Abstract
We simulate the influence of local oxidation with an atomic force microscope (AFM) tip on the surface of a GaAlAs/GaAs heterostructure by means of numerical calculations. Assuming a rectangular shape of the oxide line, we solve the Schrödinger and Poisson equations self-consistently on a two-dimensional surface perpendicular to the oxide line. We observe that the distance between the two-dimensional electron gas (2DEG) and the surface is a crucial parameter for the electron density, confirming experimental 2DEG depletion results.
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May, C., Ensslin, K. & Troyer, M. Self-Consistent potential calculation for locally oxidized Ga[Al]As heterostructures. J Computer-Aided Mater Des 14, 91–96 (2007). https://doi.org/10.1007/s10820-006-9023-z
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DOI: https://doi.org/10.1007/s10820-006-9023-z