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AFM-tip-induced and current-induced local oxidation of silicon and metals

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Authors and Affiliations

  1. IBM Research Division, T.J. Watson Research Center, Yorktown Heights, USA, , , , , , US

    P. Avouris, R. Martel, T. Hertel & R. Sandstrom

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  1. P. Avouris
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  2. R. Martel
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  3. T. Hertel
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  4. R. Sandstrom
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Received: 25 July 1997/Accepted: 1 October 1997

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Avouris, P., Martel, R., Hertel, T. et al. AFM-tip-induced and current-induced local oxidation of silicon and metals . Appl Phys A 66 (Suppl 1), S659–S667 (1998). https://doi.org/10.1007/s003390051218

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  • DOI: https://doi.org/10.1007/s003390051218

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