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Modelling and experimental studies of properties of TiN coatings

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Abstract

This paper reviews pertinent research in the area of theoretical modelling and experimental studies of the various properties of titanium nitride coatings. A brief description of methods commonly used for the deposition of TiN coatings is discussed first. The important properties of these coatings are presented next. Various theoretical models for hardness, adhesion and residual stresses, and experimental work, both in support of these models and on other relevant properties such as corrosion, abrasion and colour, are cited and discussed. Finally, research issues and developmental needs in pertinent areas are identified and explicated.

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References

  1. E. P. DEGARMO, J. T. BLACK and R. KOHSER, “Materials and Processes in Manufacturing”, (Collier-Macmillan, 1989).

  2. A. BHATTACHARYA, “Metal Cutting — Theory and Practice” (Central Book Publishers, Calcutta, 1984).

    Google Scholar 

  3. S. KALPAKJIAN, “Manufacturing Engineering and Technology”, (Addison-Wesley, 1989).

  4. S. CHATTERJEE, T. S. SUDARSHAN and S. CHANDRASHEKHAR, J. Mater. Sci. in press.

  5. D. G. BHAT, in “Surface Modification Technologies” (Metallurgical Society, 1988) pp. 1–21.

  6. R. F. BUNSHAH and H. C. RAGHURAM, J. Vac. Sci. Technol. 9 (1972) 1385.

    Article  CAS  Google Scholar 

  7. A. J. ARONSON, D. CHEN and W. H. CLASS, Thin Solid Films 72 (1980) 535.

    Article  CAS  Google Scholar 

  8. A. MUMTAZ and W. H. CLASS, J. Vac. Sci. Technol. 20 (1982) 345.

    Article  CAS  Google Scholar 

  9. J. A. THORNTON, Thin Solid Films 107 (1983) 3.

    Article  CAS  Google Scholar 

  10. W. D. SPROUL, ibid. 107 (1983) 141.

    Article  CAS  Google Scholar 

  11. Idem, J. Vac. Sci. Technol. A 4 (1986) 2874.

    Article  CAS  Google Scholar 

  12. P. D. FLOOD and P. J. WALSH, Cutting Tool Engng (Jan/Feb 1982) 4.

  13. E. MOLL, R. BAHL, E. PULKER and E. BERGMAN, Surf. Coatings Technol. 39/40 (1989) 475.

    Article  Google Scholar 

  14. H. RANDHAWA and P. G. JOHNSON, ibid. 31 (1987) 303.

    Article  CAS  Google Scholar 

  15. D. A. HARDWICK, Thin Solid Films 154 (1987) 109.

    Article  CAS  Google Scholar 

  16. E. TOROK, A. J. PERRY, L. CHOLLET and W. D. SPROUL, ibid. 153 (1987) 37.

    Article  Google Scholar 

  17. P. J. BURNETT and D. S. RICKERBY, Coating Hardness, Surf. Engng 3 (1) (1987) 69.

    Article  CAS  Google Scholar 

  18. M. E. O'HERN, R. H. PARRISH and W. C. OLIVER, Thin Solid Films 181 (1989) 357.

    Article  CAS  Google Scholar 

  19. B. JONSSON and S. HOGMARK, ibid. 114 (1984) 257.

    Article  Google Scholar 

  20. B. O. JOHANSSON, J. E. SUNDGREN, J. GREEN, A. ROCKETT and S. A. BARNETT, J. Vac. Sci. Technol. A 3 (1985) 303.

    Article  CAS  Google Scholar 

  21. P. J. BURNETT and D. S. RICKERBY, Thin Solid Films 148 (1987) 41.

    Article  CAS  Google Scholar 

  22. Idem, ibid. 148 (1987) 51.

    Article  CAS  Google Scholar 

  23. Idem, ibid. 157 (1988) 233.

    Article  CAS  Google Scholar 

  24. J. SUNDGREN and H. T. G. HENTZELL, J. Vac. Sci. Technol. A 4 (1985) 2259.

    Article  Google Scholar 

  25. J. C. KNIGHT, T. F. PAGE and I. M. HUTCHINGS, Thin Solid Films 177 (1989) 117.

    Article  CAS  Google Scholar 

  26. T. F. PAGE and J. G. KNIGHT, Surf. Coatings Technol. 39/40 (1989) 339.

    Article  Google Scholar 

  27. D.T. QUINTO, G. J. WOLFE and P. C. JINDAL, Thin Solid Films 105 (1987) 19.

    Article  Google Scholar 

  28. V. VALVODA, R. CERNY, R. KUZEL, J. MUSIL and V. POULEK, ibid. 158 (1988) 225.

    Article  CAS  Google Scholar 

  29. V. VALVODA, R. KUZEL, R. CERNY, J. MUSIL, ibid. 156 (1988) 53.

    Article  CAS  Google Scholar 

  30. J. MUSIL, S. KADLEC, J. VYSKOCIL and V. POULEK, Surf. Coatings Technol. 39/40 (1989) 301.

    Article  Google Scholar 

  31. B. WENDLER, Thin Solid Films 141 (1986) 223.

    Article  CAS  Google Scholar 

  32. V. VALVODA, R. CERNY, R. KUZEL, L. DOBIASOVA, J. MUSIL, V. POULEK and J. VYSKOCIL, ibid. 170 (1989) 201.

    Article  CAS  Google Scholar 

  33. M. K. HIBBS, J. SUNDGREN, B. JACOBSON and B. O. JOHANSSON, ibid. 107 (1983) 149.

    Article  CAS  Google Scholar 

  34. A. J. PERRY, ibid. 81 (1981) 357.

    Article  CAS  Google Scholar 

  35. M. T. LAUGIER, ibid. 117 (1984) 243.

    Article  CAS  Google Scholar 

  36. P. J. BURNETT and D. S. RICKERBY, ibid. 154 (1987) 403.

    Article  CAS  Google Scholar 

  37. E. HUMMER and A. J. PERRY, ibid. 101 (1983) 243.

    Article  CAS  Google Scholar 

  38. Idem, ibid. 101 (1983) 167.

    Article  Google Scholar 

  39. W. SPROUL, ibid. 107 (1983) 141.

    Article  CAS  Google Scholar 

  40. D. J. RICH, A. J. PERRY and P. F. WOERNER, ibid. 154 (1987) 417.

    Article  CAS  Google Scholar 

  41. J. H. JE, E. GYARMATI and A. NAOUMIDIS, ibid. 136 (1986) 57.

    Article  CAS  Google Scholar 

  42. A. J. PERRY, ibid. 78 (1981) 77.

    Article  CAS  Google Scholar 

  43. M. Y. AL-JAROUDI, H. T. G. HENTZELL and J. VALLI, ibid. 154 (1987) 425.

    Article  CAS  Google Scholar 

  44. U. HELMERSSON, B. O. JOHANSSON, J. SUNDGREN, H. T. G. HENTZELL and P. BILLGREN, J. Vac. Sci. Technol. A 3 (1985) 308.

    Article  CAS  Google Scholar 

  45. M. Y. AL-JAROUDI, H. T. G. HENTZELL, S. GONG and A. BENGTSON, Thin Solid Films 195 (1991) 63.

    Article  CAS  Google Scholar 

  46. U. KOPACZ and H. A. JEHN, Thin Solid Films 126 (1985) 265.

    Article  CAS  Google Scholar 

  47. J. VALLI, J. M. MOLARIUS and A. S. KORHONEN, ibid. 157 (1987) 351.

    Article  Google Scholar 

  48. J. E. SUNDGREN, B. O. JOHANSSON and S. KARLSSON, ibid. 105 (1983) 353.

    Article  CAS  Google Scholar 

  49. J. E. SUNDGREN, B. O. JOHANSSON, H. T. G. HENTZELL and S. E. KARLSSON, ibid. 105 (1983) 367.

    Article  CAS  Google Scholar 

  50. J. E. SUNDGREN, B. O. JOHANSSON and S. KARLSSON, ibid. 105 (1983) 385.

    Article  CAS  Google Scholar 

  51. T. ARAI, H. FUJITA and M. WATANABE, ibid. 154 (1987) 307.

    Article  Google Scholar 

  52. P. HEDENQVIST, M. OLSSON and S. SODERBERG, Surf. Engng 5 (1989) 141.

    Article  CAS  Google Scholar 

  53. P. C. JINDAL, D. T. QUINTO and G. J. WOLFE, Thin Solid Films 154 (1987) 361.

    Article  CAS  Google Scholar 

  54. M. SALEHI, T. BELL and P. H. MORTON, paper presented at International Conference on Surface Modification Technologies, San Diego, 1991.

  55. M. BENMALEK, P. GIMENEZ, J. P. PEYRE and C. TOURNIER, ibid.

  56. C. C. CHENG, A. ERDEMIRE and G. R. FENSKE, Surf. Coatings Technol. 39/40 (1989) 365.

    Article  Google Scholar 

  57. H. E. REBENNE, D. G. BHAT and P. F. WOERNER, in Proceedings of 3rd International Conference on Surface Modification Technologies, Neuchatel, Switzerland, August 1989, pp. 1–13.

  58. L. CHOLLET and A. J. PERRY, Thin Solid Films 123 (1985) 223.

    Article  CAS  Google Scholar 

  59. A. J. PERRY and L. CHOLLET, J. Vac. Sci. Technol. 4 (1986) 2801.

    Article  CAS  Google Scholar 

  60. D. S. RICKERBY, ibid. 4 (1986) 2809.

    Article  CAS  Google Scholar 

  61. D. S. RICKERBY, G. ECKOLD, K. T. SCOTT and I. M. BUCKLEY-GOLDER, Thin Solid Films 154 (1987) 125.

    Article  CAS  Google Scholar 

  62. D. S. RICKERBY, A. M. JONES and B. A. BELLAMY, Surf. Coatings Technol. 37 (1989) 111.

    Article  CAS  Google Scholar 

  63. A. J. PERRY, M. JAGNER, W. D. SPROUL and P. J. RUDNIK, ibid. 39/40 (1989) 387.

    Article  Google Scholar 

  64. D. S. RICKERBY and S. J. BULL, ibid. 39/40 (1989) 315.

    Article  Google Scholar 

  65. W. D. SPROUL, P. J. RUDNIK and M. GRAHAM, ibid. 39/40 (1989) 355.

    Article  Google Scholar 

  66. D. S. RICKERBY and P. J. BURNETT, Thin Solid Films 157 (1988) 195.

    Article  CAS  Google Scholar 

  67. W. D. SPROUL, P. J. RUDNIK and C. A. GOGOL, ibid. 171 (1989) 171.

    Article  CAS  Google Scholar 

  68. K. H. KLOOS, E. BROSZEIT, H. M. GRABRIEL and H. J. SCHRODER, ibid. 96 (1982) 67.

    Article  CAS  Google Scholar 

  69. J. MUSIL, L. BARDOS, A. RAJSKY, T. VYSKOCIL, B. DOLEZAL, G. LONCAR, K. DADOUREK and V. KUBICEK, ibid. 136 (1986) 229.

    Article  CAS  Google Scholar 

  70. M. L. HILTON, G. J. VANDENTOP, M. SALMERON and G. A. SOMORJAI, ibid. 154 (1987) 377.

    Article  CAS  Google Scholar 

  71. D. J. RICH and P. F. WOERNER, J. Vac. Sci. Technol. A 4 (1986) 2759.

    Article  CAS  Google Scholar 

  72. A. J. PERRY, Thin Solid Films 170 (1989) 63.

    Article  CAS  Google Scholar 

  73. P. J. MANTYLA, P. J. HELEVIRTA, T. T. LEPISTO and P. T. SIITONEN, ibid. 126 (1985) 275.

    Article  CAS  Google Scholar 

  74. A. S. KORHONEN, J. M. MOLARIUS, E. HARJU and O. FORSEN, in “Surface Modification Technologies IV”, edited by T. S. SUDHARSHAN, D. G. BHAT and M. JEANDIN (Minerals, Metals and Materials Society, 1991) pp. 311–316.

  75. A. J. PERRY, J. Vac. Sci. Technol. A 6 (1988) 2140.

    Article  CAS  Google Scholar 

  76. S. MOTOJIMA and M. KOHNO, Thin Solid Films 137 (1986) 59.

    Article  CAS  Google Scholar 

  77. B. JONSSON, L. AKRE, S. JOHANSSON and S. HOGMARK, ibid. 137 (1986) 65.

    Article  CAS  Google Scholar 

  78. D. S. RICKERBY and P. J. BURNETT, Surf. Coatings Technol. 33 (1987) 191.

    Article  CAS  Google Scholar 

  79. A. MUMTAZ and W. H. CLASS, J. Vac. Sci. Technol. 20 (1982) 345.

    Article  CAS  Google Scholar 

  80. A. J. PERRY, Thin Solid Films 135 (1986) 73.

    Article  CAS  Google Scholar 

  81. Idem, J. Vac. Sci. Technol. A 4 (1986) 2670.

    Article  CAS  Google Scholar 

  82. A. J. PERRY, M. GEORGSON and W. D. SPROUL, Thin Solid Films 157 (1988) 255.

    Article  CAS  Google Scholar 

  83. A. J. PERRY, M. GEORGSON and C. G. RIBBING, J. Vac. Sci. Technol. A 4 (1986) 2674.

    Article  CAS  Google Scholar 

  84. G. SCHILLER, G. BEISTER and W. SIEBER, Thin Solid Films 111 (1984) 259.

    Article  CAS  Google Scholar 

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Chatterjee, S., Sudarshan, T.S. & Chandrashekhar, S. Modelling and experimental studies of properties of TiN coatings. Journal of Materials Science 28, 1989–2006 (1993). https://doi.org/10.1007/BF00367555

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