (1999).
J. Hornstra and W.J. Bartels, J. Cryst. Growth 44, 513 (1978).
A. Sanz-Hervas, M. Aguilar, J.L. Sanchez-Rojas, A. Sacedon, E. Calleja, C. Villar, E.J. Abril, and M. Lopez, J. Appl. Phys. 82, 3297 (1997).
D. Doppalapudi, S.N. Basu, and T.D. Moustakas, J. Appl. Phys. 85, 883 (1999).
L.T. Romano, B.S. Krusor, M.D. McCluskey, D.P. Bour, and K. Nauka, Appl. Phys. Lett. 73, 1757 (1998).
J.W. Matthews and A.E. Blackslee, J. Cryst. Growth 32, 65 (1974).
T. Takeuchi, H. Takeuchi, S. Soto, H. Sakai, H. Amano, and I. Akasaki, Jpn. J. Appl. Phys, Part 2 36, L177 (1997).
Y. Narukawa, Y. Kawakami, S. Fujita, and S. Fujita, Phys. Rev. B 55, R1938 (1997).
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Liliental-Weber, Z., Benamara, M., Washburn, J. et al. Relaxation of InGaN thin layers observed by X-ray and transmission electron microscopy studies. J. Electron. Mater. 30, 439–444 (2001). https://doi.org/10.1007/s11664-001-0056-5
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DOI: https://doi.org/10.1007/s11664-001-0056-5