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Design and Fabrication of Absorber Coupled TES Microbolometers on Continuous Silicon-Nitride Windows

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Abstract

The implementation of TES based microbolometer arrays will achieve unprecedented sensitivities for mm and sub-mm astronomy through fabrication of large format arrays and improved linearity and stability arising from strong electro-thermal feedback. We report on progress in developing TES microbolometers using Mo/Au thin films and Au absorbing structures. We present measurements of suppressing the thermal conductance through the etching of features on a continuous Silicon-Nitride window.

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Authors and Affiliations

  1. Kavli Institute for Cosmological Physics, University of Chicago, Chicago, IL, 60637, USA

    Clarence L. Chang, John E. Carlstrom, Stephan S. Meyer, Tom Crawford, Tom Downes, Jeff McMahon, Kathryn Miknaitis & Joaquin D. Vieira

  2. Material Sciences Division, Argonne National Laboratory, Argonne, IL, 60439, USA

    Aaron Datesman, Valentyn Novosad & Volodymyr G. Yefremenko

Authors
  1. Clarence L. Chang
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  2. John E. Carlstrom
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  3. Aaron Datesman
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  4. Stephan S. Meyer
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  5. Valentyn Novosad
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  6. Volodymyr G. Yefremenko
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  7. Tom Crawford
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  8. Tom Downes
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  9. Jeff McMahon
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  10. Kathryn Miknaitis
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  11. Joaquin D. Vieira
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Correspondence to Clarence L. Chang.

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Chang, C.L., Carlstrom, J.E., Datesman, A. et al. Design and Fabrication of Absorber Coupled TES Microbolometers on Continuous Silicon-Nitride Windows. J Low Temp Phys 151, 245–248 (2008). https://doi.org/10.1007/s10909-007-9639-8

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  • DOI: https://doi.org/10.1007/s10909-007-9639-8

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