Abstract
The groove structure in polycarbonate substrates, commonly used in the fabrication of optical discs, has been studied with the scanning tunnelling microscope. Comparative studies of the same structures were also performed using more conventional scanning electron microscopy and transmission electron microscopy techniques. These studies illustrate the ability to characterize the shape of man-made structures that are commonly recorded in these polymer-based materials. The scanning tunnelling microscope images show the superiority of this technique for detailed cross-sectional studies of the profiles of structures with typical dimensions ∼ 500 nm in width by ∼ 50 nm in depth.
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Baro, A.M., Vazquez, L., Bartolame, A. et al. A scanning tunnelling microscope study of groove structures in polycarbonate optical discs. J Mater Sci 24, 1739–1747 (1989). https://doi.org/10.1007/BF01105699
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DOI: https://doi.org/10.1007/BF01105699