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Simulated Effects of Measurement Noise on Contact Measurements Between Rough and Smooth Surfaces

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Abstract

To test the accuracy of optically measuring contact, we examined the height distribution histogram of a simulated rough surface contacting a smooth surface. We qualified the technique sensitivity as a function of the inverse signal-to-noise ratio having values ranging from 0 to 0.3. An explanation of how the analysis technique can be applied to Dual Emission Laser-Induced Fluorescence (DELIF) measurements is provided.

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Acknowledgments

We would like to thank Intel Corp. and Cabot Microelectronics Corp. for funding this project. Thanks also go to Len Borucki of Araca Corp. for his input concerning our DELIF data.

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Authors and Affiliations

  1. Department of Mechanical Engineering, Tufts University, 200 College Ave, Anderson Hall Room 204, Medford, MA, 02155, USA

    Caprice Gray, Robert White, Vincent P. Manno & Chris B. Rogers

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  1. Caprice Gray
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  2. Robert White
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  3. Vincent P. Manno
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  4. Chris B. Rogers
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Correspondence to Caprice Gray.

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Gray, C., White, R., Manno, V.P. et al. Simulated Effects of Measurement Noise on Contact Measurements Between Rough and Smooth Surfaces. Tribol Lett 29, 185–192 (2008). https://doi.org/10.1007/s11249-007-9295-9

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  • DOI: https://doi.org/10.1007/s11249-007-9295-9

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