Skip to main content
SpringerLink
Log in

Profile Simulation and Fabrication of Gold Nanostructures by Separated Nanospheres with Oblique Deposition and Perpendicular Etching

  • Published:
Plasmonics Aims and scope Submit manuscript

Abstract

This paper investigates in detail the profiles of the nanostructures fabricated by nanosphere lithography through oblique deposition and perpendicular etching. 2D or 3D nanostructures can be achieved by this cost-effective method. Because the optical response of a particular nanoparticle depends on its size and shape, this angle deposition method can produce various shapes of nanostructures, which are suitable for localized surface plasmon resonance biosensor applications. The nanostructure profiles under various deposition and etching conditions are simulated in our work. The calculated 3D profiles are verified by the 3D nanostructures fabricated in our experiments, and the calculated 2D profiles are in good agreement with the fabricated nanocrescents reported by another research group. This paper gives a full theoretical solution of the obtainable nanostructure shapes by nanosphere lithography utilizing oblique deposition and perpendicular etching.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10

Similar content being viewed by others

References

  1. Aizpurua J, Hanarp P, Sutherland DS, Kall M, Bryant GW, Garcia de Abajo FJ (2003) Optical properties of gold nanorings. Phys Rev Lett 90(5):057401

    Article  CAS  Google Scholar 

  2. Haynes CL, Duyne RPV (2001) Nanosphere lithography: a versatile nanofabrication tool for studies of size-dependent nanoparticle optics. J Phys Chem B 105(24):5599–5611

    Article  CAS  Google Scholar 

  3. Astilean S (2004) Fabrication of periodic metallic nanostructures by using nanosphere lithography. Rom Rep Phys 56(3):340–345

    Google Scholar 

  4. Haes AJ, Stuart DA, Nie S, Duyne RPV (2004) Using solution-phase nanoparticles, surface-confined nanoparticle arrays and single nanoparticles as biological sensing platforms. J Fluoresc 14(4):355–367

    Article  CAS  Google Scholar 

  5. Jensen TR, Malinsky MD, Haynes CL, Duyne RPV (2000) Nanosphere lithography: tunable localized surface plasmon resonance spectra of silver nanoparticles. J Phys Chem B 104(45):10549–10556

    Article  CAS  Google Scholar 

  6. Hulteen JC, Duyne RPV (1995) Nanosphere lithography: A materials general fabrication process for periodic particle array surfaces. J Vac Sci Technol A Vac Surf Films 13(3):1553–1558

    Article  Google Scholar 

  7. Shumaker-Parry JS, Rochholz H, Kreiter M (2005) Fabrication of crescent-shaped optical antennas. Adv Mater 17:2131–2134

    Article  CAS  Google Scholar 

  8. Maier SA, Kik PG, Atwater HA, Meltzer S, Harel E, Koel BE, Requicha AAG (2003) Local detection of electromagnetic energy transport below the diffraction limit in metal nanoparticle plasmon waveguides. Nat Mater 2:229–232

    Article  CAS  Google Scholar 

  9. Maier SA, Atwater HA (2005) Plasmonics: localization and guiding of electromagnetic energy in metal/dielectric structures. J Appl Phys 98:011101

    Article  Google Scholar 

  10. Haynes CL, McFarland AD, Zhao L, Duyne RPV, Schatz GC, Gunnarsson L, Prikulis J, Kasemo B, Käll M (2003) Nanoparticle optics: the importance of radiative dipole coupling in two-dimensional nanoparticle arrays. J Phys Chem B 107(30):7337–7342

    Article  CAS  Google Scholar 

  11. Grigorenko AN, Geim AK, Gleeson HF, Zhang Y, Firsov AA, Khrushchev IY, Petrovic J (2005) Nanofabricated media with negative permeability at visible frequencies. Nature 438:335–338

    Article  CAS  Google Scholar 

  12. Fang N, Lee H, Sun C, Zhang X (2005) Sub-diffraction-limited optical imaging with a silver superlens. Science 308:534–537

    Article  CAS  Google Scholar 

  13. Lu Y, Liu GL, Kim J, Mejia YX, Lee LP (2005) Nanophotonic crescent moon structures with sharp edge for ultrasensitive biomolecular detection by local electromagnetic field enhancement effect. Nano Lett 5(1):119–124

    Article  CAS  Google Scholar 

  14. Kelly KL, Coronado E, Zhao LL, Schatz GC (2003) The optical properties of metal nanoparticles: the influence of size, shape, and dielectric environment. J Phys Chem B 107(3):668–677

    Article  CAS  Google Scholar 

Download references

Acknowledgements

This work was financially supported by the A*STAR project “Localized Surface Plasmon Resonance (LSPR) MEMS Device with Nano-structured Noble Metal,” granted number IMRE/06-1R0320. We also acknowledge some fabrication support and simulation suggestions provided by the MicroFabrication Laboratory in the Electrical and Electronic Engineering School of Nanyang Technological University.

Author information

Authors and Affiliations

  1. Institute of Materials Research and Engineering, 3 Research Link, Singapore, 117602, Singapore

    Xiaodong Zhou, Wolfgang Knoll & Li Wei Yen

  2. Department of Mechanical Engineering, National University of Singapore, 9 Engineering Drive 1, Singapore, 117576, Singapore

    Selven Virasawmy

  3. School of Electrical and Electronic Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore, 639798, Singapore

    Kai Yu Liu & Man Siu Tse

Authors
  1. Xiaodong Zhou
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Selven Virasawmy
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Wolfgang Knoll
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Kai Yu Liu
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Man Siu Tse
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Li Wei Yen
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Xiaodong Zhou.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Zhou, X., Virasawmy, S., Knoll, W. et al. Profile Simulation and Fabrication of Gold Nanostructures by Separated Nanospheres with Oblique Deposition and Perpendicular Etching. Plasmonics 2, 217–230 (2007). https://doi.org/10.1007/s11468-007-9040-0

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11468-007-9040-0

Keywords

Search

Navigation