Abstract
Functional nanocrystals are widely considered as novel building blocks for nanostructured materials and devices. Numerous synthesis approaches have been proposed in the solid, liquid and gas phase. Among the gas phase approaches, low pressure nonthermal plasmas offer some unique and beneficial features. Particles acquire a unipolar charge which reduces or eliminates agglomeration; particles can be electrostatically confined in a reactor based on their charge; strongly exothermic reactions at the particle surface heat particles to temperatures that significantly exceed the gas temperature and facilitate the formation of high quality crystals. This paper discusses two examples for the use of low pressure nonthermal plasmas. The first example is that of a constricted capacitive plasma for the formation of highly monodisperse, cubic-shaped silicon nanocrystals with an average size of 35 nm. The growth process of the particles is discussed. The silicon nanocubes have successfully been used as building blocks for nanoparticle-based transistors. The second example focuses on the synthesis of photoluminescent silicon crystals in the 3–6 nm size range. The synthesis approach described has enabled the synthesis of macroscopic quantities of quantum dots, with mass yields of several mg/hour. Quantum yields for photoluminescence as high as 67% have been achieved.
Similar content being viewed by others
References
Alivisatos A.P. (1996) Semiconductor clusters, nanocrystals, and quantum dots. Science 271(5251):933–937
Baldwin R.K., Pettigrew K.A., Garno J.C., Power P.P., Liu G.-Y., Kauzlarich S.M. (2002) Room temperature solution synthesis of alkyl-capped tetrahedral shaped silicon nanocrystals. J. Am. Chem. Soc. 124(7):1150–1151
Banerjee S., Huang S., Yamanaka T., Oda S. (2002) Evidence of storing and erasing of electrons in a nanocrystalline-Si based memory device at 77 K. J. Vac. Sci. Technol. B 20(3):1135–1138
Bapat A., Anderson C., Perrey C.R., Carter C.B., Campbell S.A., Kortshagen U. (2004) Plasma synthesis of single-crystal silicon nanoparticles for novel electronic device applications. Plasma Phys. Controlled Fusion 46(12):B97–B109
Barnard A., Zapol P. (2004) A model for the phase stability of arbitrary nanoparticles as a function of size and shape. J. Chem. Phys. 121(9):4276–4283
Batson P.E., Heath J.R. (1993) Electron energy loss spectroscopy of single silicon nanocrystals: the conduction band. Phys. Rev. Lett. 71(6):911–914
Borsella E., Falconieri M., Botti S., Martelli S., Bignoli F., Costa L., Grandi S., Sangaletti L., Allieri B., Depero L. (2001) Optical and morphological characterization of Si nanocrystals/silica composites prepared by sol–gel processing. Mater. Sci. Eng. B: Solid-State Mater. Adv. Technol. B B79(1):55–62
Bouchoule A., Boufendi L. (1993) Particulate formation and dusty plasma behaviour in argon-silane RF discharge. Plasma Sources Sci. Technol. 2:204
Boufendi L., Bouchoule A. (1994) Particle nucleation and growth in a low-pressure argon-silane discharge. Plasma Sources Sci. Technol. 3:263
Brus L.E. (1991) Quantum crystallites and nonlinear optics. Appl. Phys. A 53:465–474
Brus L.E., Szajowski P.J., Wilson W.L., Harris T.D., Schuppler S., Citrin P.H. (1995) Electronic spectroscopy and photophysics of Si nanocrystals: relationship to bulk c-Si and porous Si. J. Am. Chem. Soc. 117:2915–2922
Buriak J.M. (2002) Organometallic chemistry on silicon and germanium surfaces. Chem. Rev. 102(5):1271–1308
Campbell, S.A., U. Kortshagen, A. Bapat, Y. Dong, S. Hilchie & Z. Shen, 2004. The Production and electrical characterization of free standing cubic single crystal silicon nanoparticles. J. Mater 56(10), 26–28
Canham L. (2000) Gaining light from silicon. Nature 408:411–412
Canham L.T. (1990) Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers. Appl. Phys. Lett. 57:1046
Carlile R.N., Geha S., O’Hanlon J.F., Stewart J.C. (1991) Electrostatic trapping of contamination particles in a process plasma environment. Appl. Phys. Lett. 59:1167
Collins R.T., Fauchet P.M., Tischler M.A. (1997) Porous silicon: from luminescence to LEDs. Phys.Today 50:24
Colvin V.L., Schlamp M.C., Alivisatos A.P. (1994) Light-emitting-diodes made from cadmium selenide nanocrystals and a semiconducting polymer. Nature 370(6488):354–357
Cullis A.G., Canham L.T. (1991) Visible light emission due to quantum size effects in highly porous crystalline silicon. Nature 335:335–338
Dabbousi B.O., Bawendi M.G., Onitsuka O., Rubner M.F. (1995) Electroluminescence from Cdse quantum-dot polymer composites. Appl. Phys. Lett. 66(11):1316–1318
Ding, Y., Y. Dong, A. Bapat, J. Deneen, C.B. Carter, U. Kortshagen & S.A. Campell, 2005. Single nanoparticle semiconductor devices. IEEE Trans. Electron Dev. (accepted for publication)
Ding Z., Quinn B.M., Haram S.K., Pell L.E., Korgel B.A., Bard A.J. (2002) Electrochemistry and electrogenerated chemiluminescence from silicon nanocrystal quantum dots. Science 296:1293–1297
Draeger E.W., Grossman J.C., Williamson A.J., Galli G. (2004) Optical properties of passivated silicon nanoclusters: The role of synthesis. J. Chem. Phys. 120(22):10807–10814
Eaglesham D.J., White A.E., Feldman L.C., Moriya N., Jacobson D.C. (1993) Equilibrium shape of Si. Phys. Rev. Lett. 70(11):1643–1646
Ehbrecht M., Huisken F. (1999) Gas-phase characterization of silicon nanoclusters produced by laser pyrolysis of silane. Phys. Rev. B: Condens. Matter Mater. Phys. 59(4):2975–2985
Franzò G., Irrera A., Moreira E.C., Miritello M., Iacona F., Sanfilippo D., Di Stefano G., Fallica P.G., Priolo F. (2002) Electroluminescence of silicon nanocrystals in MOS structures. Appl. Phys. A: Mat. Sci. Proc. 74:1–5
Friedlander S.K. (2000) Smoke, Dust, and Haze – Fundamentals of Aerosol Dynamics. Oxford University Press, New York
Fu Y., Willander M., Dutta A., Oda S. (2000) Carrier conduction in a Si-nanocrystal-based single-electron transistor-I. Effect of gate bias. Superlattices Microstruct. 28(3):177–187
Furukawa S., Miyasato T. (1988) Three-dimensional quantum well effects in ultrafine silicon particles. Jpn. J. Appl. Phys. 27(11):L2207
Gerberich W.W., Mook W.M., Perrey C.R., Carter C.B., Baskes M.I., Mukherjee R., Gidwani A., Heberlein J., McMurry P.H., Girshick S.L. (2003) Superhard silicon nanospheres. J. Mech. Phys. Solids. 51:979–992
Goldstein A.N., Echer C.M., Alivisatos A.P. (1992) Melting in semiconductor nanocrystals. Science 256:1425–1427
Goree J. (1994) Charging of particles in a plasma. Plasma Sources Sci. Technol. 3:400
Holmes J.D., Ziegler K.J., Doty C., Pell L.E., Johnston K.P., Korgel B.A. (2001) Highly luminescent silicon nanocrystals with discrete optical transitions. J. Am. Chem. Soc. 123:3743–3748
Holtz R.L., Provenzano V., Imam M.A. (1996) Overview of nanophase metals and alloys for gas sensors, getters, and hydrogen storage. Nanostruct. Mater. 7:259–264
Huisken F., Amans D., Ledoux G., Hofmeister H., Cichos F., Martin J. (2003) Nanostructuration with visible-light-emitting silicon nanocrystals. New J. Phys. 5:1–10, Paper No. 10
Kennedy M.K., Kruis F.E., Fissan H., Mehta B.R. (2003) Fully automated, gas sensing, and electronic parameter measurement setup for miniaturized nanoparticle gas sensors. Rev. Sci. Instr. 74(11):4908–4915
Kennedy M.K., Kruis F.E., Fissan H., Mehta B.R., Stappert S., Dumpich G. (2003) Tailored nanoparticle films from monosized tin oxide nanocrystals: particle synthesis, film formation, and size-dependent gas-sensing properties. J. Appl. Phys. 93(1):551–560
Kim T.W., Choo D.C., Shim J.H., Kang S.O. (2002) Single-electron transistors operating at room temperature, fabricated utilizing nanocrystals created by focused-ion beam. Appl. Phys. Lett. 80(12):2168–2170
Klein D.L., Roth R., Lim A.K.L., Alivisatos A.P., McEuen P.L. (1997) A single-electron transistor made from a cadmium selenide nanocrystal. Nature 389:699–701
Kortshagen U., Bhandarkar U. (1999) Modeling of particulate coagulation in low pressure plasmas. Phys. Rev. E 60(1):887
Ledoux G., Gong J., Huisken F., Guillois O., Reynaud C. (2002) Photoluminescence of size-separated silicon nanocrystals: confirmation of quantum confinement. Appl. Phys. Lett. 80(25):4834–4836
Ledoux G., Guillois O., Porterat D., Reynaud C., Huisken F., Kohn B., Paillard V. (2000) Photoluminescence properties of silicon nanocrystals as a function of their size. Phys. Rev. B 62(23):15942–15951
Li X., He Y., Talukdar S.S., Swihart M.T. (2003) Process for preparing macroscopic quantities of brightly photoluminescent silicon nanoparticles with emission spanning the visible spectrum. Langmuir 19(20):8490–8496
Littau K.A., Szajowski P.J., Muller A.J., Kortan A.R., Brus L.E. (1993) A luminescent silicon nanocrystal colloid via a high-temperature aerosol reaction. J. Phys. Chem. 97:1224–1230
Mangolini L., Thimsen E., Kortshagen U. (2005) High-yield plasma synthesis of luminescent silicon nanocrystals. Nano Lett. 5(4):655–659
Matsoukas T. (1997) The coagulation rate of charged aerosols in ionized gases. J. Colloid. Interface Sci. 187:474
Matsoukas T., Russel M. (1995) Particle charging in low-pressure plasmas. J. Appl. Phys. 77:4285
Nayfeh M., Akcakir O., Therrien J., Yamani Z., Barry N., Yu W., Gratton E. (1999) Highly nonlinear photoluminescence threshold in porous silicon. Appl. Phys. Lett. 75(26):4112–4114
Nayfeh M.H., Barry N., Therrien J., Akcakir O., Gratton E., Belomoin G. (2001) Stimulated blue emission in reconstituted films of ultrasmall silicon nanoparticles. Appl. Phys. Lett. 78(8):1131–1133
Nishiguchi K., Oda S. (2000) Electron transport in a single silicon quantum structure using a vertical silicon probe. J. Appl. Phys. 88(7):4186–4190
Onischuk A.A., Levykin A.I., Strunin V.P., Sabelfeld K.K., Panfilov V.N. (2000) Aggregate formation under homogeneous silane thermal decomposition. J. Aerosol Sci. 31(11):1263–1281
Onischuk A.A., Levykin A.I., Strunin V.P., Ushakova M.A., Samoilova R.I., Sabelfeld K.K., Panfilov V.N. (2000) Aerosol formation under heterogeneous/homogeneous thermal decomposition of silane: experiment and numerical modeling. J. Aerosol Sci. 31(8):879–906
O’Regan B., Grätzel M. (1991) A low-cost, high-efficiency solar cell based on dye-sensitized colloidal TiO2 films. Nature 353(6346):737
Ostraat M.L., De Blauwe J.W., Green M.L., Bell L.D., Atwater H.A., Flagan R.C. (2001a) Ultraclean two-stage aerosol reactor for production of oxide-passivated silicon nanoparticles for novel memory devices. Appl. Phys. Lett. 148(5):G265–G270
Ostraat M.L., De Blauwe J.W., Green M.L., Bell L.D., Brongersma M.L., Casperson J., Flagan R.C., Atwater H.A. (2001b) Synthesis and characterization of aerosol silicon nanocrystal nonvolatile floating-gate memory devices. Appl. Phys. Lett. 79(3):433–435
Park N.-M., Kim T.-S., Park S.-J. (2001) Band gap engineering of amorphous silicon quantum dots for light-emitting diodes. Appl. Phys. Lett. 78(17):2575–2577
Pettigrew K.A., Liu Q., Power P.P., Kauzlarich S.M. (2003) Solution synthesis of alkyl- and alkyl/alkoxy-capped silicon nanoparticles via oxidation of Mg2Si. Chem. Mater. 15(21):4005–4011
Puzder A., Williamson A.J., Grossman J.C., Galli G. (2002) Surface chemistry of silicon nanoclusters. Phys. Rev. Lett. 88(9):097401–097404
Puzder A., Williamson A.J., Grossman J.C., Galli G. (2003) Computational studies of the optical emission of silicon nanocrystals. J. Am. Chem. Soc. 125(9):2786–2791
Reboredo F.A., Franceschetti A., Zunger A. (1999) Excitonic transitions and exchange splitting in Si quantum dots. Appl. Phys. Lett. 75(19):2972–2974
Sankaran R.M., Holunga D., Flagan R.C., Giapis K.P. (2005) Synthesis of blue luminescent Si nanoparticles using atmospheric-pressure microdischarges. Nano Lett. 5(3):531–535
Schweigert V.A., Schweigert I.V. (1996) Coagulation in low-temperature plasmas. J. Phys. D: Appl. Phys. 29:655
Selwyn G.S., Haller K.L., Patterson E.F. (1993) Trapping and behavior of particulates in a radio frequency magnetron etching tool. J. Vac. Sci. Technol. A 11:1132
Selwyn G.S., Heidenreich J.E., Haller H.L. (1990) Particle trapping phenomena in radio frequency plasmas. Appl. Phys. Lett. 57:1876
Shen Z., Kim T., Kortshagen U., McMurry P., Campbell S. (2003) Formation of highly uniform silicon nanoparticles in high density silane plasmas. J. Appl. Phys. 94(4):2277–2283
Shi F.G. (1994) Size dependent thermal vibrations and melting in nanocrystals. J. Mater. Res. 9(5):1307–1312
St. John J., Coffer J.L., Chen Y., Pinizzotto R.F. (1999) Synthesis and characterization of discrete luminescent erbium-doped silicon nanocrystals. J. Am. Chem. Soc. 121:1888–1892
Stekolnikov A.A., Furthmüller J., Bechstedt F. (2002) Absolute surface energies of group-IV semiconductors: dependence on orientation and reconstruction. Phys. Rev. B 65 (115318)
Stoffels E., Stoffels W.W., Kroesen G.M.W., Hoog F.J. d. (1996) Dust formation and charging in an Ar/SiH4 radio-frequency discharge. J. Vac. Sci. Technol. A 14:556
Takahashi N., Ishikuro H., Hiramoto T. (2000) Control of Coulomb blockade oscillations in silicon single electron transistors using silicon nanocrystal floating gates. Appl. Phys. Lett. 76(2):209–211
Tiwari S., Rana F., Chan K., Shi L., Hanafi H. (1996a) Single charge and confinement effects in nano-crystal memories. Appl. Phys. Lett. 69:1232
Tiwari S., Rana F., Hanafi H., Hartstein A., Crabbé E.F., Chan K. (1996b) A silicon nanocrystals based memory. Appl. Phys. Lett. 68:1377
Vasiliev I., Chelikowsky J.R., Martin R.M. (2002) Surface oxidation effects on the optical properties of silicon nanocrystals. Phys. Rev. B (Condensed Matter and Materials Physics) 65(12):121302
Volkening F.A., Naidoo M.N., Candela G.A., Holtz R.L., Provenzano V. (1995) Characterization of nanocrystalline palladium for solid state gas sensor applications. Nanostruct. Mater. 5:373–382
Watanabe Y., Shiratani M. (1993) Growth kinetics and behavior of dust particles in silane plasmas. Jpn. J. Appl. Phys. 32:3074
Wilcoxon J.P., Samara G.A. (1999) Tailorable, visible light emission from silicon nanocrystals. Appl. Phys. Lett. 74(21):3164–3166
Wilcoxon J.P., Samara G.A., Provencio P.N. (1999) Optical and electronic properties of Si nanoclusters synthesized in inverse micelles. Phys. Rev. B 60(4):2704–2714
Wolkin M.V., Jorne J., Fauchet P.M., Allan G., Delerue C. (1999) Electronic states and luminescence in porous silicon quantum dots: the role of oxygen. Phys. Rev. Lett. 82(1):197
Zhang Z., Zhao M., Jiang Q. (2001) Melting temperature of semiconductor nanocrystals in the mesoscopic size range. Semicond. Sci. Technol. 16:L33–L35
Zhou Z., Brus L., Friesner R. (2003a) Electronic structure and luminescence of 1.1- and 1.4-nm silicon nanocrystals: oxide shell versus hydrogen passivation. Nano Lett. 3(2):163–167
Zhou Z., Friesner R.A., Brus L. (2003b) Electronic structure of 1 to 2 nm diameter silicon core/shell nanocrystals: surface chemistry, optical spectra, charge transfer, and doping. J. Am. Chem. Soc. 125:15599–15607
Acknowledgments
This work was supported in part by the National Science Foundation under MRSEC award number DMR-0212302, under NIRT-grant DMI-0304211, grant CTS-0500332 and under IGERT award number DGE-0114372, and by InnovaLight, Inc. We acknowledge Dr. Christopher R. Perrey and Professor C. Barry Carter for support with high-resolution TEM.
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Kortshagen, U., Mangolini, L. & Bapat, A. Plasma synthesis of semiconductor nanocrystals for nanoelectronics and luminescence applications. J Nanopart Res 9, 39–52 (2007). https://doi.org/10.1007/s11051-006-9174-6
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11051-006-9174-6