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Luminescence and electronic structure of amorphous silicon nitride. Nitrogen subsystem

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References

  1. V. I. Belyi and A. A. Rastorguev,Zh. Strukt. Khim.,41, No. 3, 644–647 (2000).

    Google Scholar 

  2. V. I. Belyi et al.,Silicon Nitride in Electronics, Elsevier, Amsterdam (1998).

    Google Scholar 

  3. A. F. Plotnikov, V. N. Seleznev, and D. N. Tokarchuk,Mikroelektronika,8, No. 6, 554–558 (1979).

    Google Scholar 

  4. J. Robertson and M. J. Powell,Appl. Phys. Lett,44, No. 4, 415–417 (1984).

    Article  CAS  Google Scholar 

  5. J. Robertson,Phil. Mag. B,43, No. 1, 47–77 (1991).

    Google Scholar 

  6. V. I. Belyi and A. A. Rastorguev, Chem. Sust. Dev.,8, Nos. 1/2 (2000).

  7. V. A. Nadolinnyi, V. V. Vasiliev, and I. P. Mikhailovskii,Phys. Stat. Sol. (a),116, K105-K109 (1989).

    Article  CAS  Google Scholar 

  8. W. I. Warren, F. C. Kong, E. N. Poindexter, et al.,J. Appl. Phys.,70, No. 2, 346–354 (1991).

    Article  CAS  Google Scholar 

  9. V. V. Vasiliev, “Photoluminescence of amorphous silicon nitride layers,” Physical and Mathematical Sciences Candidate's Dissertation, Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences (1989).

  10. W. L. Warren, J. Kanincki, J. Robertson, and P. M. Lenahan,Appl. Phys. Lett.,59, No. 14, 1699–1701 (1991).

    Article  CAS  Google Scholar 

  11. C. T. Kirk,J. Appl. Phys.,50, No. 6, 4190–4195 (1979).

    Article  CAS  Google Scholar 

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Translated fromZhurnal Strukturnoi Khimii, Vol. 41, No. 3, pp. 647-649, May–June, 2000.

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Belyi, V.I., Rastorguev, A.A. Luminescence and electronic structure of amorphous silicon nitride. Nitrogen subsystem. J Struct Chem 41, 529–530 (2000). https://doi.org/10.1007/BF02742014

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  • DOI: https://doi.org/10.1007/BF02742014

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