Skip to main content
SpringerLink
Log in

Reduction of the dislocation density for GaAs thin films on Si substrates grown by molecular beam epitaxy using the two-step growth method

  • Published:
Journal of Materials Science Letters

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

References

  1. R. Kay, R. Bean, K. Zanio, C. Ito and D. Mcityre, Appl. Phys. Lett. 51 (1987) 2211.

    Google Scholar 

  2. T. J. De Lyon, J. A. Roth, O. K. Wu, S. M. Johnson and C. A. Cockrum, ibid. 63 (1993) 818.

    Google Scholar 

  3. B. Dietrich, H. J. Osten, H. Rocker, M. Methfessel and P. Zaumseil, Phys. Rev. B 49 (1994) 17185.

    Google Scholar 

  4. P. N. Uppal and H. Kroemer, J. Appl. Phys. 58 (1985) 2195.

    Google Scholar 

  5. T. H. Windhorn and G. H. Metze, Appl. Phys. Lett. 47 (1981) 1031.

    Google Scholar 

  6. S. M. Vernon, V. E. Haven, S. P. Tobin and R. G. Wolfson, J Cryst. Growth 77 (1986) 580.

    Google Scholar 

  7. J. Y. Leem, D. Y. Kim, T. W. Kang, J. J. Lee and J. E. Oh, Appl. Phys. Lett. 57 (1990) 2228.

    Google Scholar 

  8. M. K. Lee, R. H. Horng, D. S. Wuu and P. C. Chen, ibid. 59 (1991) 207.

    Google Scholar 

  9. D. Y. Kim, T. W. Kang, J. Y. Leem and T. W. Kim, J. Appl. Phys. 74 (1993) 4268.

    Google Scholar 

  10. Y. Fukuda, Y. Kadota and Y. Ohmachi, Jpn. J Appl. Phys. 27 (1988) 485.

    Google Scholar 

  11. P. Sheldon, B. G. Yacobi, K. M. Jones and D. J. Donlevy, J. Appl. Phys. 58 (1985) 4186.

    Google Scholar 

  12. A. Ishizaka and Y. Shiraki, J. Electrochem. Soc. 133 (1986) 666.

    Google Scholar 

  13. Y. J. Mii, T. L. Lin, Y. C. Kao, B. J. Wu, K. L. Wang, C. W. Nieh, D. N. Jamieson and J. K. Liu, J Vacuum Sci. Technol. B 6 (1988) 696.

    Google Scholar 

  14. O. Modelung, N. Schulz and H. Weiss, (editors) “Landolt-Bornstein”, Vol. 17b (Springer, Heidelberg, 1982).

    Google Scholar 

  15. B. A. Weinstein and M. Cardona, Phys. Rev. B 5 (1972) 3120.

    Google Scholar 

  16. R. Fisher, W. T. Masselink, J. Klem, T. Henderson, T. C. Mcglinn, M. V. Klein, H. Morkoc, J. H. Mazer and J. Washburn, J. Appl. Phys. 58 (1985) 374.

    Google Scholar 

  17. F. Cerdeira, C. J. Buchenauer, F. H. Pollak and M. Cardona, Phys. Rev. B 5 (1972) 580.

    Google Scholar 

  18. W. Stoltz, F. E. G. Guimaraes and K. Ploog, J. Appl. Phys. 63 (1988) 492.

    Google Scholar 

  19. Y. Fukuda, Y. Kadota and Y. Ohmachi, Jpn. J. Appl. Phys. 27 (1988) 485.

    Google Scholar 

  20. Y. Chen, A. Freundlich, H. Kamada and G. Neu, Appl. Phys. Lett. 54 (1989) 45.

    Google Scholar 

  21. A. Ishizaka and Y. Shiraki, J. Electrochem. Soc. 133 (1986) 666.

    Google Scholar 

  22. R. M. Lum, J. K. Klingert, B. A. Davidson and M. G. Lamont, Appl. Phys. Lett. 51 (1987) 36.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Physics, Chonju Woosuk University, 565-800, WanJu-kun Chon Buk, Korea

    Y. D. Woo & H. I. Lee

  2. Department of Physics, Dongguk University, 3-26 Pil-dong, 100-715, Chung-ku, Seoul, Korea

    T. W. Kang

  3. Department of Physics, Kwangwoon University, 447-1 Wolgye-dong, 139-701, Nowon-ku, Seoul, Korea

    T. W. Kim

  4. Device Research Laboratory, Electrical Engineering Department, University of California, 7619 Boelter Hall, 90024, Los Angeles, CA, USA

    K. L. Wang

Authors
  1. Y. D. Woo
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. H. I. Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. T. W. Kang
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. T. W. Kim
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. K. L. Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Woo, Y.D., Lee, H.I., Kang, T.W. et al. Reduction of the dislocation density for GaAs thin films on Si substrates grown by molecular beam epitaxy using the two-step growth method. J Mater Sci Lett 14, 1340–1343 (1995). https://doi.org/10.1007/BF00270721

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00270721

Keywords

Search

Navigation