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Patterned growth of vertically aligned silicon nanowire arrays for label-free DNA detection using surface-enhanced Raman spectroscopy

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Abstract

Patterning is of paramount importance in many areas of modern science and technology. As a good candidate for novel nanoscale optoelectronics and miniaturized molecule sensors, vertically aligned silicon nanowire (SiNW) with controllable location and orientation is highly desirable. In this study, we developed an effective procedure for the fabrication of vertically aligned SiNW arrays with micro-sized features by using single-step photolithography and silver nanoparticle-induced chemical etching at room temperature. We demonstrated that the vertically aligned SiNW arrays can be used as a platform for label-free DNA detection using surface-enhanced Raman spectroscopy (SERS), where the inherent “fingerprint” SERS spectra allows for the differentiation of closely related biospecies. Since the SiNW array patterns could be modified by simply varying the mask used in the photolithographic processing, it is expected that the methodology can be used to fabricate label-free DNA microarrays and may be applicable to tissue engineering, which aims to create living tissue substitutes from cells seeded onto 3D scaffolds.

Schematic illustration of fabrication procedures of SiNWs patterns

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Acknowledgments

The financial support of Key Laboratory Funding Scheme of Shenzhen Municipal Government, Shenzhen Double 100 Science, and Technology Project and the Innovation and Technology Fund (Project No. ITS/353/09) is gratefully acknowledged.

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Authors and Affiliations

  1. Shenzhen Key Laboratory of Biochip Technology, Biotech and Health Centre, City University of Hong Kong, Shenzhen, China

    Changqing Yi, Huayang Fu & Mengsu Yang

  2. Department of Biology and Chemistry, City University of Hong Kong, Hong Kong, SAR, China

    Changqing Yi, Cheuk-Wing Li, Mingliang Zhang, Suijian Qi, Ning-Bew Wong & Mengsu Yang

  3. Center of Super-Diamond and Advanced Films and Department of Physics and Materials Science, City University of Hong Kong, Hong Kong, SAR, China

    Mingliang Zhang & Shuit-Tong Lee

Authors
  1. Changqing Yi
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  2. Cheuk-Wing Li
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  3. Huayang Fu
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  4. Mingliang Zhang
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  5. Suijian Qi
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  6. Ning-Bew Wong
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  7. Shuit-Tong Lee
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  8. Mengsu Yang
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Correspondence to Mengsu Yang.

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Yi, C., Li, CW., Fu, H. et al. Patterned growth of vertically aligned silicon nanowire arrays for label-free DNA detection using surface-enhanced Raman spectroscopy. Anal Bioanal Chem 397, 3143–3150 (2010). https://doi.org/10.1007/s00216-010-3889-z

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  • DOI: https://doi.org/10.1007/s00216-010-3889-z

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