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An accurate computer correction program for quantitative electron probe microanalysis

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Abstract

The aim of this paper is to present a practical and accurate program of correction based on a new mathematical description of φ(ϱz), which allows a global correction combining atomic number and absorption correction [ZA]. Characteristic and continuum fluorescence corrections are also included to complete the program. Elements of atomic number in the range 4 <Z < 92 and X-ray emission linesKα,Kβ,Lα,Lβ,Mα andMβ are taken into account by the program which is especially designed for difficult cases (light elements, low overvoltages, low accelerating voltages).

This correction program written in Fortran is designed to work off line under DOS or WINDOWS graphic operating systems on PC compatible microcomputers. The WINDOWS user interface environment makes the software easy to use. The computation and plot of φ(ϱz) depth distribution function as well as the printing of physical parameters enable the user to easily optimize the experimental conditions.

This procedure has been tested on various databases (Pouchou and Pichoir, Love et al. and Bastin et al.) for medium to heavy elements. For the light elements (O, C andB) Bastin's database has been used. The results presented furthermore reveal the good accuracy of the method and allow a comparison with other correction procedures.

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References

  1. J. Philibert, in:Proceedings of the 3th Intermational Conference on X-Ray Optics and Microanalysis (H. H. Patee, V. E. Cosslett, A. Engström, eds.), Academic Press, New York 1963, p. 379.

    Google Scholar 

  2. J. Ruste, C. Zeller,C.R. Acad. Sci. Paris 1977,B284, 507.

    Google Scholar 

  3. S. Tanuma, K. Nagashima,Mikrochim. Acta 1983,I, 299.

    Google Scholar 

  4. S. Tanuma, K. Nagashima,Mikrochim. Acta 1984,III, 265.

    Google Scholar 

  5. M. Gaber,X-Ray Spectrom. 1992,21, P 215.

    Google Scholar 

  6. V. D. Scott, G. Love,X-Ray Spectrom. 1992,21, 27.

    Google Scholar 

  7. P. Duncumb,Microbeam Analysis, San Francisco Press, San Francisco, 1992, p. 1674.

    Google Scholar 

  8. R. H. Packwood, J. D. Brown,X-Ray Spectrom. 1981,10, 138.

    Google Scholar 

  9. G. F. Bastin, F. J. J. Van Loo, H. J. M. Heijligers,X-Ray Spectrom. 1984,13, 91.

    Google Scholar 

  10. G. F. Bastin, H. J. M. Heijligers, F. J. J. Van Loo,Scanning 1986,8, 45.

    Google Scholar 

  11. J. L. Pouchou, F. Pichoir,Proc. ICXOM 11 (J. D. Brown, R. H Packwood, eds.), 1986, p. 249.

  12. J. L. Pouchou, F. Pichoir,Microbeam Analysis (D. E. Newbury, ed.) San Francisco Press, San Francisco, 1988, p. 315.

    Google Scholar 

  13. W. Rehbach, P. Karduck,Microbeam Analysis (D. E. Newbury, ed.), San Francisco Press, San Francisco, 1988, p. 285.

    Google Scholar 

  14. C. Merlet,Mikrochim. Acta [Suppl.] 1992,12, 107.

    Google Scholar 

  15. J. Riveros, G. Castellano,X-Ray Spectrom. 1993,22, 3.

    Google Scholar 

  16. C. Merlet,Proc. ICXOM XIII (P. B. Kenway, P. J. Duke, G. W. Lorimer, T. Mulvey, I. W. Drummond, G. Love, A. G. Michette, M. Stedman, eds.), IOP, 1993, p. 123.

  17. R. Castaing, J. Henoc,Proc. ICXOM 4 (R. Castaing, P. Deschamps, J. Philibert, eds.), Hermann, Paris 1965, p. 120.

    Google Scholar 

  18. J. Ruste,J Microsc. Spectrosc. Electron. 1979,4, P 123.

    Google Scholar 

  19. C. Zeller, J. Ruste,Rev. Phys. App. 1976,4, P 441.

    Google Scholar 

  20. C. Merlet,X-Ray Spectrom. 1992,21, 229.

    Google Scholar 

  21. C. Merlet, O. Jbara, S. Rondot, J. Cazaux,Surf. Int. Ana. 1992,19, 192.

    Google Scholar 

  22. H. Benhayoune, O. Jbara, C. Merlet, J. Cazaux,Proc. ICXOM XIII (P. B. Kenway, P. J. Duke, G. W. Lorimer, T. Mulvey, I. W. Drummond, G. Love, A. G. Michette, M. Stedman, eds.), IOP, 1993, p. 391.

  23. C. Merlet,1994 (to be submitted).

  24. S. J. B. Reed,Microbeam Analysis, San Francisco Press, San Francisco, 1990, p. 109.

    Google Scholar 

  25. G. Springer, B. Rosner,Proc. ICXOM 5 (G. Mollenstedt, K. H. Gaukler, eds.), Springer, Berlin Heidelberg New York, 1969, 170.

    Google Scholar 

  26. G. Springer,Proc. ICXOM 6 (G. Shinoda, K. Kohra, T. Ichinokawa, eds.), University of Tokyo Press, Tokyo, 1972, p. 141.

    Google Scholar 

  27. I. Farthing, G. Love, V. D. Scott, C. T. Walker,Proc. ICXOM XIII (P. B. Kenway, P. J. Duke, G. W. Lorimer, T. Mulvey, I. W. Drummond, G. Love, A. G. Michette, M. Stedman, eds.), IOP, 1993, p. 145.

  28. B. Henke, P. Lee, T. Tanaka, R. Shimabukuro, B. Fujikawa,At. Data Nucl. Data Tables 1982,27, 1.

    Google Scholar 

  29. G. F. Bastin, H. J. M. Heijligers,Report Eindhoven Univ. Techn. Netherlands, 1984, ISBN 90-6819-002-4.

  30. G. F. Bastin, H. J. M. Heijligers,Report Eindhoven Univ. Techn. Netherlands, 1986, ISBN 90-6819-006-7.

  31. G. F. Bastin, H. J. M. Heijligers,Report Eindhoven Univ. Techn. Netherlands, 1990, ISBN 90-6819-012-1.

  32. K. F. J. Heinrich,Proc. ICXOM 11 (J. D. Brown, R. H. Packwood, eds.), 1986, p. 67.

  33. K. F. J. Heinrich,Microbeam Analysis, San Francisco Press, San Francisco, 1992, p. 1638.

    Google Scholar 

  34. D. A. Sewell, G. Love, V. D. Scott,J. Phys. D 1985,18, 1233.

    Google Scholar 

  35. J. L. Pouchou, F. Pichoir,Microbeam Analysis (D. E. Newbury, ed.), San Francisco Press, San Francisco, 1988, p. 319.

    Google Scholar 

  36. A. P. Mackenzie,Proc. ICXOM XIII (P. B. Kenway, P. J. Duke, G. W. Lorimer, T. Mulvey, I. W. Drummond, G. Love, A. G. Michette, M. Stedman, eds.), IOP, 1993, p. 127.

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Merlet, C. An accurate computer correction program for quantitative electron probe microanalysis. Mikrochim Acta 114, 363–376 (1994). https://doi.org/10.1007/BF01244563

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