Abstract
Flexible and economic production of complex reflective optical elements is achieved by high-precision machining of aluminum and copper with diamond tools. There is also an increasing demand for complex refractive optical elements like micro lens arrays, Fresnel lenses or prismatic surfaces on silicon wafers or metallic surfaces. For the production of these optical elements, hybrid sol-gel coatings based on methacryloxypropyltrimethoxysilane (MATMS) and zirconium (IV) tetra n-propoxide (ZTP) were deposited on aluminum substrates by spin-coating. The influence of the rotational velocity and the chemical sol composition on the coating thickness was determined. The hardness and elastic modulus of these coatings was measured as a function of the chemical composition. The machining characteristics of these coatings were investigated by high precision turning and fly cutting with diamond tools of different geometry. The resulting surface finish obtained was determined as a function of the machining parameters.
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References
Harnessing Light, National Research Council (ed.) National Academic Press, Wahington, D.C. (1998).
E. Brinksmeier, O. Riemer, W. Preuß, F. Klocke, T. Pfeifer, M. Weck, W. Michaeli, P. Mayr, H.-R. Stock, A. Mehner, G. Goch, and D.A. Lucca, Production Engineering, Annals of the WGP, XI/1 (2004).
A. Mehner, W. Datchary, N. Bleil, P. Mayr, M.J. Klopfstein, and D.A. Lucca, Journal of Sol-Gel Science and Technology (submitted).
M.A. Robertson, R.A. Rudkin, D. Parsonage, and A. Atkinson, Journal of Sol-Gel Science and Technology 26, 291 (2003).
A. Mehner, H. Klümper-Westkamp, F. Hoffmann, and P. Mayr, Thin Solid Films 308/309, 363 (1999).
J.D. Mackenzie and E.P. Bescher, Journal of Sol-Gel Science and Technology 13, 371 (1998).
J.D. Mackenzie and E.P. Bescher, Journal of Sol-Gel Science and Technology 27, 7 (2003).
H. Schmidt, Journal of Sol-Gel Science and Technology 8, 557 (1997).
H. Schmidt, Ceramic Transactions 55, 253 (1999).
H. Schmidt, P.W. Oliveira, and S. Sepeur, 9th Cimtec World Ceramics Congress 451 (2000).
H. Kozuka and M. Hirano, Journal of Sol-Gel Science and Technology 19, 501 (2000).
G.R. Atkins, R. Maryla Lrolikowska, and A. Samoc, Journal of Non-Crystalline Solids 265, 210 (2000).
F. del Monte, P. Cheben, C.P. Grover, and J.D. Mackenzie, Journal of Sol-Gel Science and Technology 15, 73 (1999).
D. Grimme, W. Preuß, and E. Brinksmeier, in Proceedings of the ASPE, 18th Annual Meeting (Portland, Oregon, USA, 2003) p. 467.
H. Kozuka, S. Takenaka, H. Tokita, T. Hirano, Y. Higashi, and T. Hamatani, Journal of Sol-Gel Science and Technology 26, 681 (2003).
H. Kozuka, M. Kajimura, T. Hirano, and K. Katayama, Journal of Sol-Gel Science and Technology 19, 205 (2000).
H. Kozuka and M. Kajimura, Journal of the American Ceramic Society 83, 1056 (2000).
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Datchary, W., Mehner, A., Zoch, H.W. et al. High Precision Diamond Machining of Hybrid Sol-Gel Coatings. J Sol-Gel Sci Technol 35, 245–251 (2005). https://doi.org/10.1007/s10971-005-1835-x
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DOI: https://doi.org/10.1007/s10971-005-1835-x