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Deposition of improved optically selective conductive tin oxide films by spray pyrolysis

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Abstract

Antimony-doped SnO2 films with a resistivity as low as 9×10−4 Ωcm were prepared by spray pyrolysis. Structural, electrical and optical properties were studied by varying the antimony concentration, film thickness and deposition temperature. About 94% average transmission in the visible region and about 87% infrared reflectance were obtained for antimony-doped SnO2 films by a systematic optimization of the preparation parameters. As the best combination, an average transmission of 88% in the visible region and an infrared reflectance of 76% was possible for the doped SnO2 films.

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References

  1. K. Ishiguro, T. Sasaki, T. Arai andI. Imai,J. Phys. Soc. Jpn. 13 (1958) 296.

    Google Scholar 

  2. R. L. Weiher andR. P. Ley,J. Appl. Phys. 37 (1966) 299.

    Google Scholar 

  3. H. K. Muller,Phys. Status Solidi 27 (1968) 723.

    Google Scholar 

  4. O. V. Vorob'eva andT. F. Polurotova,Ijv. Akad. Nauk USSR 7 (1971) 206.

    Google Scholar 

  5. C. G. Fonstad andR. H. Redicker,J. Appl. Phys. 42 (1971) 2911.

    Google Scholar 

  6. H. Kim andH. A. Laitinen,J. Amer. Ceram. Soc. 58 (1975) 23.

    Google Scholar 

  7. A. G. Sabnis andL. D. Feisal,J. Vac. Sci. Technol. 14 (1977) 865.

    Google Scholar 

  8. R. H. Bube,J. Appl. Phys. 49 (1978) 304.

    Google Scholar 

  9. E. Leja, J. Korecki, K. Krop andK. Toll,Thin Solid Films 59 (1979) 147.

    Google Scholar 

  10. R. Pommier, C. Gril andJ. Marucchi,ibid. 77 (1981) 91.

    Google Scholar 

  11. G. Frank, E. Kauer andH. Kostlin,ibid. 77 (1981) 107.

    Google Scholar 

  12. K. B. Sundaram andG. K. Bhagwat,J. Phys. D. 14 (1981) 333.

    Google Scholar 

  13. H. S. Soni, S. D. Sathaye andA. P. B. Sinha,Ind. J. Pure Appl. Phys. 21 (1983) 197.

    Google Scholar 

  14. B. J. Baliga andS. K. Gandhi,J. Electrochem. Soc. 123 (1976) 941.

    Google Scholar 

  15. Z. M. Jarzebski andJ. P. Marton,ibid. 123 (1976) 199C.

    Google Scholar 

  16. Idem, ibid. 123 (1976) 299C.

    Google Scholar 

  17. Idem, ibid. 123 (1976) 333C.

    Google Scholar 

  18. C. M. Lampert,Sol. Energy Mater. 6 (1981) 1.

    Google Scholar 

  19. J. C. Manifacier,Thin Solid Films 90 (1982) 297.

    Google Scholar 

  20. K. L. Chopra, S. Major andD. K. Pandya,ibid. 102 (1983) 1.

    Google Scholar 

  21. E. Shanthi, V. Dutta, A. Banerjee andK. L. Chopra,J. Appl. Phys. 51 (1980) 6243.

    Google Scholar 

  22. J. C. C. Fan, F. J. Bachner, G. H. Foley andP. M. Zavracky,Appl. Phys. Lett. 25 (1974) 693.

    Google Scholar 

  23. D. Pramanik, A. J. Sievers andR. H. Silsbee,Solar Energy Mater. 2 (1979) 81.

    Google Scholar 

  24. D. B. Fraser andH. D. Cook,J. Electrochem. Soc. 119 (1972) 1368.

    Google Scholar 

  25. R. P. Howson andM. I. Ridge,Thin Solid Films 77 (1981) 119.

    Google Scholar 

  26. M. John Blocher Jr,ibid. 77 (1981) 51.

    Google Scholar 

  27. J. C. Manifacier, J. P. Fillard andJ. M. Bind,ibid. 77 (1981) 67.

    Google Scholar 

  28. G. Blandenet, M. Court andY. Lagarde,ibid. 77 (1981) 81.

    Google Scholar 

  29. H. W. Lehmann andR. Widmer,ibid. 27 (1975) 359.

    Google Scholar 

  30. I. S. Mulla, MSc thesis University of Poona (1981).

  31. T. Arai,J. Phys. Soc. Jpn. 15 (1960) 916.

    Google Scholar 

  32. J. Kane, H. P. Schweizer andW. Kern,J. Electrochem. Soc. 123 (1976) 270.

    Google Scholar 

  33. M. Ramanujam andD. B. Ghare,J. Ind. Inst. Sci. 58 (1976) 254.

    Google Scholar 

  34. A. F. Carroll andL. H. Slack,J. Electrochem. Soc. 123 (1976) 1889.

    Google Scholar 

  35. I. S. Mulla, V. J. Rao, H. S. Soni, S. Badrinarayanan andA. P. B. Sinha, in preparation.

  36. C. A. Vincent,J. Electrochem. Soc. 119 (1972) 515.

    Google Scholar 

  37. V. K. Miloslavskii andS. P. Lyashenko,Opt. Spectrosc. 111 (1960) 455.

    Google Scholar 

  38. F. Van Der Maesen andC. H. M. Witmer, Proceedings of the 17th International Conference on the Physics of Semiconductors, Paris (1964) 1211.

  39. J. Kane, H. P. Schweizer andW. Kern,J. Electrochem. Soc. 122 (1975) 1144.

    Google Scholar 

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Authors and Affiliations

  1. Physical Chemistry Division, National Chemical Laboratory, 411008, Poona, India

    I. S. Mulla, H. S. Soni, V. J. Rao & A. P. B. Sinha

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  1. I. S. Mulla
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  2. H. S. Soni
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  3. V. J. Rao
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  4. A. P. B. Sinha
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Mulla, I.S., Soni, H.S., Rao, V.J. et al. Deposition of improved optically selective conductive tin oxide films by spray pyrolysis. J Mater Sci 21, 1280–1288 (1986). https://doi.org/10.1007/BF00553263

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  • DOI: https://doi.org/10.1007/BF00553263

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