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Preparation of BST nanocrystals embedded in SiO2 film by magnetron sputtering for nonvolatile memory applications

  • Article
  • Materials Science
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Chinese Science Bulletin

Abstract

We develop a method that uses magnetron sputtering to fabricate barium strontium titanate (BST) nanocrystals embedded in dielectric SiO2 films. Transmission electron microscope images show that the BST nanocrystals have an average diameter of 5 nm and are well distributed in the SiO2 film. In addition, we also analyze the BST nanocrystals composition deviation during the sputtering process by electron dispersive spectroscopy.

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Authors and Affiliations

  1. Beijing National Center for Electron Microscopy, Department of Materials Science and Engineering, Tsinghua University, Beijing, 100084, China

    Li Wang, HongFang Sun, HuiHua Zhou & Jing Zhu

Authors
  1. Li Wang
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  2. HongFang Sun
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  3. HuiHua Zhou
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  4. Jing Zhu
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Correspondence to Jing Zhu.

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Wang, L., Sun, H., Zhou, H. et al. Preparation of BST nanocrystals embedded in SiO2 film by magnetron sputtering for nonvolatile memory applications. Chin. Sci. Bull. 56, 1139–1141 (2011). https://doi.org/10.1007/s11434-010-4159-3

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  • DOI: https://doi.org/10.1007/s11434-010-4159-3

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